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3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Single type Suck back P P P VN A B A B Unit Single type Unit LVC Manifold (5 stations max.) LVA LVH A R P 3 port N.C. PA LVD N.C.

P. 195 Specified CFC P. 192 SV P. 196 T Temperature fuse P. 196 Thermal relay P. 198 Thermistor P. 196 Thermo couple P. 196 Thermoelectric device P. 193 Thermoelectric system P. 193 Thermo-module P. 193 Thermostat P. 196 Three-phase power supply P. 198 Time division proportional output P. 197 Turbine pump P. 194 U UL standards P. 199 V Vane pump P. 194 Vortex pump P. 194 W Water control

Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.

10 Micro Mist Separator AMD Series Standard Specifications p. 11 Flow Rate Characteristics p. 12 Activated Carbon Filter AMK Series Standard Specifications p. 19 Flow Rate Characteristics p. 20 AFF AM AMD Construction p. 21 Dimensions p. 23 Modular Connection Example p. 25 Accessories Sold Separately p. 27 International Standard ISO 8573-1:2010 p. 28 Specific Product Precautions

(Unit: %) H 150 100 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 150 100 1 to 200 B 150 100 C 90 100 H 130 140 Sets the speed loop P constant.

SV B00 SOL.b SOL.a 3(EB) 5(EA) 1(P) 4(A) 2(B) N.C. valve N.O. valve SOL.b SOL.a 1 2 SV C00 3(EB) 5(EA) 1(P) External pilot specification is not available for 4 position dual 3 port valves.

Mode button 1s Set button 1s or Mode button 1s Set button 1s Fig. 41-1 No.IP8S-OM09 57 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-2 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 41-3 Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant

Mode button 1s Set button 1s or Mode button 1s Set button 1s B D C Fig. 40 No.DIG-31900-OM002 49 B Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-1 C Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant I constant D constant Fig. 40-2 D Mode button 1s Set button 1s or Mode button 1s Set button 1s P constant

Power consumption P: 1000 [W] Q = P = 1000 [W] Cooling capacity = Considering a safety factor of 20%, 1000 [W] x 1.2 = 1200 [W] V: Power supply voltage HRSH 090 P HRSH Power consumption HRSE HRSE e Derive the heat generation amount from the output. Output (shaft power etc.) W: 800 [W] w Derive the heat generation amount from the power supply output.

780 880 1080 560 660 760 860 1060 700 800 900 1000 1200 60 160 260 360 460 80 180 280 380 480 Dimensions inside ( ) are for a 100 mm stroke.

Transfer direction Transfer direction P R Applicable Auto Switches/Refer to pages 941 to 1067 for further information on auto switches.

25 125 900 32 140 1100 40 170 1900 3.8-6 Platform Cylinder Series CXT Construction !

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000

CE2 ML2B Graph (1) Graph (2) RSA50, 63, 80 Bore size 50, 63, 80/ = 0 Bore size 50, 63, 80/ = 0.1 C J G5-S 1.0 1300 1300 RSH80 RSA80 RSH63 RSA63 RSH50 RSH50 RSA50 80 0.9 Operating pressure P [MPa] 1200 1200 CV 0.8 1100 1100 0.7 MVGQ 1000 1000 0.6 900 900 0.5 CC 63 80 Load weight m [kg] Load weight m [kg] 800 800 0.4 50 0.3 RB 700 700 0.2 600 600 J 0.1 63 500 500 50 1000 2000 3000 4000 5000