MQQ

TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24

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TC Applicable bore size (mm) TD TH TK TN TT TU TV TW TX TY CJ-010B CJ-016B 6, 10 4.5 3.3 29 18 3.1 2 9 40 22 32 12 16 5.5 5 35 20 6.4 2.3 14 48 28 38 16 Clevis pin L l t t m m D d9 d Material: Stainless steel Part no. d Applicable bore size (mm) D l L m t CD-J010 CD-Z015 CDP-1 3 6, 10 3.3 12.2 15.2 1.2 0.3 4.8 16 5 18.3 22.7 1.5 0.7 8.6 20, 25 9 19.2 25 1.75 1.15 10-5-24 1 High Power Cylinder

MB

Double clevis style CJP Y XC27 03M, 04M, 05M, 08M, 10M Dimensions CJ2 Double knuckle joint Double knuckle joint pin made of stainless steel CM2 CDP XC27 M03, M05, M08 Clevis pin Knuckle pin CG1 Clevis pin Knuckle pin Stainless steel material Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-

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Local Area: (800) 258-9200-www.stevenengineering.com +0.070 0 MB-B05 CX +0.070 0 +0.084 0 +0.084 0 +0.084 0 MB-B08 DMB-B12 -X Rotation B 90 Bore size (mm) 20A B A + B + 90 20 25 32, 40 50, 63 50 50 50 50 175 170 170 175 35 30 30 35 A Data Clevis Pin 2-d Dd9 d Note) Cotter pin Bore size (mm) Model l m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Local Area: (800) 258-9200-www.stevenengineering.com +0.070 0 MB-B05 CX +0.070 0 +0.084 0 +0.084 0 +0.084 0 MB-B08 DMB-B12 -X Rotation B 90 Bore size (mm) 20A B A + B + 90 20 25 32, 40 50, 63 50 50 50 50 175 170 170 175 35 30 30 35 A Data Clevis Pin 2-d Dd9 d Note) Cotter pin Bore size (mm) Model l m Dd9 L (Drill through) 3 x 18 l 4 x 25 l 4 x 35 l 4 x 36 l 0.040 0.076 CD-M03 CD-M05 CD-M08 CDP

HRX-OM-X010

W Model Indication screen ON System Information screen 5a Front Status screen 1 Figure 4-2 Main Breaker at ON Press the emergency off [EMO] switch immediately upon ocurrence of abnormal conditions.

IDX-OM-W016

Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (sensitivity of leak current 30mA and rated current 5A). (Prepare by yourself) Specification of power cable Prepare following power cable. Power cable: 1.25mm2(16AWG), Three-cores (including the ground cable), External diameter: about 8 to 12mm.

Stainless Steel Heat

Breaker capacity 5A Sensitivity current 15 to 30mA L Option symbol With heavy duty auto drain A dryer with heavy duty auto drain (ADH4000-04) is installed instead of the float type auto drain (AD44).

Vacuum System Peripherals:

Individual SUP spacer assembly Individual EXH spacer assembly Note Non plug assembly: ZYY3000-NPA Blanking plate assembly: SX3000-75-1A Individual SUP spacer assembly: SY3000-38-2A SUP/EXH block assembly (for R): SX3000-51-3A SUP block disk: SX3000-77-1A Individual EXH spacer assembly: SY3000-39-2A SUP/EXH block assembly (for S): SX3000-51-4A SUP/EXH block assembly (for RS): SX3000-51-5A

2

Outlet voltage A B C D E F Weight IDF-TR500-1 IDF1E-10 to 8E-10 IDU3E-10, 4E-10, 8E-10 78 94 100 64 75 4.2 x 7 (Long hole) 1.5 kg 100 VAC (50 Hz) 100, 110 VAC (60 Hz) 110 VAC (50 Hz) 110 to 120 VAC (60 Hz) Singlephase Singleturn 500 VA IDF-TR1000-1 IDF11E-10, 15E1-10 IDU6E-10, 11E-10, 15E1-10 104 122 134 75 114 4.2 x 9 (Long hole) 4 kg 1 kVA IDF-TR 2 OUTPUT label C A Output outlet Input fuse 5A

0.4

How to Order Connectors Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 Flow/Exhaust Characteristics of Ejector Unit (The flow characteristics are for the supply pressure of 0.5 MPa.)

