CL

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.

0.5

600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 0 0 0 0 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance [mm] Installation distance [mm] Installation distance [mm] Installation distance [mm] IZF10R

CY1

, 500 750 15 1 axis 100, 200, 300, 400, 500, 600 1000 20 100, 200, 300, 400, 500, 600, 800 25 1200 100, 200, 300, 400, 500, 600, 800, 1000 25 2 axes 1500 32 Note) Contact SMC if the maximum stroke is exceeded.

Membrane Air Dryer

200 1200 0 800 1200 400 1600 Inlet air flow rate (L/min [ANR]) Inlet air flow rate (L/min [ANR]) Standard dew point40oC [Symbol: L], 60oC [Symbol: S] IDG30LA IDG50LA P1 = 0.3 MPa 0.08 P1 = 0.3 MPa 0.03 Pressure drop (MPa) Pressure drop (MPa) 0.06 P1 = 0.5 MPa P1 = 0.5 MPa 0.02 0.04 P1 = 0.7 MPa 0.01 P1 = 0.7 MPa 0.02 0 100 200 300 400 500 0 200 400 600 800 Inlet air flow rate (L/min [ANR

Thermo-con/Rack Mount Type

Heat generation amount: 400 W Cooling capacity = Considering a safety factor of 20%, 400 W x 1.2 = 480 W Thermo-con/HEC Series High-precision temperature control type for semiconductor manufacturing equipment, medical equipment, etc.

Lightweight and Compact

Note 2) 400 V type is provided with an earth leakage breaker -B as standard.

LEF-OM006xx

500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 0 100 200 300 400 500 600 V (mm/s) LEFS 16 LEFS 25 LEFS 32 50 12 20 W(kg) W(kg) 10 W(kg) W(kg) W(kg) W(kg) 6 40 6 15 8 30 8 6 8 10 5 5 20 4 5 12 10 16 10 12 16 10 2 0 0 0 0 100 200 300 400 500 600 V (mm/s) 0 100 200 300 400 500 600 V(mm/s) 0 100 200 300 400 500 600 V(mm/s) -9- (1)(DC24V) LEFS40 (mm) 1) 200, 300, (400), 500

Series IDG

800 0 100 200 300 400 500 Outlet air flow rate l/min (ANR) Outlet air flow rate l/min (ANR) IDG60H IDG75H 0 P1 = 0.3MPa P1 = 0.3MPa 0 Outlet air atmospheric pressure dew point C Outlet air atmospheric pressure dew point C 10 10 P1 = 0.5MPa P1 = 0.5MPa P1 = 0.7MPa 20 20 P1 = 0.7MPa 30 30 40 40 50 0 200 400 600 800 50 0 200 400 600 1000 800 Outlet air flow rate l/min (ANR) Outlet air flow

Series SV

MB 32 10% 30% 50% 300 70% Stroke mm AS2201F -01-08 AS2200-01 200 100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

Compact Cylinder Series NCQ8

175 200 250 300 350 400 NCQ8B200-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 NCQ8B250-012 025 037 050 062 075 087 100 125 150 175 200 250 300 350 400 #4-40UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC3/4 7/8 1 1-1/8 1-1/4 1-3/8 1-1/2 1-5/8 1-7/8 2-1/8 2-3/8 2-5/8 3-1/8 3-5/8 4-1/8 4-5/8 #6-32UNC1-1/8 1-1/4 1-3/8 1-

Refrigerated Air Dryers

Applicable air dryer Capacity Type Inlet voltage Outlet voltage A B C D E F G Weight IDF-TR7000-8 IDF100F 7 kVA Three360 540 400 260 300 11 30 94 kg IDF-TR9000-8 IDF125F, 150F 9 kVA 400 650 450 300 350 13 40 109 kg IDF-TR14000-8 IDF190D, 240D 14 kVA 400 650 450 300 350 13 40 152 kg IDF-TR18000-8 IDF370D 18 kVA 400 650 450 300 350 13 40 179 kg 220, 240, 380, 400, 415, 440 V (50/60 Hz) phase

IDG

point: 40C), IDG75S (Standard dew point: 60C) IDG100 (Standard dew point: 20C), IDG100H (Standard dew point: 15C) P1 = 0.3 MPa 0.06 0.02 P1 = 0.3 MPa Pressure drop (MPa) Pressure drop (MPa) P1 = 0.5 MPa 0.016 P1 = 0.5 MPa 0.04 P1 = 0.7 MPa 0.012 P1 = 0.7 MPa 0.008 0.02 0.004 0 100 400 200 300 0 400 800 1200 1600 Inlet air flow rate (l/min (ANR)) Inlet air flow rate (l/min (ANR)) IDG100L (

mb1

/s) 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 C85 -XC3 Special port location 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 -XC4 With heavy duty scraper C95 80 1400 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Heat resistant cylinder (110 C) -XC5 100 1500 25, 50, 75, 100, 125, 150, 175

Secondary Batteries

Mounting style B F Basic style Front mounting flange style Cylinder stroke (mm) Bore size (mm) Standard stroke (mm) Long stroke (mm) Bore size 20 25 32 40 50 20 mm 20 75, 100, 125, 150, 200 250, 300, 350, 400 25 mm 25 350, 400, 450, 500 32 mm 350, 400, 450, 500, 600 32 40 mm 50 mm 75, 100, 125, 150, 200 250, 300 350, 400, 450, 500, 600, 700, 800 40 350, 400, 450, 500, 600, 700, 800, 900,

MB1

Bore size (mm) Maximum stroke Standard stroke (mm) 32 700 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 40 800 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 1200 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80 1400 25, 50, 75, 100, 125, 150, 175

SV

80 MB 63 300 600 Stroke (mm) AS5000-02 AS420-02 AS3201F -03-10 200 400 200 100 0 0 SV400 AN300 -KM12 T1209 SV300 ANA1 -C12 T1075 800 400 MB 100 MB 80 600 300 Stroke (mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed

Proposals for Energy Saving

KNK-10-600 KNK-12-400 KNK-12-600 KNK-16-400 KNK-16-600 KNK-20-400 KNK-20-600 35 D 8.5 H2 L2 L1 Pivoting nozzle with male thread/KNK (mm) Model Nozzle size D Connection size L1 A Width across flats H1 H2 Connection thread 4 6 4 6 4 6 R 1/4 R 1/4 R 3/8 R 3/8 R 1/2 R 1/2 17 17 17 17 17 17 17 17 17 17 22 22 38 38 39 39 42.2 42.2 31.9 31.9 32.4 32.4 34.1 34.1 KNK-R02-400 KNK-R02-600 KNK-R03

MY1

MY1CW40 MY1CW50 MY1CW50 MY1CW25 MY1CW25 MY1CW40 MY1CW40 MY1CW32 MY1CW32 MY1CW20 MY1CW20 5 5 1 MY1CW32 MY1CW32 4 4 MY1CW25 MY1CW25 MY1CW16 MY1CW16 3 3 MY1CW25 MY1CW25 MY1CW20 MY1CW20 MY1CW20 MY1CW20 0.5 2 2 MY1CW16 MY1CW16 0.4 MY1CW16 MY1CW16 D0.3 1 1 -X 0.2 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Piston speed (mm/s) Piston speed (mm/s) Piston

Combination Cylinder

Standard Stroke Bore size (mm) Standard stroke (mm) 40 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500 50, 63 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 80, 100 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 Max.