, Stroke(mm): 5, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.06～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BWL

Stroke(mm): 15, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: [Block Shape] Block shape, Additional Function: Standard, Environment, Applications: Standard, Operating Temperature(°C): -10～70, End Locking: No, Valves: No, Operating Pressure(MPa): 0.05～0.7, Cushion: Rubber cushion, Port thread type: M5 × 0.8, Auto Switches: M9BWL

This is a legacy product, and replaced byMGPM40-50Z-M9BWL, CYL, COMPACT GUIDE, SLIDE *LQA, ACTUATOR, MGP COMPACT GUIDE CYLINDER, MM, 40MM MGP SLIDE BEARING, 5.35934 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040040MGPM40??1.95??2.372.833.253.684.104.534.955.996.857.708.55

This is a legacy product, and replaced byMGPM25-50Z-M9BWL, CYL, COMPACT GUIDE, SLIDE *LQA, ACTUATOR, MGP COMPACT GUIDE CYLINDER, IM, 25MM MGP SLIDE BEARING, 2.98986 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040025MGPM25?0.95?1.051.161.271.651.922.192.472.743.013.674.214.765.30

This is a legacy product, and replaced byMGPM25-50AZ-M9BWL, CYL, GUIDE W/AIR CUSH,SLIDE BR, ACTUATOR, MGP COMPACT GUIDE CYLINDER, IM, 25MM MGP SLIDE BEARING, 3.68630 lb, Bore size (mm)ModelStandard stroke (mm) 1020253040507510012515017520025030035040025MGPM25?0.95?1.051.161.271.651.922.192.472.743.013.674.214.765.30

This is a legacy product, and replaced byMGPM40-200AZ-M9BWL MGP COMPACT GUIDE CYLINDER. CYL, GUIDE W/AIR CUSH,SLIDE BR. ACTUATOR. 40MM MGP SLIDE BEARING. 11.81047 lb. MM.

This is a legacy product, and replaced byCDLA2L50-660-E-M9BWL

15

flange to the housing B using motor flange fixing screws (included parts).

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

Table of Contents

resin Wear ring B !

Modular F.R.L. Units

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

2

For AC10-A For AC20-B For AC25-B For AC30-B For AC40-B For AC40-06-B For AC50-B For AC55-B For AC60-B For AC10A-A For AC20A-B For AC30A-B For AC40A-B For AC40A-06-B For AC50A-B For AC60A-B For AC10B-A For AC20B-B For AC25B-B For AC30B-B For AC40B-B For AC40B-06-B For AC50B-B For AC55B-B For AC60B-B For AC20C-B For AC25C-B For AC30C-B For AC40C-B For AC40C-06-B For AC20D-B For AC30D-B

MY1

B 100 124 88.5 Operating range l Note) 9 10 6 B A MY1HT (High rigidity/High precision guide type) (mm) 63 50 Mounting position A 290.5 335.5 B 123.5 138.5 Operating range l Note) 5 5 A B 8-11-106

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

XM, XY

), CF KF (NW) KF (NW), CF KF (NW) KF (NW), K (DN), CF KF (NW), K (DN) Flange type Body: SCS13 (Conforms to Stainless steel 304) Bellows: Stainless steel 316L Bellows holder: Stainless steel 304.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Light weight & compact Series XMA with KF(NW) flange Model Weight kg A mm B mm Conductance l/s XMA-16 5 0.33 40 103 XMA-25 XMA-40 XMA-50 14 0.61 50 113 B 45 1.40 65 158 80 2.00 70 170 A 160 XMA-63 XMA-80 3.60 196 88 200 6.20 90 235 : Common to all series.

XL

(c) (a) (b) (c) (b) (c) (a) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) (b) (c) (a) (b) (c) Note 1) The above (a), (b), (c) indicate heater mounting positions.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Magnet: Built-in, Mounting: Double Clevis, Bore: 10mm, Stroke: 45mm, Head Cover: Perpendicular to Axis, Pivot Bracket: Pivot Bracket not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting: Band Mounting, Cushion: Rubber Bumper

Magnet: Built-in Magnet, Series: J2Z, Mounting: Double Clevis, Bore Size: 10mm, Stroke: 45mm, Head Cover Port Location: Perpendicular to Axis, Pivot Bracket: Pivot Bracket shipped w/Product, Not Assembled, Rod End Bracket: Double Knuckle Joint, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch