SY

Series For SY9000 (12) Model AN300-KM12 Effective area 41mm A 25 B 70 C 98 SY9000 DIN rail dimensions and weights 4 11 VZ1000 Type 45 3 port valve Air operated Refer to the table below for dimension L.

7

(V2) (U2) E C 32 VX2 25 T B VXK G1/2 R VXD VXD A VXZ IN OUT N SMC 8 x 18 VXS VXB F S D Q VXE VXP Conduit C E U 280 VXR VXH 23 B G1/2 VXF R T VX3 A IN OUT N SMC VXA 8 x 18 F S Q D Flat terminal C E U 11 R T B A IN OUT N SMC 8 x 18 S Q D F (mm) Electrical entry Model Flat terminal Conduit terminal Conduit Applicable flange A B C E F N Q R S D T T U U U 84 (92) V T 90 (98) 179.5 (187.5) 92.5

Table of Contents

F G x I 5H9 +0.030 0 depth 5 +0.030 0 depth 5 D-5.1 through 5H9 10 7.5 E-M5 thread depth 10 Refer to Cross section C-C, bottom view. 6 LJ1 LG1 LC1 LX LC6D/LC6C Switches 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 13 15 Stroke + 127 3.5 (5) 0.5 46.5 2-M6 thread depth 13 58 52 27 19 [18] (39) 15 Stroke + 127 The

MGP

FA C + Stroke E B + Stroke A + Stroke Dimensions (mm) Bore size (mm) Standard stroke (mm) A E 25, 50st Over 50st B C DA DB FA FB G GA GB GC H HA J K L 25, 50st Over 50st 50 80 86 118 110 151 20 25 30 45 0 0 24 33 30 35 12 18 72 95 14 19 11 24 12 14.5 160 242 M10 M12 35 47 37 48 50 66 86 118 44 65 25, 50, 75, 100, 125, 150, 175, 200 Bore size (mm) Standard stroke (mm) 50 80 RR RB RA QB QA

AC

27.5 N Gauge P C Q IN OUT AR2001/2501/3001: Max. 3.5t AR4001: Max. 5.0t Port size B H J Bracket (Optional) K M G L E F Bracket mounting dimensions N Q Model Port size A B C D E P F G H J K L M 30 34 44 5.4 15.4 55 2.3 1/8, 1/4 40 3.3 95 17 AR2001 40 35 33.5 25 30 34 44 5.4 15.4 55 2.3 1/4, 3/8 53 4.3 102.5 25 AR2501 48 32 33.5 25 41 40 46 6.5 8 53 2.3 1/4, 3/8 53 0.8 127.5 35 AR3001 53

Air Cylinder

Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

B C E E H L L M Model B L,L 4 3 6 10 8 12 19 25 LQ3E11 LQ3E12 LQ3E21 LQ3E31 LQ3E32 LQ3E41 LQ3E51 LQ3E61 3.5 4.8 10 9 11 28.5 27.5 14 M 4 6 17 16 16 34.5 33.5 20 5 9 22.5 19.5 21 47.5 44.5 25 6 7 8 10 14 18 24 26.5 30 22 24 26 24 32 41 52.5 64 78 50.5 61.5 74 29 37 49 L,L C H (E,E) Inch Size (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material

Air Slide Table

D A [mm] Rubber Stopper A Model A B C D E MXQ6(A) 41.5 27 22 25 20 MXQ8(A, C) MXQ6B 41.5 27 21 25 19 MXQ12(A, C) MXQ8B 46.5 28 21 27 20 MXQ16(A) MXQ12B 51.5 30 21 28 20 MXQ20(A) MXQ16B 58.5 32 22 31 21 MXQ25(A) MXQ20B 65.5 34 22 33 21 Cap bracket RJ-X2300 A cap bracket is mounted to lengthen the A dimension.

Air Cylinder

-X Bore size B C GA LB NA WA S Z 10 15 17 7.5 16.5 21 14.4 66 122 16 18.3 20 7.5 23 21 14.4 67 123 Technical Data 69 CJ2W Series Flange (F) Stroke CJ2WF6 Z Mounting nut Piping port 2 x M5 x 0.8 Rod end nut NDh8 GA View E GA NN NN Cover surface C MM MM D 0 0.3 FB FY B FT 0 0.3 FZ FX 2 x FC Mounting hole NA S + Stroke Z + 2 x Stroke H + Stroke A F T A H F T NA B View E Stroke CJ2WF 10 16

5 Port Solenoid Valve

7 w e r !8 @1 @6 @5 Cable 0.3 mm2 x 25 pins O.D. 1.4 !9 y t @0 u 10 Seal (Length) Polarity Terminal 015 no.

ZP

Model A B C D E F G F G Flat Flat with ribs Model A B C D E F G F G Flat Flat with ribs P Q R U C U C U C U C U C ZPY10 10 13 16 ZPY40 40 50 43 53 19.5 29.5 47.5 73.5 25 15 63.5 7.5 3.8 12 12 15 20 25 18 18.5 28.5 46.5 72.5 62.5 6.5 3.3 ZPY50 3.5 1.2 1.8 1.7 ZPY13 N4 (Nylon tube 4/2.5) 14.5 5 1.8 22 38 59 64 3 ZPY16 12.5 22.5 38.5 59.5 64.5 N6 (Nylon tube 6/4) Deep 16.5 7 2.5 Deep H: M6 x

Modular F.R.L. Unit

D E G P 2 1 6 8 C J R Z W N AWD30 to 40 Accessory/Optional specifications B C D E G P 1 2 6 8 C J N R W Z With bracket (with set nut) Float type auto drain (N.C.)

5 Port Solenoid Valve Series SY3000/5000/7000/9000

Series 10-SY9000 Series 10-SY5000 Port size Flow characteristics Weight (g) Port size Flow characteristics Weight (g) 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] 14/2(PA/B) 4/25/3(A/BEA/EB) Grommet Cv b C [dm 3/ (sbar)] Cv b C [dm 3/ (sbar)] Valve model Type of actuation 1, 5, 3 Valve model Type of actuation 1, 5, 3 W M8 W M8 L, M plug L, M plug (P, EA,

Modular Design with Uniform Body Style

Y200-D Y200T-D Y300-D Y300T-D Y400-D Y400T-D Y500-D Y500T-D Y600-D Y600T-D Seal HNBR Y220P-050S Y320P-050S Y420P-050S Y520P-050S Y620P-050S Dimensions Spacer Spacer with bracket A (Spacer width) A (Spacer width) K D F H J G E E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Model A B C D E Applicable size Y200-D 3.2 35 13.2 42 0.6 AC20-D Y300-D 4.2 43 16.2 53

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Applicable bore size (mm) 12 16 20 25 32, 40 50, 63 80 100 Dd9 d H B C Part no.

Table of Contents

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) R F (h9) E (g6) Q Y P A B C D G K L M N Model 90 180 270 CDRB2BW10-S CDRB2BW15-S CDRB2BW20-S CDRB2BW30-S 18.5 18.5 25 25 24 29 36 43 9 12 14 16 4 5 6 8 M3 x 0.5 depth 5 29 34 42 50 15 20 29 40 29 29 30 31 14 18 20 22 3 4 4.5 5 9 10 10 12 0.5 0.5 0.5 1 10 15 20 30 25 25 25 25 M5 x 0.8 M5 x 0.8 M3 x 0.5 M3 x 0.5 M3 x 0.5 depth 5 M4 x 0.7 depth 7 M5 x 0.8 M5 x 0.8 M5 x 0.8 depth 10 11-2