HRX-OM-R039

Dublin Italy SMC Italia S.p.A. (39) 02-9271-1 Via Garibaldi, 62, l-20061 Carugate, Milano Latvia SMC Pneumatics Latvia SIA (371)781-77-00 mera iel, 1-705, Rga LV-1006 Lithuania SMC Pneumatics Lietuva,UAB (370)5-264-81-26 Oslo g.1, LT-04123 Vilnius Netherlands SMC Pneumatics B.V. (31) 20-531-8 De Ruyterkade 120, NL-1011 AB Amsterdam Norway SMC Pneumatics Norway AS (47) 67-12-90-20 Vollsveien

Secondary Batteries

Fittings and Tubings Fluoropolymer Fittings Hyper Fitting Series LQ1/LQ3 Series LQ3 Series LQ1 Fluoropolymer Tubing Series TL/TIL FEP Tubing (Fluoropolymer) Series TH/TIH Soft Fluoropolymer Tubing Series TD/TID Series TL/TIL Flow Sensor Digital Flow Switch for Deionized Water and Chemicals Series PF2D Monitor Sensor Fluid Control Equipment Series PF2D Air Operated Chemical Valve Series LV

Cooling Capacity: 018 [Cooling Capacity: 1700/1900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: LV (L + V)

Cooling Capacity: 030 [Cooling Capacity: 2500/2900 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: LV (L + V)

Cooling Capacity: 050 [Cooling Capacity: 4500/5000 W (50/60 Hz)], Pipe Thread: N (NPT with PT-NPT Conversion Fitting Set), Option: LV (L + V)

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV manifold base, HIGH PURITY CHEMICAL VALVE, AIR OPERATED

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV manifold base, HIGH PURITY CHEMICAL VALVE, AIR OPERATED

Direct Solenoid

$n &1 OPTIONAI TEFMINAIILOC( nel: AXT 622 5rl Moontlng Scr.rc Inclu&d (2'ls 4r8) 13 DIRECTIO}IAL AIR VALVE INTERFACE REGULATORS S TOP V A LV E & DCS OLE NO SERIES NVS 4,14 Intertace Regulalors Opratlon: OE|lEAAL C-ylnclff pur is contlolld by rn adjustned knob loctld on fia .gl.llalor block, Sl6ct tha rcquircd prcs. surc and push tlla knob unlil il locks.

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See cala og E216lor available aulo swrl.hes Note) Noniolalrng avalable 20mm to 63mm only. 3.)Mounlil :13 Alto sw tch lailmoundng l1 oNo. ot switctes f[ilT-zG---fs-f l pa l FT__i_pc l -xc35 .xctl7 @cy'inder stroke (mm) U" r D ''SeecalaogE2l6lor How toOrder' nformation ' Nol ailable lor boe eze o80 NoleJ Sinq e achg ava lab e 20 10 40mn on y Pnelmat c rcllme 6 ld deta s and opr ons compalb lV

S

A P P L I C AT I O N H O W T O O R D E R (N)VM400 V A LV E M E C H A N I C A L O P E R AT I O N Basic Roller Lever VM-01A Polyacetal roller Roller Lever VM-01AS Hardened Steel Roller One Way Trip VM-02A Polyacetal roller One Way Trip VM-02AS Hardened Steel Roller Straight Plunger VM-05A Roller Plunger VM-06A Polyacetal roller Roller Plunger VM-06AS Hardened Steel Roller Cross Roller Plunger

S

VALVE 18 (N)VM800 SERIES 32 Normally Open or Normally Closed Valve A Variety Of Actuator Types Available Robust Design T E C H N I C A L SPECIFICATIONS Fluid Air Operating Pressure 0 ~ 9.9 Bar / 0 ~ 144PSI Ambient and Fluid Temperature 5 ~ 60C / 41 ~ 140F Effective Orifice (Cv Ffactor) 6mm2(0.33) Recommended Lubricant Turbine Oil #1 (ISO VG32) Port Size 18 H O W T O O R D E R (N)VM800 V A LV

Process Pump

P257014A Fluid Applicable tube O.D/I.D Nominal filtration rating Material Weight (kg) Process pump Cutting oil 6/4.5 60 mesh wire Cast iron/Electroless Ni-P alloy plating 0.2 Strainer Refer to Best Pneumatics No. 4 (HEP500-04) for further details. 12 Series PB Related Products 2 High Purity Chemical Valves Series LV Refer to Best Pneumatics No. 7 for further details.

KP/KPQ/KPG

EPDM Stud Polypropylene Clean blowing system Clean room KP Clean tubing TPH/TPS Clean fitting Clean blow Clean regulator 2 port air operated valve Super mist separator Odor removal filter SR Clean gas filter SFA 10-AMF 10-AME Air micro meter LV Cleaning liquid pressure feed SFB SRH SFC N2 blow N2 gas 15-5-6 Low particulate generation KP Resin: PP Metal: Stainless steel 304 Completely oil

90

This assembly does not include special cable assembly for energy saving switch. w Output specifications A B NPN open collector 2 outputs PNP open collector 2 outputs uConnector assembly ZK2 LV A W e Unit specifications Nil M Unit selection function Note 1) Applicable valve type Lead wire length Nil 6 10 20 30 SI unit only Note 2) Valve type K/R (With supply valve and release valve) Valve

24

Caution MGP with Air Cushion MGP with Rubber Bumper 1000 1000 100 80 63 50 40 32 100 100 80 63 100 25 20 50 10 Load mass [kg] Load mass [kg] 40 16 12 32 1 25 10 20 16 0.1 0.01 1 100 1000 500 100 1000 500 Maximum speed [mm/s] Maximum speed [mm/s] MGP without Cushion (MGP-lV (Water resistant), XB6, XC9, XC22) 1000 100 80 63 50 40 32 100 Load mass [kg] 25 20 10 16 12 1 0.1 0.01 100 1000 Maximum

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 0.19000 lb

A, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A86, 0.23 lb

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 0.17 lb

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 0.18 lb

A unique guide ring on the piston rod eliminates lateral motion of the poppet, increasing seal life and reducing particle formation.Manifold type: stacking, P (IN), A (OUT) type: Common IN/Individual OUT, Valve stations: 2 to 5, Tubing size (port P):  3/8, 1/2., 3/4, Tubing size (port A):  1/4, 3/8, 1/2, 3/4, LV MANIFOLD BASE, HIGH PURITY CHEMICAL VALVE, AIR OPERATED, A90, 0.19 lb