Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

fitting [X: External pilot port] Applicable tubing O.D.: 4 5/32" One-touch fitting [PE: Pilot EXH port] Applicable tubing O.D.: 4 5/32" L3 (L4) U side D side (C6: 3.2) (N7: 7) (4.9) 37.3 8 58.4 36.9 5.5 42.3 16.6 B B B B B 35 4 5 1 2 3 6 7 8 9 10 92.2 A A A A A 18 19 20 21 22 18 16 17 83.7 28.8 26 24 25 A B A B 13 14 15 23 11 12 Air Preparation Equipment Pressure Control Equipment Flow Control

ISO Cylinder

A B A B A B A B A B A B 32 11.5 10.5 7.5 6.5 8 (6) 7 (5) 8.5 (6.5) 7.5 (5.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (4) 5 (3) 40 17.5 15.5 13.5 11.5 14 (11) 12 (9) 14.5 (11.5) 12.5 (9.5) 15 (12) 13 (10) 13 (10) 11 (8) 12 (9) 10 (7) * The value in ( ) is for air cushion. * The above mentioned value is a guide for auto switch mounting positions for stroke end detection.

5 Port Solenoid Valve

56.6 73.2 BUS IN 8.7 PWR PWR 4.7 (9.5) (Fitting for the type with P/E ports on U and/or D sides) 48.2 18 (Pitch) P = 16 (20.5) [External pilot] 18 31.8 4.7 (20) 50.5 39.7 15 3/5 E 3/5 E B 2 B 2 B 2 B 2 B 2 PE B A 3/5 14 A B A 14 A P 1 A 4 P 1 A 4 A 4 A 4 A 4 1 X E Cut dimensions for panel mounting Refer to panel cut dimensions for details. (59.8) P (31.7) 12 B 12 One-touch fitting [1(P),

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

20 B B 15 A A 20 15 5 A A 5 2 (Pitch) P = 10.5 2 (Pitch) P = 10.5 M5 x 0.8 (A, B port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 15 15 Station 2 39.5 31.5 Station 20 228.5 220.5 3 50 42 4 60.5 52.5 5 71 63 6 81.5 73.5 7 92 84 8 102.5 94.5 9 113 105 10 123.5 115.5 11 134 126 12 144.5 136.5 13 155 147 14 165.5 157.5 15 176 168 16 186.5 178.5 17 197 189 18 207.5 199.5 19

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

B side coil Black White 4 station (14 stations) A side coil B side coil Lead wire ass'y Black White 5 station (15 stations) A side coil B side coil Black White 6 station (16 stations) Hook Pin A side coil B side coil U side Black White After inserting the pin, lightly pull on the lead wire to verify the lock. 7 station (17 stations) A side coil B side coil Black White 8 station (18 stations

Air Cylinder Series CA2

MB-S10 100 +0.084 0 120 90 15 188 162 214 26 13.5 24 17 75 100 130 135 25 Z + stroke B Double clevis bracket Material: Cast iron DX DD B DF 4 x DT DH DS 4 x DR B 90 DU DO DO DA DL DU DC Rotation DE Bore size (mm) A B A + B + 90 A 40 to 100 12 60 162 Note) This assembly drawing is provided as a reference.

CA2

17 17 12 45 74 103 80 15 CA2-S06 63 +0.070 0 110 11 73 70 15 130 150 20 22 14 55 90 107 100 18 80 +0.084 0 140 13.5 100 90 15 166 192 26 24 17 75 110 129 120 25 MB-S10 100 +0.084 0 162 13.5 100 90 15 188 214 26 24 17 75 130 135 120 25 B Z + Stroke Double clevis bracket Material: Cast iron DX DO DF 4-DT DH DS DA DL 4-DL B 90 DU DU DO DO DC Rotation DE Bore size (mm) A B A + B + 90 A 40 to

Electric Slide Tables

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Driver side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

Metal Seal/Rubber Seal Series VQ Body Ported

B B B B B B B R R 24.5 20 65 11 1(P) SUP port 2-C6 2n-C3, C4, C6, M5 7 7.5 C3: One-touch fitting for 3.2 P = 11 19.2 2-C6 C4: One-touch fittings for 4 3(R) EXH port C6: One-touch fitting for 6 M5: M5 thread 3 position 50.5 n: Stations (Maximum 16 stations) Formula L1 = 11n + 15.5 L2 = 11n + 28 Dimensions: Side Entry Connector [-FS] L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 37.5 50 125 135.5

ZP

9 4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-B5-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke F: M3 x 0.5 F: M5 x 0.8 C D E G H E G Model 10 13 16 H Model G ZPTB 6-B-A8 F E E E F F 19 47 15 45 ZPTB10-B5-A10 ZPTB10-B-A8 75 40.5 36.5 39 80 72.5 76.5 23 24 78 85 3 6 5 8 ZPTB20-B5-A10 ZPTB15-B-A8 49 113 50.5 46.5 110.5 114.5 29 43 83 51 ZPTB30-B5-A10 ZPTB25-B-A8 59 123

