MGP

200st 100 124 52 64 52 72 128 148 200 220 54 47 92 85 128 121 174 210 75 90 140 166 M12 X 1.75 M14 X 2.0 24 28 28 11 198 236 156 188 180 210 80 100 50, 75, 100, 125, 150, 175, 200 MGPL(Ball Bushing Bearing)/Dimensions A, DB, E MGPM(Slide Bearing)/Dimensions A, DB, E Bore (mm) Bore (mm) A E DB A E DB 50st 75st< 50st 75st< 50st 50st 75st< 75st< 80 100 168.5 178.5 47 37.5 25 30 80 100 167 187

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Locking type C (Manual) 3(R) port PE port 3 position exhaust center Rated voltage 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz 4 1 0 1 0 4 5 24 VDC 12 VDC 3 position pressure center Manual override/Non plug-in type 6 9 Nil: Non-locking push type B: Locking type B (Slotted) C: Locking type C (Manual) Other 5 Option Electrical entry Grommet L plug connector

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

LAT E C x 200 (= D) 20 LZ LC3F2 Note 1) Distance within which the table can move when it returns to origin.

24

8 32 to 63 Over 100 stroke 80, 100 Over 200 stroke 448 Compact Guide Cylinder MGP Series 12 to 25/MGPM, MGPL, MGPA Section EE details (12 to 25, 50 stroke or less) Section XX details T-slot dimensions Z WA WB XA H9 depth 6 b a X (Mounting hole position) XAH9 XB c d e X0.02 (Pin hole position) [mm] f XA Bore size [mm] a b c d e 3 [mm] [mm] 6 12 4.4 7.4 3.7 2 6.2 16 4.4 7.4 3.7 2.5 6.7 20 5.4

Mechanically Jointed Rodless Cylinder Series MY1

. 25) 5.5 22 87 12 82 15 31 100 8 73.2 15 RB2015 4 57 22 74 970 Series MY1B Mechanically Jointed Rodless Cylinder Basic Type Side Support Side support A MY-SA 2 x G 2 x H F MY1B E C D A B MY1M Side support B MY-SB MY1C MY1H 2 x J MY1HT MY1W E A B C D MY2C (mm) MY2H B C D 21 E 3.6 F 1.8 G 6.5 H 3.4 J A 35 Model Applicable bore size MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B

JXCx-OMT0023

repeat command end Program end 1000[r/min] 20[ms] 1000[10STMm] 100[ms] 3 [times] 100[10STMm] 100[ms] 2 [times] 200[10STMm] 100[ms] a) b) c) d) e) f) d) Incremental move command (200 10STM m) b) Incremental move command (100 10STM m) Forward rotation 0r/min Servo motor speed 1100 1200 1300 1000 1500 1700 a) c) e) f) 13 44 13.

Electric Slide Tables

7 @6 r w @9 @7 @8 e u @0 i y D A A D C-C D-D B-B !5 !1 !9 @3 #0 q @4 E C C E !4 !2 !0 !8 @1 !6 t o @2 @5 !3 Component Parts No. Description Material Note 1 2 3 4 5 6 7 8 9 No.

Electric Actuator

D x 100 (= E) 8 Model L 297 339 397 439 497 539 597 639 A B n D E LEFS16;-100 LEFS16;-100B LEFS16;-200 LEFS16;-200B LEFS16;-300 LEFS16;-300B LEFS16;-400 LEFS16;-400B 180 4 106 B Note 1) When mounting the electric actuator using the body mounting reference plane, set the height of the opposite surface or pin to 2 mm or more because of R chamfering.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

200 100 0 B 800 700 600 500 400 300 200 100 0 C 800 700 600 500 400 300 200 100 0 D 800 700 600 500 400 300 200 100 0 E It is when the cylinder is extending that is meter-out controlled by speed controller which is directly connected with cylinder, and its needle valve with being fully open.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 U Mounting Shaft type Size Rotation U-X10 C RA1 CRB1 U Mounting Shaft type Size Rotation C-X11 C RA1 Both sides angle adjustable type MSU One side angle adjustable, one side cushion CRJ CRA1 CRQ2 Specifications Specifications Type MSQ Pneumatic 50, 63, 80, 100 Size Type Pneumatic 50, 63, 80, 100 MRQ Rotation 90, 180, 100, 190 Size Single shaft (S), Double shaft (W), Single shaft with

