High Vacuum L Type Valve

H5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 800/180 200 VAC 800/40 1600/80 1600/80 2400/130 3200/180 consumption (W) Note 1) Initial power and power consumption are nominal values. Note 2) Heaters are not available for size 16.

XLA Series

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

CKZ2N

A B C D E F G H I J L M Part no.

Compact Rotary Actuator Series CRQ2

Applicable model: D-A73, A73H, A73C, C73, C73C, E73A, Z73 D-R73, R73C, 97, 93A, A93, A93V D-A33, A34, A33A, A34A, A44, A44A D-A53, A54, B53, B54 2) When using a 2-color indicator type auto switch (D-A79W, A59W and B59W), the auto switch will constantly remain ON if the connections are reversed.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

D Note) Be sure to use a flat washer for the A type mounting. b) B type mounting (when using the cylinder tube threads) E t E t Compatible Mounting Bolt Dimensions A type mounting B type mounting Model Mounting bolt size D: Bolt length (mm) E (mm) C (mm) Mounting bolt size MQQTB10-D MQQTB16-D MQQTB20-D MQQTB25-D MQQTB30-D MQQTB40-D MQQLB10-D MQQLB16-D MQQLB20-D MQQLB25-D MQQLB30-D MQQLB40

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Size: 10 to 200 B A Magnet Operating range at proper mounting position (Lm/2) Most sensitive position Operating range of single auto switch Lm Reed switch Solid state switch D-M9 D-M9V, D-F9W, D-F9WV, D-F9BAL D-A9, D-A9V Rotation Size Operating angle m Operating angle m Operating angle m Hysteresis angle A Hysteresis angle Hysteresis angle A B B B A 10 10 10 10 10 10 10 90 80 65 50 45

Mechanically Jointed Rodless Cylinders

D-M9V D-M9W D-M9WV D-M9 D-M9V D-M9W D-M9WV Auto switch model Auto switch model D-A9 D-A9V D-A9 D-A9V Bore size Bore size B 88 106 121 156.5 197.5 231 266.5 B 94 116 135 172.5 215.5 249 284.5 A 26 26 33 40.5 46.5 47 57.5 A 32 36 47 56.5 64.5 65 75.5 B 84 102 117 152.5 193.5 227 262.5 B 90 112 131 168.5 211.5 245 280.5 A 22 22 29 36.5 42.5 43 53.5 A 28 32 43 52.5 60.5 61 71.5 16 20 25 32 40

Magnet: Built-in Magnet, Mounting: Foot, Tube Material: Aluminum Tube, Bore Size: 160mm, Thread Type: NPT, Stroke: 300mm, Option: Cushions at Both Ends, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: Built-in Magnet, Mounting: Foot, Tube Material: Aluminum Tube, Bore Size: 160mm, Thread Type: NPT, Stroke: 100mm, Option: Cushions at Both Ends, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -

Magnet: D (Built-in Magnet), Mounting: L (Foot), Tube Material: Aluminum Tube, Bore Size: 160mm, Thread Type: TN (NPT), Stroke: 300mm, Option: Cushions at Both Ends, Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in Magnet), Mounting: L (Foot), Tube Material: Aluminum Tube, Bore Size: 160mm, Thread Type: TN (NPT), Stroke: 100mm, Option: Cushions at Both Ends, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Mechanically Jointed Rodless Cylinder Series MY2

Proper Auto Switch Mounting Position (Detection at stroke end) C D A B D-A9, D-A9V D-M9, D-M9V, D-M9W, D-M9WV B B Series model A Series model A Operating range Operating range MY2C16 MY2C16 44 116 48 112 MY2H16 MY2H16 46 114 50 110 MY2HT16 MY2HT16 11 8.5 70 90 74 86 MY2C/H/HT25 MY2C/H/HT25 54 156 58 152 MY2C/H/HT40 MY2C/H/HT40 85 245 89 241 Series model C Series model C D D Operating range

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Proper Auto Switch Mounting Position (Detection at stroke end) C D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A B Series MY2C Series MY2H Series MY2HT (mm) D-M9, D-M9V (mm) D-M9, D-M9V (mm) D-M9, D-M9V A A A B B B Bore size 16 25 40 Operating range Bore size

CLS

D-A9/M9/M9W/M9AL auto switches are shipped together (not assembled). (Only auto switch brackets are assembled at the time of shipment.)

E-MY2_E_D

bottom, (right) Note) Refer to the catalog for Stroke, Auto switch and Number of auto switches. 3 positions Names and Functions of Controller 11 Example of Internal Circuit and Wiring 12 Setting 15 Operation Characteristics 20 Specifications 21 10 Names and Functions of Controller (3 positions) Controller detail General 3 positions 5 positions General A 1 2 5 7 State of indicator light D

Series 10-, 21- AF-A Air Filter

Option Applicable model 10-/21-AF20-A 10-/21-AF30-A 10-/21-AF40-A 10-/21-AF40-06-A 10-/21-AF50-A 10-/21-AF60-A Bracket assembly Note 2) AF52P-050AS AF22P-050AS AF32P-050AS AF42P-050AS AF42P-070AS Note 2) Assembly includes a bracket and 2 mounting screws. 1069-1 A Air Filter 1021-AF-A Dimensions AF20-A AF30-A to 40-06-A 10211021T N S J M U D J M U D S N T Air Preparation Equipment Pressure

Electric Actuator / High Rigidity Slider Type 《 AC servo motor ・ Motorless 》

Grounding should be to a D-class ground. (Ground resistance of 100 or less.) -13- 3. Grounding should be performed near the actuator to shorten the grounding distance. 4. The cross-sectional area of this wire shall be a minimum of 2 mm2. 5. Avoid common grounding with other devices.

High Vacuum L Type Valve

H 5 Initial power / Power 100 VAC 200/40 400/70 400/80 600/130 200 VAC 800/40 1600/80 1600/80 2400/130 consumption (W) Item XL-80 XL-100 XL-160 Rated voltage of the heater 90 to 240 ACV Heater assembly number XLA25-60S-3 XLA25-60S-2 XLA25-60S-2 No. of heater assemblies 1 pc. 2 pcs. 3 pcs.

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

or less 1000 or less 1000 or less XC22 Fluororubber seal 140 1600 or less 1000 or less 1000 or less XC26 Clevis pins with flat washer 160 Double clevis pin and double knuckle pin made of stainless steel 1600 or less 1200 or less 1200 or less XC27 180 2000 or less 1200 or less Rod side trunnion XC30 200 2000 or less 1200 or less With coil scraper XC35 250 2400 or less 1200 or less Hard

XL-OMY0003

XLH-25 XLH-40 XLH-50 AC90240V XLA25-60S-1 XLA25-60S-1 1 1 H4 AC100V 200/40 200/50 / AC200V 800/40 800/50 XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 1 1 1 H5 AC100V 200/40 400/70 400/80 / AC200V 800/40 1600/80 1600/80 1 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 30 ( 7 XL-OMY0003 . <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) <