Compact Rotary Actuator Series CRQ2

Rotation starting point End of rotation R e 10 g ot 10 n at ra L io n B Rotation starting point End of rotation n io 70 70 ra at n ot g R e 10 10 L L B B A 10 10 Rotation starting point End of rotation 160 A A R e o g t n a a ti r o n Lmax 15 18 24 27 31.5 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 Size 10 15 20 30 40 Lmax 15 18 24 27 31.5 Size 10 15 20 30 40 The figure shows the view from

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) Cable length (L) [m] 1 2 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C Actuator side (Terminal no.)

C85

A B 26 20 25 8 10 12 7(32) 7(32) 15.5 13.5 15 57 57 15.5 13.5 15 82 82 15.5 13.5 15 D-J79C 17 Hs D-A73 D-A80 15 30.5 45.5 16 1 D-F7V D-F7WV D-F7BAVL 7 23 A B 20 25 8 10 12 7.5(32.5) 7.5(32.5) 16 14 15.5 57.5 57.5 16 14 15.5 82.5 82.5 16 14 15.5 15 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F Hs 15.5 31 46.5 16 20 25 8 10 12 8(33) 8(33) 14 12 13.5 58 58

C85

50 st 15 13 14.5 51 to 100 st 15 13 14.5 101 to 150 st 15 13 14.5 8 10 12 3 3 4 10 4 6 7.5 3.5 3.5 4.5 10.5 4.5 6.5 8 4 4 5 11 5 7 8.5 2 2 3 9 3 5 6.5 8 2 4 5.5 D-C7 D-C80 D-C73C D-C80C 14.5 30 45.5 16 13.3 13.3 10 A B 26 20 25 8 10 12 7(32) 7(32) 15.5 13.5 15 57 57 15.5 13.5 15 82 82 15.5 13.5 15 D-J79C 17 Hs D-A73 D-A80 15 30.5 45.5 16 1 D-F7V D-F7WV D-F7BAVL 7 23 A B 20 25 8 10 12 7.5

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l B C F GA GB J M NA NB P R S T e f Q 32 58 38 16 32 15 M10 x 1.25 11 37 31 3/8 39 141 11 52 21.5 15 25 to 1400 1/3.5 stroke 40 65 45 12 32 15 M10 x 1.25 11 36 30 3/8 42 141 11 52 12 15 25 to 1400 50 76 52 15 40 19 M10 x 1.25 11 43 35 1/2 46 155 13 55 15 15 25 to 1400 63 90 63 15 42 19 M12 x 1.5 14 43 35 1/2 52 163 15 65 15 20 25 to 1500

Table of Contents

AL-31S JIS B 2401G35 5 pcs. u O-ring NBR JIS B 2401G35 1 pc. JIS B 2401G35 1 pc. JIS B 2401G35 3 pcs.

Mechanically Jointed Rodless Cylinder Series MY1

20 73.2 13 (Max.33) 6 5.5 Technical data 52 77 14 129 15 26 73.2 13 (Max.38) 6 5.5 1075 Series MY1W Side Support Side support A MY-SA 2 x G 2 x H E E F A B C D Side support B MY-SB 2 x J 2 x H C D A B A B C D E F G H J Applicable cylinder MY1W16 MY1W20 MY1W25 MY1W32 MY1W40 MY1W50 MY1W63 Model MY-S16A 61 71.6 15 26 4.9 3 6.5 3.4 M4 x 0.7 B MY-S20A 67 79.6 25 38 6.4 4 8 4.5 M5 x 0.8 B MY-S25A

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: W Long shaft side (mm) (mm) Long shaft side X Y Size Size Body (B) 10 1 to 8 10 1 to 14 Body (B) Body (A) 15 1.5 to 9 15 1.5 to 18 Body (A) 20 1.5 to 10 20 1.5 to 20 Short shaft side 30 2 to 13 30 2 to 22 Short shaft side 40 4.5 to 15 40 18 to 30 Y = 106 Rotary Actuator: Free Mount Type Series CRBU2 Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection 4 4 thread 1.6 6 15 10 66 23 43 15 71 28 25 81 38 33 18 D B 02 1.2 Width across flats 12 A N S U F GN GS B3 B5 04 06 N4 U4 6 33 18 15 10 66 23 43 15 71 28 25 81 38 J K ZP T U 04 A8 1.6 6 33 18 J: 2.5 K: 2 15 10 66 23 43 15 71 28 25 81 38 06 08 C2 Dimensions Per Vacuum Inlet: Female Thread Vacuum inlet: One-touch