High Vacuum Angle Valve

C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26

Table of Contents

0.5 Finger closing port MHC MHT 25 25 MHY 3-3 depth 6 +0.02 0 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port (A, B, C common view) MHW 6-M3 x 0.5 thread depth 6 (A, B, C common view) MRHQ Misc.

Aluminum High Vacuum Angle Valve

V M A C U U M type plug connector (AC power supply) not attached for M of sizes 16 and 25.

Table of Contents

16 25 40 Operating range Bore size 16 25 40 Operating range 58 102 3.0 58 102 3.5 58 102 3.5 58 152 8.0 58 152 9.0 58 152 11.0 89 241 6.5 89 241 7.0 89 241 7.5 (mm) (mm) (mm) C C C D D D Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 31 129 3.4 31 129 3.5 31 129 4.0 3.5 3.5 61 149 61 149 61 149 4.0 5.0 3.0 94.2 235.8 94.2 235.8 94.2

Free Mount Cylinder

Applicable cylinder bore (mm) 10 16 20 25 32 2.4 H M4 x 0.7 d 7 B 8.1 C 6.8 D Part no.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Table of Contents

Packaged with Each Cylinder d C H B C d Part no. SN-032B SN-040B Applicable bore size (mm) 25, 32 40 M26 x 1.5 8 32 37 H B M32 x 2.0 11 41 47.3 10-2-12 12 Sine Rodless Cylinder Direct Mount Type Series REAR 10, 15, 20, 25, 32, 40 How to Order RE A B REA R 25 300 Y7BW REC CX Number of auto switches CY Nil 2 pcs. S 1 pc.

Magnet: D (Built-in), Mounting: D (Double Clevis), Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: D (Built-in), Mounting: FZ (Boss-cut/Rod Flange), Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: D (Built-in), Mounting: UZ (Boss-cut/Rod Trunnion), Bore Size: 40mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: C (Auto Switch Mounting Bracket)

Magnet: Built-in, Mounting: Double Clevis, Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Boss-cut/Rod Flange, Bore Size: 20mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Magnet: Built-in, Mounting: Boss-cut/Rod Trunnion, Bore Size: 40mm, Stroke: 25mm, Rod End Thread: Male Thread, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs. (Or None in the Case of No Switch), Auto Switch Mounting Bracket: Auto Switch Mounting Bracket

Rotary Actuator/Vane Type

[mm] Size A B C D E (g7) F (h9) G H K L M N P Q R T W W1 X Y1 Y2 Z Q2 Q3 Q4 10 29 22 29 14 40.004 0.016 9 0 0.036 1 7 9 0.5 16.5 9.5 18.5 M3 x 0.5 3.5 3.5 M3 x 0.5 10.6 19.8 35 31 25 17 41 15 34 25 29 18 50.004 0.016 12 0 0.043 1.5 6 10 0.5 19 10 18.5 M3 x 0.5 3.5 3.5 M3 x 0.5 12.6 21 35 36 29 21 48 20 42 34.5 30 20 60.004 0.016 14 0 0.043 1.5 8 10 0.5 25.5 13 25 M4 x 0.7 4.5 4.5 M5 x 0.8

Smooth Cylinder/Low Speed Cylinder

Y-020B Y-032B Y-040B size +0.2 +0.1 9 Type C 9 for axis 46 16 20 25 36 M8 x 1.25 9 18 5 14 CDP-1 +0.2 +0.1 M10 x 1.25 25, 32 9 Type C 9 for axis 48 18 20 25 38 9 18 5 14 CDP-1 +0.3 +0.1 3 x 18 L 49.7 M14 x 1.5 40 16 68 22 24 55 12 38 13 25 CDP-3 Clevis pin and retaining ring (cotter pin for 40) are attached.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

Made to Order

(C) (C) (C) (C) (C) (C) Cushion valve CL1 1.

5

Auto switch model Bore size (mm) 20 25 32 40 D-M9(V) D-M9W(V) D-A9(V) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) REA D-M9A(V) BM5-020S (A set of b, c, d, e) BM5-025S (A set of b, c, d, e) BM5-032S (A set of b, c, d, e) BM5-040S (A set of b, c, d, e) REB Switch bracket (Resin) Transparent (Nylon) Note 1) Auto switch

Electric Actuator/Slider Type

C L A B C L 25 32 63 25 32 63 Rod ange: LEY F Head ange: LEY G Head ange is not available for the LEY32/LEY63.