Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

TB W Counterbore depth TC Inner cover holding screw Note) (mm) A 8 12 B 10.5 16 C 6.4 10.2 E 4 6 ED 9.5 13 EK 4 6 F 12.5 25 G 10 9 H 45 75 HA 23 39 HI 23 39 HL 37.6 63.3 HP 44 73.5 J M6 x 1 M10 x 1.5 JK 10 12 K 21 20 L 67 90 LD 5.6 9.2 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 LW 69 115 MM M4 x 0.7 M6 x 1 M 6 8 N 4.5 7.5 P 5/16-24 UNF 7/16-20 UNF PA 25 50 PB 60 100 PC 10 12 Q 112 147 QW 48

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.

CYP

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

CYPSeries

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Table 2 10 Particle concentration (particles/m) Class M3.5 [Class100] 10 10 Class M2.5 [Class10] Inner cover holding screw tightening torque [Nm] 10 Tightening torque Model Screw size Class M1.5 [Class1] CYP15 0.3 M3 x 0.5 10 CYP32 2.45 M6 x 1 10 0.01 0.1 1 10 Plate Particle diameter (m) Note

Clean Rodless Cylinder Series CYP

Nil S n Standard stroke Standard stroke (mm) 100, 150, 200, 250, 300 350, 400, 450, 500, 600, 700 Bore size (mm) Type of auto switch 15, 32 Nil Select auto switches from the table below.

K35-OMW0031

The range covers from the retracted end (0%) to the calibration set point (100%). The range is divided into 8 sections. The duration for which the piston remains (during both operating and stopping) in the specified area is recorded for 1 hour by the controller.

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: H7B--Solid State, Gen. Purpose, 2 Wire, Lead Wire, 0.5M, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: N (Non-locking Type), Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: A (Non-lube Air Cushion), Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: R (Front Lock), Release of Manual: L (Locking), Auto Switch: G5P--Solid State, Gen. Purpose, 3 Wire PNP, 0.5M, Lead Wire or Prewired Connector: L (3m)

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Cylinder (Tube) Inner Diameter(φ): 32, Stroke(mm): 100, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Non-use of Copper and fluoropolymer-based Material (Partially Plating), End Locking: [Included] Presence, Valves: -, Cushion: Air cushion, Operating Pressure

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Air Cushion, Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Non-locking Type, Auto Switch: M9BW--Solid State, 2-color Indication, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -

