MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MLGP

There may be large variations depending on the surrounding environment (variations on the order of 30%). 12 Solid State Switches/Direct Mount Type D-Y59 /D-Y69 /D-Y7P(V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch part no.

MB

CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Auto Switch Mounting Height (mm) MB D-Z7/Z-80 D-Y59 D-Y7P D-Y7W D-F5, D-J5 D-F59F D-F5W, D-J59W D-F5BAL, D-F5NTL D-A5 D-A6 D-A59W D-A3 D-G39 D-K39 D-Y69 D-Y7PV D-Y7WV Bore size D-Y7BAL D-A44 D-P5DWL MB1 (mm) Ht Hs

Air Cylinder Series CA2

Auto Switch Mounting Height (Except low friction, air-hydro cylinders) (mm) D-B5 D-B64 D-B59W D-G5 D-K59 D-G5NTL D-G5W D-K59W D-G5BAL D-G59F Auto switch model D-A9 D-M9 D-M9W D-M9AL D-F5 D-J59 D-F5W D-J59W D-F5BAL D-F59F D-F5NTL D-Z7 D-Z80 D-Y59 D-Y7P D-Y7BAL D-Y7W D-Y69 D-Y7PV D-Y7WV D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W D-A3C D-G39C D-K39C D-A44C D-A9V D-M9V D-M9WV D-M9AVL D-P4DWL Bore

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(When using 10-SS5Y-60-D, block disk is assembled on D side.) sheet. (When using 10-SS5Y-60-D, block disk is assembled on D side.)

SX

M Special specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

C76

Mounting Position and Mounting Height [First angle projection] (Band mounting type) (Rail Mounting type) D-C7 D-C80 D-A7 D-A80 ( ): In case of D-A72 D-A7H D-A80H D-C73C D-C80C D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F Auto Switch Mounting Position (mm) 1 to 50 st 51 to 100 st 101 to 150 st 151 to 200 st 151 to 200 st Bore Single acting/Spring

C76

Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F Auto Switch Mounting Position (mm) 1 to 50 st 51 to 100 st 101 to 150 st 151 to 200 st 151 to 200 st Bore Single acting/Spring extended Auto switch model B

Step Motor Controller

-m LECSS2-m L11 L21 For single phase 200 VAC For three phase 200 VAC L1 CNP1 NFB MC CNP3 L1 CNP1 NFB MC CNP3 Single phase 200 to 230 VAC Three phase 200 to 230 VAC L2 L2 U U U Motor V U Motor V L3 L3 V V W M N W M N() W W P1 P1 PE PE P2 P2 CNP2 CNP2 P P(+) Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC, power

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

CG1

Up to 200 Up to 300 Up to 300 Up to 300 1-7-38 Direct Mount: Double Acting Series CG1R Auto Switch Mounting Position and Mounting Height CJ1 CJP CJ2 CM2 C85 C76 CG1 MB MB1 CP95 C95 C92 CA1 CS1 Auto Switch Mounting Position Mounting Height (mm) Auto switch model D-C7, C8 D-C73C, C80C D-C7, C8 D-H7 D-H7W D-H7F D-H7BAL D-B5, B6 D-B59W D-G5, K5 D-G5W D-K59W D-G5NTL D-G59F D-G5BAL D-B5, B6 D-G5W

REA/REB

/J79 D-J79C D-F7V D-F7NTL D-F7W/J79W D-F7WV D-F7BAL D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7LF D-F79F Bore size (mm) B A 10 6 3 4.5 (mm) 15 6 4 4.5 Dimension A Dimension B 20 6 3 4.5 Auto switch model D-A72 D-A72 25 6 3 4.5 D-F7W/J79W D-F7WV D-F7LF Note 1) D-F7W/J79W D-F7WV D-F7LF Note 1) D-F79F D-F7BAL D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V

REA/REB

15 Auto switch model Bore size (mm) D-A9 A dimension D-M9 B dimension C dimension D dimension D-A9 D-M9 D-A9 D-M9 D-A9 D-M9 21.5 76.5 72.5 56.5 60.5 17.5 15 Note) Auto switches cannot be installed in Area C in the case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8

REA/REB

case of 15. 25, 32 A dimension D-Y5 D-Y6 D-Y7 B dimension C dimension D dimension Auto switch model D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Y5 D-Y6 D-Y7 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 D-Z7 D-Z8 Bore size (mm) 25 22 103 103 47 47 78 78 22 32 30.5 117.5 117.5 55.5 55.5 92.5 92.5 30.5 Operating Range Bore size (mm) Auto switch model 32 25 15 D-A9 8 D-M9 3 D-Z7/Z8 9 9 D-Y5/Y6/Y7 6 7 Since this

CM2

D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A D-H7l D-H7C D-A44A D-H7lW D-H7BAL D-H7lF D-G5NTL 1.4-49 World Wide QS\E Support...

Sine Rodless Cylinder Series REA/REB

RHC RZQ D-X Individual -X 961 Series REAS Auto Switch Proper Mounting Position (Detection at Stroke End) B A (mm) A dimension B dimension Auto switch model D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/F7WV D-F7BA D-F79F D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C D-F7V/FWV D-F7BA D-F79F D-F7NTL D-A73/A80 D-F7NTL D-A73/A80 Bore size (mm) 10 35 35.5 45 44.5 40.5

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Auto Switch Mounting Height [mm] D-F5m D-F5mW D-J59 D-J59W D-F59F D-F5BAL D-F5NTL Auto switch model D-Y59m D-Y7P D-Y7mW D-Y7BAL D-Z7m D-Z80 D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-Y69m D-Y7PV D-Y7mWV D-A5m D-A6m D-A59W D-G39 D-K39 D-A3m D-A44 D-P4DW Bore size Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 30.5 23 32.5 25 35 24.5 25.5 23 26.5 23 67 27.5

Table of Contents

D. Applicable tube O. D.

Vacuum System Peripherals:

Ejector mounting position ZZYX3 45T U side D side U D J Mounting position of connector Number of ejectors 1 to 3 stations A, B port size (Valve only) U side D side U D C4 C6 4 One-touch fitting 6 One-touch fitting Mixed M SUP/EXH block assembly mounting position Total number of ejector/valve stations U D side D B U side When creating the mixed specifications, complete the stations table on

LJ1H

Detector CN2 L11 L21 LECSB2For three phase 200 VAC For single phase 200 VAC CNP1 NFB MC CNP1 NFB MC L1 L1 Three phase 200 to 230 VAC Single phase 200 to 230 VAC CNP3 CNP3 L2 L2 U U U Motor U Motor L3 L3 V V V V M M N () N W W W W P1 P1 PE PE P2 P2 CNP2 CNP2 P (+) P Regeneration option Regeneration option C C D D Detector Detector CN2 CN2 L11 L11 L21 L21 Note) For single phase 200 to 230 VAC