MY1

3 e w !6 r !9 Note) With top cover removed !

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

1.1 LINEAR ACTUATORS: AIR CYLINDERS SERIES NCJ2 SERIES NCJ2 BORE SIZES Ø6•10•16 Double Acting Single Rod / Double Rod Single Spring Return / Extend Compact and Lightweight Auto Switch Sensing Optional M A D E I N USA Non Rotating Piston Rod Optional High

D I M E N S I O N S ( I N C H) S TA N D A R D S I N G L E A C T I N G S P R I N G E X T E N D D O U B L E C L E V I S T Y P E NCJ2D_-_T ZZ 50 100 150 200 300 400 500 3.73 3.94 4.23 4.71 3.91 4.12 4.41 4.89 5.31 5.92 6.69 *Clevis Pin Included S Z D GA NB U Bore Size A B C CD CX MM NA R 50 100 150 200 300 400 500 50 100 150 200 300 400 500 H 0.157 0.31 0.93 0.31 10 (3/8) 0.60 0.47 0.55 0.187

High Vacuum Angle Valve

Dimensions XLA-100/160-X152: Air operated (b) C E D E C E Fn (KF flange) Fd (K flange) (a) Heater (Option) (c) H [mm] B A Model A B C D E1 Fn Fd G H XLA-100-X152 108 300 154 3 11 134 130 102 131 XLA-160-X152 138 315 200 3 11 190 180 153 112 1 The E dimension applies when the heater option is included.

Air Cylinder Series CA2

V 200 V or less 3-wire (NPN equiv.)

Series SV

With external pilot specification (Pitch) P = 24 65.8 24 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 B 2 B 2 B 2 B 2 B 2 P 1 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 N11 One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, N9 10, N11 12 x PE X PE Rc 3/8 [1(P), 3(E) port]

SV

(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable

Integrated Controller

Weight [g] JX-CDS-E-1-S 68 JX-CDS-E-3-S 125 JX-CDS-E-5-S 200 JX-CDS-E-10-S 387 JX-CDA-E-1-S 68 JX-CDA-E-3-S 125 JX-CDA-E-5-S 200 JX-CDA-E-10-S 387 Connector type: Right angled (35) L 35 5 B end A end Connector type: the right angled type cannot be used for the parallel mounting type. (15) PIN 2 PIN 3 45 PIN 4 PIN 1 62 Slider Type Rod Type EQFSH/EQYH Series Battery-less Absolute Encoder

NCQ8

clearance hole, front mount/ NC(D)Q8E(Z) Screw clearance hole, rear mount/ NC(D)Q8M(Z) 4-E 4-E Symbol Bore E B 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 300(3") 400(4") 0.34 0.20 B B 0.34 0.25 Screw clearance hole, through/NC(D)Q8N(Z) 0.50 0.25 0.50 0.34 0.53 0.34 4-E 0.66 0.41 0.69 0.41 0.84 0.50 Dimensions/Male rod end Male rod end NC(D)Q8-(C)M K Symbol Bore H L

Table of Contents

C D E F Dimensions Part no.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

Basic type / Direct mount type Series CY3B/CY3R

9 #4 #8 E @4 r @7 @5 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @3 e #1 t y $1 u w q @6 @2 @1 $3 E' Section E-E' CYV32 t !9 $0 @1 @2 y u @6 #9 @5 @4 @3 Note Component Parts No. No.

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

Electric Actuator with Integrated Guide

Motor output (W) Motor model Compatible driver model Power supply voltage (V AC) Motor dimension (mm) 100/115 MSD021P1E MSM021P1A Matsushita Electric Industrial Co., Ltd. 95 MSM022P1A 200 200/230 MSD023P1E 100/115 MR-C20A1 Mitsubishi Electric Corporation 89 200 HC-PQ23 200/230 MR-C20A 100/115 SGDE-02BP 200 SGME-02BF12 Yasukawa Electric Corporation 96.5 200/230 SGDE-02AP SGME-02AF12 Refer

Air Cylinder Series MB

D-X Individual -X Technical data 335 Series MB1 Standard Type Basic style: (B) Cushion valve W V Port 2 x P MM G G With rod boot E e E D d H1 MB Effective thread 10.2 16 2 x 4 x J 10.2 f l S + Stroke H A K F N N C h B ZZ + Stroke Without Air Cushion Bore size (mm) Bore size (mm) S ZZ S ZZ 32 40 50 63 80 100 125 90 90 102 141 145 164 102 124 124 132 164 200 200 235 In the case of w/o air

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

V

TAT I O N S 02 2 Stations 20 20 Stations H O W T O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B O D Y P O R T E D P L U G L E A D T Y P E V A L V E 2 VQZ P O R T S I Z E 2(A) P O R T S E R I E S C3 One Touch Fitting for 3.2 (VQZ100) C4 One Touch Fitting for 4 (VQZ100/200) C6 One Touch Fitting for 6 (VQZ100/200/300) C10 One Touch Fitting for 10 (VQZ300) M5 M5 Thread (VQZ100/200) 02

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

) E L E C T R I C A L E N T R Y O P T I O N S None Z With Indicator Light and Surge Voltage Suppressor F Through Base H O W T O O R D E R M A N I F O L D S E E I N S I D E F R O N T C O V E R F O R FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE N233 DETAILS OF YOUR LOCAL SALES OFFICE 2.74 SOLENOID VALVES SERIES NVFS H O W T O O R D E R M A N I F O L D / O P T I O

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.