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

Basic type / Direct mount type Series CY3B/CY3R

Note 3) A particulate generation test has been conducted in a vacuum environment of 105 Pa. a t e l u g c Stainless steel linear guide & low particulate generation vacuum grease e i 2 t n r a e p r a w 0.0 10 0 20 10 t i o o n L Operation cycles a t e l u g c e i t 1 n r a e p r a Non-contact construction w t Particulate generation from the linear guide unit has been reduced with the use

Air Cylinder Series MB

Individual -X Technical data 293 Series MB Without Mounting Bracket Cushion valve Basic: (B) WV Port G 2 x P MM G With rod boot E E D e C B d H1 MB Effective thread 2 x 4 x J C B A K F N MA 10.2 10.2 f l N S + Stroke H h ZZ + Stroke Width across flats Stroke range (mm) Bore size (mm) Effective thread length S ZZ A C B D Ee11 F G H1 H MA MB J K MM N P V W 32 40 50 63 80 100 125 22 30 35 35

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Note) If it is pressurized from the port indicated with the arrow, the shaft rotates in the clockwise direction. 11-7-42 Angle adjusting screw Angle adjusting screw 0 A R R 9 n ot ot gl e e n at at v io a o io io ct dj o re u n n gr st di ra ra in y g g in n n e di st g k g re u e e of dj ct a of of io e e n gl n g k A k n e e ra y y gr n gr io o o at o o ot v v R e e 9 9 0 44 Series CRA1

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT TF3040C-TX TF3060C-TX [Unit: mm] 3-M6 8-M M4 M4 3-M6 M6 Approx.17 22 22 G 2 F 1 E 2 IN D 1 D 1 D 1 L C 2 K 2 B 5 J A 5 H 5 Model Dimensions [mm] A B C D E F G H J K L M R3.25 length 8 TF3040C-TX 438 412 390 100 175 160 145 200 Approx.190 180 Approx.91.5 (M6) TF3060C-TX 12 35 12.

Air Cylinder

E C B H1 H1 B1 AL AL C A A K K B F N F N H + Stroke S + Stroke H ZZ + 2 x Stroke d e 10.2 L f h + L ZZ + L + Stroke d d e e 10.2 10.2 f f L L + Stroke h + L + Stroke h + L S + Stroke ZZ + 2L + 2 x Stroke (mm) Bore size Stroke range (mm) A AL B B1 C D E F G H1 J K KA M MM (mm) 40 50 63 80 Up to 500 Up to 600 Up to 600 Up to 750 Up to 750 30 35 35 40 40 27 32 32 37 37 60 70 85 22 27 27 32 41

Proposals for Energy Saving

MB MC KA MA N K N C S + Stroke H B ZZ + Stroke Allowable angle displacement of E to B is 1.5.

Step Motor Controller

Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 65 Programless Controller Series LECP1 Precautions Model Selection Details of The Controller e r Details No.

CV/MVGQ

n 2) n = 2, 4, 6, 8 80 + 30 (n 2) n = 2, 4, 6, 8 100 + 30 (n 2) n = 2, 4, 6, 8 90 + 50 (n 2) n = 2, 4, 6, 8 55 + 50 (n 2) n = 2, 3, 4 75 + 50 (n 2) n = 2, 4, 6, 8 80 + 50 (n 2) n = 2, 4, 6, 8 Different sides CE2 D-A44 n Same side ML2B 10 20 100 75 80 90 100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2

CV/MVGQ

100 100 100 100 100 100 1 Different sides C J G5-S 2 Same side D-A3C D-G39C D-K39C 20 + 35 (n 2) n = 2, 3, 4 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 100 + 35 (n 2) n = 2, 4, 6, 8 Different sides CV n 100 + 100 (n 2) n = 2, 3, 4, 5 Same side 100 + 100 (n 2) n = 2, 4, 6, 8 MVGQ 10 20 55 75 80 90 75 80 90 75 80 90 1 Different sides CC 2 Same side 20 + 35 (n 2) n =