Vacuum Module: Ejector System Series ZX

(For DC) For ZSE2 For ZSP1 Lead wire length ZY 5A 10 ZS Nil 0.3 m (Standard) How to order If ordering vacuum module with 600 mm or the longer lead wire, specify both vacuum module and connector assembly part numbers. Ordering example) ZX1051-K15LOZ-EC(-Q) 1 pc.

Step Motor Controller

Please download it via our website. http://www.smcworld.com Specifications Basic Specifications Item LECP1 Compatible motor Step motor (Servo/24 VDC) Power supply voltage: 24 VDC 10% Max. current consumption: 3A (Peak 5A) Note 2) Power supply Note 1) [Including the motor drive power, control power supply, stop, lock release] 6 inputs (Photo-coupler isolation) 6 outputs (Photo-coupler isolation

Base Mounted Metal Seal/Rubber Seal Series VQ

With lead wire ZS-20-A ZS-20-5A-50 0.6 m 3 m 5 m Nil 30 50 (The flow characteristics are for the supply pressure of 0.5 MPa.)

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

to Order Valves How to Order Connector Assemblies For 12, 24VDC Indicator light/Surge voltage suppressor Specification SY3000 Single solenoid SY3000-37-3A Double solenoid/ 3 position SY3000-37-4A SY5000/7000 SY5000-37-3A With indicator light/ surge voltage suppressor (non-polar type) U Rated voltage SY5000-37-4A 5 24VDC 6 12VDC Single solenoid with spacer assembly SY5000-37-3A SY5000-37-5A

IDX-OM-W022

Install a Ground Fault Circuit Interrupter(GFCI) to the power supply (IDU8E/11E-20/23 : sensitivity of leak current 30mA and rated current 5A) , (IDU15E1-20/23 : sensitivity of leak current 30mA and rated current 10A). (Prepare by yourself) Specification of power cable Prepare following power cable.

IDX-OM-W023

600mm 050 600mm 600mm 600mm 600mm IDU Series 2 1 IDX-OM-W023 2 2 2 2 6 6-3 IDU8E~15E1 IDF-AB500 14 1 IDU8EIDU15E1 2 2 3 50 50 (IN) (OUT) (IN) (OUT) (IN) (OUT) IN OUT 1 IDU8E IDF-BP320 1 IDU11E IDF-BP322 1 IDU15E1 IDU Series 2 2 IDX-OM-W023 2 2 2 4 10mm 2 2 5 6-1 IEC ()2 IDU8E-1015E1-10100V 100V 30mA 10A IDU8E-2015E1-20200V IDU8E-2315E1-23200V AC200V 30mA 5A

IDX-OM-W053

GFCI 5. 6. 7. 13 1 13 R 13-2 IDFA6E-20-R 5A 30mA 13-3 1) 2) 3) 9.5mm M5 1.25mm 2 L N 6.5mm M3 1.25mm 2 6-3 14-3 13 2 14 T 14 T T 14-2, 14-3 14-1 1. 2. 3. GFCI 4. 5. GFCI 6. 7. 8. 9.

7.5

SJ3000-42-1A-l SJ3000-42-2A-l SJ3000-42-3A-l SJ3000-42-4A-l SJ3000-42-6A-l SJ3000-42-5A For D-sub connector For flat ribbon cable 26 pins For flat ribbon cable 20 pins m: 1 (Connector upward) For flat ribbon cable 10 pins D side m: 2 (Connector lateral) For PC wiring 20 pins For EX180 serial wiring Note) For PC wiring 20 pins with power supply terminal SJ3000-76-2A-05 Note) SI unit is not

0.4

SQ How to Order Connectors VFS Lead wire length (m) ZS-20-A ZS-20-5A-50 Without lead wire (Connector 1 pc., Socket 4 pcs.) With lead wire Nil 30 50 0.6 3 5 VFR Flow/Exhaust Characteristics of Ejector Unit VQ7 (The flow rate characteristics are for the supply pressure of 0.5 MPa.)