24

V M9NWV M9NW P P P p p IC circuit 3-wire (PNP) M9PWV M9PW P P P p p 2-wire 12 V M9BWV M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC MGT Grommet Yes 24 V 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 p p P p p IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 p p P p p 2-wire 12 V M9BAV*1 M9BA*1 p p P p p Magnetic field resistant (2-color indicator) 2-wire (Non-polar) P3DWA P P P

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

(EB) 5 1 3 Option VQ NPTF T 2 position double VQ4 (B) (A) 4 2 Electrical entry 2 E: Grommet terminal D: DIN terminal Coil rated voltage VQ5 (EA)(P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz VQC 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz VQZ 5 6 24 VDC 12 VDC 3 SQ (EA)(P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center

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ZS-20-5A-50 . 1 pc.

Stability of suction position,

P ZP3 P Vacuum Ejector or Pump and Number of Vacuum Pads ZP3E ZP3E Ejector and number of pads Vacuum pump and number of pads Vacuum line ZP2 ZP2V Tank ZP ZPT ZPR XT661 P P P P P P P P P Ideally, one pad should be used for each line. When more than one pad is attached to a single vacuum line, take the countermeasures listed below.

Electric Actuators

Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Non-standard motor 100/110VAC (50/60Hz) 200/220VAC (50/60Hz) Standard motor 100/115VAC (50/60Hz) 200/230VAC (50/60Hz) Without motor Nil W None N.C.

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A 50 bore size is selected. 50 100 40 32 25 20 50 0 0.3 0.2 0.1 0.4 0.5 0.6 0.7 0.8 0.9 1 Operating pressure P (MPa) 8-25-6 6 Model Selection Series MGZ/MGZR 2.

Mechanically Jointed Rodless Cylinder Series MY1

4 40 100 1 2 3 4 5 10 20 30 40 50 0.5 Load mass (kg) Load mass (kg) 63 Horizontal collision: P = 0.5 MPa Shock absorber 2.

Compact Hydraulic Cylinder

M6 x 1.0 145 115 45 60 M24 x 1.5 40 30 C-series A +0.1 0 40 31.5 M6 x 1.0 145 115 45 60 M30 x 1.5 50 30 +0.1 0 50 40 M8 x 1.25 185 145 57 79 M39 x 1.5 63 40 Double knuckle joint Material: Cast iron Bore size (mm) Rod series 2 x P keeper plate mounting screw J P H A B C D l d K L E Part no. 32 40 50 63 80 100 40 50 63 80 100 YH2-03B YH2-04B YH2-05B YH2-06B YH2-08B YH2-10B YH2-03B YH2-05C

MY1

1 to 22 10, 16, 20, 25, 32, 40, 50, 63, 80, 100 Slide Bearing Type Series MY1M P. 23 to 37 16, 20, 25, 32, 40, 50, 63 Cam Follower Guide Type Series MY1C P. 39 to 53 16, 20, 25, 32, 40, 50, 63 High Precision Guide Type Series MY1H P. 55 to 76 10, 16, 20, 25, 32, 40 High Rigidity/High Precision Guide Type Series MY1HT P. 77 to 89 50, 63 Protective Cover Series MY1MW/CW Series MYMW/CW P. 90

VFS

/60 Hz 2 200 VAC, 50/60 Hz 3 110 to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 5 24 VDC 6 12 VDC 7 240 VAC, 50/60 Hz 9 Other Option 3-8-49 50 Series VFS2000 Dripproof Manifold U D With common terminal box: VV5FS2-01WTB 1Station Port size Indicator light Push type manual override 2-Rc 1 8 Pilot EXH port 150.5 (Double) 101 (Single) 158 (3 position) 6-Rc 1 4 2-Rc 1 8 1(P), 3(R2), 5(R1) port External

2/3 Port Valve

(Energized closed) Voltage 1 2 3 4 5 6 7 8 9 100V AC 50/60Hz 200V AC 50/60Hz 110V AC 50/60Hz 220V AC 50/60Hz 24V DC 12V DC 240V AC 50/60Hz 48V AC 50/60Hz Other (Contact SMC seprately) Options Standard F, G, L, T are available option. Refer to p.4.0-11 "Applicable Fluid Check List".

AC Servo Motor Driver (Pulse input type/Positioning type ）

SIGNALS AND WIRING (Note 2) I/O signals in control modes Related parameter P P/S S S/T T T/P Pin No.

