0.4

Station 4 SOL.B 4B SZ Cover SOL.A 5A Station 5 SOL.B 5B SOL.A VF 6A Station 6 SOL.B 6B SOL.A 7A VP4 Station 7 SOL.B 7B SOL.A As the standard electrical wiring specifications, double wiring (connected to SOL. A and SOL. B) is adopted for the internal wiring of each station for 10 stations or less, regardless of valve and option types.

CXWM/CXWL

(mm) Hs Ht Note 1) The dimensions show D-7A and D-A8.

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 6, 10 3 3.3 12.2 15.2 1.2 0.3 16 4.8 5 18.3 22.7 1.5 0.7 20, 25 8.6 9 19.2 25 1.75 1.15 10-5-24

CLK1

Applicable double knuckle joint 0.040 0.076 0.050 0.093 CDP-2 41.2 10 For 32 C1K040-23-54806 57 12 For 40, 50, 63 13 Series CLK1P/CLK1G Accessory Dimensions Limit Switch Mounting Base/Dog Fitting CKM040-48-16070A 75 50 5 58.7 17 4-M5 x 0.8 30.2 20 15 4.5 60 45 40 17 45 20 30 97 42.5 Note 1) Limit switch mounting base and dog fitting can be repositioned by removing the hexagon socket head

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3.3 12.2 15.2 1.2 0.3 3 6, 10 5 18.3 22.7 1.5 0.7 4.8 16 9 19.2 25 1.75 1.15 8.6 20, 25 18 Series MQQ/MQM Safety

Low Friction Cylinders Series MQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 6, 10 3 3.3 12.2 15.2 1.2 0.3 16 4.8 5 18.3 22.7 1.5 0.7 20,25 8.6 9 19.2 25 1.75 1.15 1188 Series MQQ/MQM Specific

Clamp Cylinder with Lock

Pin (for Clevis/Double Knuckle Joint) Dd9 2 x 3 L 4 4 D L Applicable clamp cylinder Part no. 0.040 0.076 0.050 0.093 CLK2lA32 series CDP-2 41.2 10 CLK2ll40 to 63 series CK-P04 57 12 Note) Cotter pin and flat washer are provided as a standard. 14 Series CLK2 Accessories Limit Switch Mounting Base/Dog Fitting 50 75 4 x M5 30.2 58.7 5 17 60 4.5 15 20 45 40 45 17 When you attach a dog fitting

Prefix: CDP (Applicable to 32mm Bore), Suffix: 2 (Applicable to 32mm Bore)

AC Servo Motor Driver (SSCNET Type)

converted into the motor speed and displayed. 0.1r/min (Note 1) 22 Speed command (by 0.1 r/min) The speed command to be given to the motor is displayed. 0.1r/min (Note 1) 23 Torque command Control the torque at the torque control or stopper control. 0.1% (Note 1) 24 Speed limit Control the speed at the torque control or stopper control. 1r/min (Note 1) Digital waveforms CSON, PC, EMG, EM1, CDP

AC Servo Motor Driver (SSCNET /H Type)

An excessive error alarm will occur when margin is 0 pulse. 1pulse Digital waveforms CSON, PC, RES, CSV1, CSV2, CTL1, CTL2, EMG, EM2/1, CRDY, CDP, CLD, CABS, CZCT, CRSTP, CSV3, D1, D2, D3, D4 (Note 2) RD, SA, ZSP, TLC, VLC, INP, WNG, ALM, OP, MBR, DB, BWNG, ALM2, RDY, STO, SMPD, CDPS, CLDS, ABSV, IPF, SPC, MTTR, SSV1, SSV2, STL1, STL2, ZPASS, SABS, SABSE, FLS, RLS, DOG, SSV3 (Note 1) It is

Lateral Load Resisting Low Friction Cylinder Series MQM ø6, ø10, ø16, ø20, ø25

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-T010B CJ-T016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20,25 9 19.2 25 1.75 1.15 17

Clamp Cylinder with Lock Series CLK1

Applicable double knuckle joint 0.040 0.076 0.050 0.093 CDP-2 41.2 10 For 32 C1K040-23-54806 57 12 For 40, 50, 63 13 Clamp Cylinder with Lock With Magnetic Field Resistant Auto Switch Series CLK1P/CLK1G Accessory Dimensions (mm) 1in = 25.4mm Limit Switch Mounting Base/Dog Fitting CKM040-48-16070A 75 50 5 58.7 17 4-M5 x 0.8 30.2 20 15 4.5 60 45 40 17 45 20 30 97 42.5 Note 1) Limit switch

Prefix: CDP, Size: Double Knuckle Pin, 40m Bore

Prefix: CDP, Size: Double Clevis Pin/Double Knuckle Pin for 20, 25, 32mm Bores

MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24

Table of Contents

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24 1 High Power Cylinder

MB

Double clevis style CJP Y XC27 03M, 04M, 05M, 08M, 10M Dimensions CJ2 Double knuckle joint Double knuckle joint pin made of stainless steel CM2 CDP XC27 M03, M05, M08 Clevis pin Knuckle pin CG1 Clevis pin Knuckle pin Stainless steel material Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

HRX-OM-T004

(Request):01030107F4 [CR][LF] (Response):0183027A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 83 Function (03h+80h) 0100 Head address of register out of range 02 Error Code (Specified register address is out of range.) 0007 Quantity of register to read 7A LRC F4 LRC 4.9 Negative response HRS090 Series 4-16 HRX-OM-T004

HRX-OM-R028

(Request):01030107F4 [CR][LF] (Response):0183027A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 83 Function (03h+80h) 0100 Head address of register out of range 02 Error Code (Specified register address is out of range.) 0007 Quantity of register to read 7A LRC F4 LRC 4.9 Negative response HRSH Series 4-16 HRX-OM-R028 Chapter

A_HEC-OM-K001

Signal 1 Thermostat + 2 Thermostat 3 RTD sensor terminal A (internal temp. sensor) 4 RTD sensor terminal B (internal temp. sensor) 5 RTD sensor terminal B (internal temp. sensor) 6 Leak sensor +24V 7 Leak sensor signal input 8 Leak sensor 24VE Signal connector 9-10 Unused Earth FG 4) Terminal block HED003-C2*, HED005-C2*, HED007-C2* MORIMATSU: M111A-7A, Fixed screw M3 Connection cable; 22AWG