CQ2

mounting height. 20.5 23.5 M14 X 1.5 M14 X 1.5 M18 X 1.5 M18 X 1.5 M22 X 1.5 M26 X 1.5 28.5 20.5 23.5 28.5 26 28.5 33.5 26 28.5 33.5 32.5 35.5 43.5 32.5 35.5 43.5 Standard (mm) Bore (mm) 32 40 50 63 80 100 Stroke range (mm) 5 to 100 5 to 100 10 to 100 10 to 100 10 to 100 10 to 100 O N M I E L A H D F J K P Q S U W Z B C M8 X 1.25 M8 X 1.25 M10 X 1.5 M10 X 1.5 M16 X 2.0 M20 X 2.5 10.5 10 13

TABLE OF CONTENTS

Listed and CSA Certified for Hazardous LocationsClass I, Div 1, Group C and D Class II, Div 1, Groups E, F, and G; Div 2 Groups A,B,C,D,E,F, AND G. Mtg.

ISO Cylinder

set of a, b, c, e) (Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A

LEC-OM02704CN

DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2] [5]

Table of Contents

C D E F Dimensions Part no.

Air Cylinder

3 o e i !0 r !5 @0 !6 !4 @ A !7 !9 !8 @ B @ C Boss-cut Integrated clevis Spring extend t !2 u @1 y q !3 r !5 @0 !6 !0 i e o !4 !1 @ A !9 !8 @ B @ C !7 Boss-cut Integrated clevis Component Parts No.

Compact 5-Port Solenoid Valve

x n2 + e + 93.7 M = (L1 + c)/12.5 + 1 Decimal fractions are truncated.

MY1

G D Za 4-MM E E E E E E E E C F B G D Section Z detail (adjustable range) Section Za detail (adjustable range) F B Q P Zb JJ B B C Z B F K H A L 2 x 2LD H A H A Section Zb detail (adjustable range) Holding bolt J Mounting direction 2 Applicable cylinder MY1B50 MY1B63 Mounting direction 1 C C A C H B D G F Model 110 131 55 65 37 37 110 130 MY-J50 MY-J63 70 80 90 100 126 149 Mounting direction

Refrigerated Air Dryers

HFC) IDF E (D) Refrigerant R407C (HFC) IDF E F E G C (101) B 4 x 13 [mm] Dimensions Part no.

1

st E HT Bore size (mm) 20 25 Over 100 st to 200 st 30 st or less Over 200 st Over 30 st to 100 st 10 16 27 32 51 51 69 68.5 80 93 Over 100 st to 200 st 73 79.5 90 95.5 114 114.5 132 132 50 st or less Over 200 st Over 50 st to 100 st E HT A Bore size (mm) 32 40 50 63 Over 100 st to 200 st 128 128 144 144 50 st or less Over 200 st Over 50 st to 100 st 21.5 15 21 16 Over 100 st to 200 st 91

7

3 IN(P1) r OUT(P2) VXB B A OUT(P2) A B VXE IN(P1) C C IN(P1) e e q w VXP q w VXD2A VXD2B VXR !4 i VXH !4 u u !0 VXF A B !1 i VX3 !2 !0 !2 VXA o !1 t !3 o OUT (P2) w IN(P1) !3 B r OUT(P2) A r IN (P1) e C e IN(P1) C q w q VXD2E, 2F, 2G VXD2C, 2D Component Parts Operation When coil !

Air Slide Table

Shock Absorber/RJ [mm] Model A B C D E F Applicable part no.

5 Port Solenoid Valve Series SY3000/5000/7000/9000

rate: 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load rate: 50% Stroke 500 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Table of Contents

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

Magnetically Coupled Rodless Cylinder

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e i t n 1 r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

MGP

Z JB 6H7 depth 10 FA FB S K E G 6H7 depth 10 With front lock 7 6 HN 10 5 6H7 DM 23 b a Section XX detail e c d End lock mechanism (Locking type manual release) T-slot dimensions (mm) 30 Bore size (mm) a b c d e With rear lock 13.3 20.3 12 8 22.5 80 15.3 23.3 13.5 10 30 100 (mm) Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA J JA JB K L 80 146.5 106.5 25 22 18 91.5 19 15.5

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Top View from Long Shaft Side Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e 0 K Key K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o n

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

D D D D D CRA1 C C C CRQ2 MSQ MRQ C D D DKey 20(mm) Nominal size C D 50 63 80 100 19.5 39.5 21 45 23.5 53.5 30 65 Note) Dimensions and tolerance of the shaft and keyway are the same as the standard.

NCM

(F dimension=0.51") D Rod clevis C B A E J K L G F H (inch) Part no.

CRB2/CRBU2/CRB1

Single vane type Double vane type 90 180 270 90 r a n n o n a g r e g ti n 2 e a o n r a o n 7 ti t g ti 1 a o 0 e a t 8 o r 9 t +4 0 r 0 o 0 y y r e +4 0 +4 0 e Key y K K e K Key Key +4 0 (45) 0 Standard Optional Key 9 e g n ra n o ti a t o r (90) y e K (45) (45) A port A port A port A port B port B port B port B port 100 190 280 100 a r n n g a r n n o g e io e ti at r n a 1 o a n 1