Battery-less

/Belt Drive LEFB Series Battery-less Absolute (Step Motor 24 VDC) p. 12 Model Selection p. 13 How to Order p. 43 Specifications p. 45 Weight p. 45 Construction p. 46 Dimensions p. 47 Rod Type LEY Series Battery-less Absolute (Step Motor 24 VDC) p. 54 Model Selection p. 55 How to Order p. 61 Specifications p. 63 Weight p. 64 Construction p. 65 Dimensions p. 67 Guide Rod Type

VFR

(EB) 5 1 3 Option 2 position double (B) (A) 4 2 Electrical entry 2 Coil rated voltage E: Grommet terminal D: DIN terminal (EA) (P)(EB) 5 1 3 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center 110 to 120 VAC, 50/60 Hz (B) (A) 4 2 4 220 VAC, 50/60 Hz 5 6 24 VDC 12 VDC 3 (EA) (P)(EB) 5 1 3 7 240 VAC, 50/60 Hz 9 Other 3 position exhaust center Option (B) (A) 4 2 4 (EA)

Series SY 5 Port Rubber Seal Solenoid Valve High Capacity & Simple Choices

(B) 2 (A) 4 (B) 2 (B) 2 (A) 4 (A) 4 Symbols 100 Effective area (Cv factor) % 5 3 (EB) (EA) 5 3 (EB) (EA) 5 3 (EA) (EB) 75 1 (P) 1 (P) 1 (P) 50 P port regulated A port regulated (P port controlled A port regulated) B port regulated (P port controlled B port regulated) 0.1 0.15 0.2 0.25 Set pressure MPa How to Order Interface Regulators P 2 ARBY5000 00 ARBY3000 05 P 2 ARBY7000 Regulated port

Applicable Auto Switch Model

(RedGreenRed) CDJ2, CDVJ3, 5 10, 16 CDQ2 12, 16, 20, 25, 32, 40, 50, 63, 80, 100, 125, 140, 160 CDlXW Plate mounted(P), 10, 16, 20, 25, 32, Housing mounted(B), 16, 20, 25, 32 CDY1S, CY1L 6, 10, 15, 20, 25, 32, 40 RSDQ 20, 25, 32, 40, 50 MDU 25, 32, 40, 50, 63 CE1 12, 20, 32, 40, 50, 63 MK, MK2 20, 25, 32, 40, 50, 63 CXT 32, 40 Specifications PLC: Programmable Logic Controller D-F7lW/D-J79W

Metal Seal/Rubber Seal Series VQ Body Ported

Series VQ1000 Plug Lead Plug-in Cassette P. 2-4-12 P. 2-4-14 P/J kit Series VQ0 P R SMC P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ2000 P. 2-4-38 P. 2-4-42 P. 2-4-46 P kit Series VQ1000 P. 2-4-76 P. 2-4-78 P. 2-4-80 P kit 2-4-4 Manifold Variations C S L Port size kit kit SUP EXH port Cylinder port Lead wire Serial transmission unit VQC P

SY

/60Hz 2 200VAC 50/60Hz DOZ is not available. 110VAC 50/60Hz [115VAC 50/60Hz] "S" specification is not available for AC since it is integrated with the rectifier. 3 4 220VAC 50/60Hz [230VAC 50/60Hz] Electrical entry D With connector DIN terminal DO Without connector How to Order Interface Regulators (SY3000, 5000 only) 05 2 P ARBY3000 Series SY3000 Series SY5000 00 2 P ARBY5000 Regulated

Smooth Cylinder/Low Speed Cylinder

0.02 P.1214 50, 63, 80, 100 0.01 CS2Y 125, 140, 160 0.005 P.1228 REA REB Low Speed Cylinder Low Speed Cylinder CJ2X/CUX/CQSX/CQ2X/CM2X P. 1243 REC Action Series Bore size (mm) Minimum operating speed (mm/s) Page CY CY CJ2X CX CX P.1246 10, 16 1 MQ CUX 10, 16 1 RHC P.1256 20, 25, 32 0.5 RZQ CQSX 12, 16 1 P.1261 Double acting 20, 25 0.5 CQ2X P.1268 32, 40, 50, 63, 80, 100 0.5 CM2X DP.1280 20

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Specifications Model PSE550 PSE550-28 0 to 2 kPa 50 to 50 kPa Note) Rated differential pressure range Operating pressure range Proof pressure Applicable fluid Power supply voltage Current consumption 65 kPa Air/Non-corrosive gas/Non-inflammable gas 12 to 24 VDC 10%, Ripple (p-p) 10% or less (With power supply polarity protection) 15 mA or less Analog output 4 to 20 mADC (Within rated differential