Dual Rod Cylinder Series CXSJ/CXS

7 o i Piston rod B-side piston Rod cover Piston rod B-side piston Rod cover Component Parts: Standard Piping No. Description No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Rated voltage Note 1) 1 2 3 4 5 6 7 8 J Coil insulation type Note 1) 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz 48 VAC 50/60 Hz 230 VAC 50/60 Hz For VX21: VX021N-10 For VX22: VX022N-10 For VX23: VX023N-10 Nil H Class B Class H DIN terminal or DC not available. Note 1) Refer to the table (1) for the available combinations.

TABLE OF CONTENTS

X .22 (5.6) MFT 2 PLACESAS SHOWN . 2.14 (54.4) 2.14 .71 (18.0) .71 (54.4) (18.0) 1.19 (30.2) 1.19 .80 (20.3) DIA. .80 (20.3) (30.2) .60 DIA. .96 .96 (24.4) .60 (15.2) (24.4) (15.2) B A A B .94 (23.7) .38 (9.5) TYP . .38 (9.5) TYP . 1/8-27 NPT (2) PLACES 7/16-24 UNS-2A (2) PLACES .94 (23.7) 1.88 (47.6) 2.43 (61.7) . . . .

Base Mounted Metal Seal/Rubber Seal Series VQ

L plug connector) 45 (M plug connector) 13.5 9.9 5.5 9 (4(A), 2(B) port) SMC 5 8.7 8.7 M5: M5 thread C4: One-touch fitting for 4 3-C4, M5(1(P), 4(A), 2(B) port) 60 M5 (5(R1) , 3(R2) port) < >: AC 3 position exhaust center: VQ0 5 3 4 0 1 15.2 15.8 12.3 5 5 Manual override A B A B (For C4) 31.5 10.5 25 18 A A B B EB P EA EB P EA 23.4 mounting holes 38 31 Lead wire length = 300 131<141> M plug

Mechanically Jointed Rodless Cylinder Series MY1

Table (1) (mm) 50 63 Bore size (mm) 6 to 26 14 to 54 87 60 MY1W A to A Max. B to B Max.

LJ1H

B 89 A A B Section BB Coupling P.C.D.

Compact Cylinder Series CQS

35.5 35.5 44 47.5 A 22 22 29.5 32.5 B 45.5 45.5 55.5 59 A 32 32 41 44 B 12 16 20 25 30.5 30.5 34 37.5 5 to 30 5 to 30 5 to 50 5 to 50 35 to 200 35 to 200 75 to 200 75 to 300 B + Stroke A + Stroke Bore size (mm) FD FT FV FX FZ L L1 Rod end male thread 12 16 20 25 4.5 4.5 6.6 6.6 5.5 5.5 8 8 25 30 39 42 45 45 48 52 55 55 60 64 13.5 13.5 14.5 15 24 25.5 28.5 32.5 CUJ CU Flange bracket material

Modular F.R.L. Unit

Description Symbol Description Applicable model Model combination AC20 to 60 AC20 to 60 AC20 to 60 AC20 to 60 AC25 to 60 AC20 AC25 to 60 AC20 to 60 AC20 to 60 1 Note 8) 0.02 to 0.2MPa setting Combination 2 3 6 8 C J Note 9) Metal bowl Symbol Filter Regulator Mist Separator Regulator Air filter Lubricator Lubricator with drain cock Nil A B C D w q e Nylon bowl (including sight dome) w q

5 Port Solenoid Valve Series VQZ1000/2000/3000

B B B B B B B B B + IN + + +++A IN A NI NI B B O T U O T U 2 4 To CYL port To CYL port P.930 P.931 P.932 P.941 Connector assembly SY3000-37-80AHousing (1 set: 8 pcs.)

MY1

C D Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1M16 MY1M20 MY1M25 MY1M32 MY1M40 MY1M50 MY1M63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B MY-S40A 55 14.8 8.5 9 14 M10 x 1.5 80 B MY-S63A 70 18.3

CQS

except "A", and "B".)

CL

MLGC Front flange CNA Bore (mm) B BZ FT FD FX FZ FY CB 20 25 32 40 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 38 45 45 52 65 75 75 82 25 30 30 36 Rear flange/CLG1GN Front flange/CLG1FN CV/MVG CXW Refer to p.3.1-30 for long stroke dimensions.

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

Combination Cylinder

CNA Front flange CNG Bore (mm) B BZ FT FD FX FZ FY MNB 20 25 32 40 25 30 30 36 65 75 75 82 38 45 45 52 57.5 69 69 76 5.5 5.5 6.6 6.6 6 7 7 8 52 60 60 66 Rear flange/CLG1GN Front flange/CLG1FN CNS CLS Refer to p.3.1-30 for long stroke dimensions.

High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

SV

A B A B COM PWR A A A A B B B B Cable with M12 connectors EX500-ACCable with M12 connectors EX500-ACP. 1-2-27 P. 1-2-27 Relay output module SV1000-60-5-1A (Refer to page 1-2-94.) Connection of sensors with M8, M12 connectors (auto switch, pressure switch, etc.) A B A B COM PWR A A A Connection to a large solenoid valve, etc. A separate power supply is required.

ZP

Y 3.5 80 ZPT80H-A16 82 16.5 28 4.5 B 65 C 14.5 D 26 E 56 58 80 ZPT80H-B12 82 16.5 28 M12 x 1.75 4.5 80 ZPT80H-B16 82 16.5 28 M16 x 1.5 4.5 13-11-73 Series ZPT ZPT H-A16 (Male thread) 100 125 ZPT H-B (Female thread) 100 125 Hexagon width across flats 22 Width across flats 60 Width across flats 60 70 Hexagon width across flats 24 10 A B 8 A B 40 40 (mm) Model A 100 ZPT100H-B12 C M12 x 1.75

smcmaintenancepartslist

Material Applicable model Note) Qty. 3 5 3 5 3 5 FGF3A-40 FGF5A-60 FGF3B-40 FGF5B-60 FGF3-40 FGF5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 FGFS3-40 FGFC3-40 FGFS5-60 FGFC5-60 FGFL3-40 FGFR3-40 FGFL5-60 FGFR5-60 Stainless steel 304 BT-3S Replacement Parts 3 Basket Stainless steel 304 Part No. Qty. 1 1 1 1 1 No.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

IH2-10C 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 25 16 76 60 25 32 M20 x 1.5 31 M5 x 0.8 16 F J E 31.5 20 90 70 30 40 M24 x 1.5 36 M5 x 0.8 20 dH10 B series rod 40 31.5 145 115 45 60 M30 x 1.5 50 M6 x 1.0 30 40 31.5 145 115 45 60 M39 x 1.5 61 M6 x 1.0 30 H0.1 0.4 D 50 40 185 145 57 79 M48 x 1.5 76 M8 x 1.25 40 25 16 76 60 25 32 M16 x 1.5 26 M5 x 0.8 16 C 31.5 20 90 70 30 40 M20 x 1.5 31

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.