Table of Contents

MGPM (Slide bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 75 to 200 st 250 to 400 st 25 st 75 to 200 st 250 to 400 st 50 st 32 40 50 63 97 102 140 17.5 55.5 127 12.5 42.5 20 97 102 140 11 49 127 6 36 20 106.5 118 161 21 64 131.5 9.5 34.5 25 106.5 118 161 16 59 131.5 4.5 29.5 25 MGPL (Ball bushing bearing) A, DB, E Dimensions A E DB Bore size (mm) 25 st 50 st 25 st 125 to

ZP

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

NCQ2/CQ2

Spring Extend C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 x 55L C D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 Cylinder model Mounting bolt part no.

ZP

F Y E F Y E Y 3 4 3 34 18 40 C A B D C A B D C A B D Dimensions Dimensions Dimensions Model A B C D E Model A B C D E Model A B C D E ZPT40HB 25-A18 ZPT40HB 50-A18 ZPT40HB 75-A18 ZPT50HB 25-A18 ZPT50HB 50-A18 ZPT50HB 75-A18 ZPT63HB 25-A18 ZPT63HB 50-A18 ZPT63HB 75-A18 ZPT80HB 25-A18 ZPT80HB 50-A18 ZPT80HB 75-A18 ZPT100HB 25-A22 ZPT100HB 50-A22 ZPT100HB 75-A22 ZPT100HB 100-A22 ZPT125HB 25-

Hydraulic

/2 52 163 15 15 20 55 65 25 to 1500 80 110 80 17 40 22 M16 x 1.5 16 44 44 3/4 65 184 18 17 20 65 80 25 to 1800 1/4 stroke 100 135 102 19 42 22 M18 x 1.5 18 44 44 3/4 75 192 20 19 15 80 100 25 to 1800 Rod series (mm) B-series rod C-series rod Bore size (mm) MM A MA D E K G H ZZ MM A MA D E K G H ZZ 32 34 M16 x 1.5 25 22 18 7 14 55 207 -0.025 -0.064 40 40 36 M20 x 1.5 30 27 22.4 9

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

ZP

Model Model ZPT20B-0-A10 ZPT40B-0-A14 12.4 47.5 24.4 20 22 23.5 32.5 25 40 48 16 43 34 10.5 ZPT25B-0-A10 ZPT50B-0-A14 15.6 25 27 24 33 28 51.5 32.4 50 57 19 53 38 ZPT32B0-A10 32 34 29 38 18.9 37 14 Dimensions by Stroke Dimensions by Stroke 40 50 20 25 32 Model F F H E E F H F E E E F Model G: 6 G: 8 G: 6 G: 8 ZPTB10-0-A14 150.5 60 64 145 149 154.5 G: 4 G: 6 G: 4 G: 6 G: 4 G: 6 ZPTB10-0-A10

ZP

2.5 Deep H: M6 x 1 H: M8 x 1 Y Model A B C E F G I C E F G I D ZPT25D 25 28 20 3 25 25 51 8 3.5 30 15 46 12 10 Elliptic Model a ZPT2004U 4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

Battery-less

How to Order LEFS 25 H R B E 200 C N K R1 CD17T q w e r t u y i o !0 !1 !

Compact Cylinder

D 25 30 25 30 25 30 30 35 30 35 35 40 45 55 C Mounting bolt part no.

Table of Contents

6 to 12 LVA 27.5 F Q S F (Q) 34 LVH LVD LVQ 25 U LQ R C R C LVN (44) G1/2 TI/ TIL E B A H D E (S) G1/2 2-P Port size PA B A H D 2-M Thread depth N 2-P Port size PAX 2-M Thread depth N L PB L K K N.C.

smcmaintenancepartslist

-12 MI-A2002-20 MI-A2502-25 MI-A3202-32 MI-A0801-8 MI-A1201-12 MI-A2001-20 MI-A2501-25 MI-A3201-32 MH-G01 (contents quantity 30 g) Main parts No. e (1 pc.) !

5-Port Solenoid Valve

E 16 D-sub connector (25 pins)*1*2 F 16 Spring type terminal block (32 pins)*1*2 Symbol Description P PNP N NPN tEX600 digital input/output unit EX600 DM E P Input/Output type Number of inputs/outputs and connector Connector Connecting Base Symbol Number of inputs Number of outputs Connector E 8 8 D-sub connector (25 pins)*1*2 F 8 8 Spring type terminal block (32 pins)*1*2 Symbol Description

Air Cylinder Series CM2

Mounting style Bore size Basic style B L F G C D T E BZ FZ Head side trunnion style CNA Nil S n 20 25 32 40 20 mm Axial foot style Clevis integrated style 1 pc. 25 mm Rod side flange style Boss-cut basic style n pcs.

Fluoropolymer Fittings Hyper Fitting / Flare Type Series LQ3

E D E M H L1 L1 L2 M W Model D LQ3H21-T LQ3H31-T LQ3H32-T LQ3H41-T LQ3H51-T LQ3H61-T 6 10 8 12 19 25 17 16 16 53 51.5 18 20 14 6 10 8 12 19 25 1/4 22.5 19.5 21 67.5 64.5 22.5 25 18 (E,E) L2 L1,L1 24 26.5 30 22 24 26 24 32 41 74 83.5 97.5 72 81 93.5 24 26.5 31 29 37 49 22 30 36 (E,E): Reference dimension for the inserted tubing from the end surface of the nut (E),L: Nut material PVDF dimensions

V

E ZPT20U C 20 23 14 3 19 25 45 8 3.5 24 15 40 12 4 1.7 F:M5x0.8 F:M6x1 Model A B C Y ZPT25U C 25 28 14 3 19 25 45 8 3.5 24 15 40 12 4 1.8 D E G D E G ZPT32U C 32 35 14.5 3 19.5 25 45 8 3.5 24.5 15 40.5 12 4.5 2.3 ZPT02U 2 2.6 1.2 D E E P T Y P E 0.8 ZPT04U 4 4.8 1.6 3 19 7 4 20 8 ZPT06U 6 7 H:M6x1 H:M8x1 2.5 Model A B D Y ZPT08U 8 9 1 A E F G I C E F G I ZPT25D 25 28 20 3 25.5 25 51 8 3.5

Made to Order

, 32, 40 25, 32, 40 10, 20 16 to 40 16 to 40 10, 16, 20 16 to 40 16, 25, 40 16, 25, 40 16, 25 16 to 50 16, 25, 40 6 to 25 10 to 25 25 12 to 40 20 to 32 10, 15, 25 12 to 25 Vol. no.

0.4

Connector for unit (Plug) 6 y t y t EX600-DXlB EX600-DYlB EX600-DXlCl q w q w e q w er e y t y t y t EX600-DXlD EX600-DXlE EX600-DYlE EX600-DMlE EX600-DXlF EX600-DYlF EX600-DMlF Analog Unit q w e q w e No.

AC Servo Motor Driver (Pulse input type/Positioning type ）

642 _ _ 1 E 300 _ _ 0 F 600 _ _ 1 F 290 7 9 7.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

With External Pilot Specifications (Pitch) 24 P=24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 B 2 B 2 B 2 B 2 B 2 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E) port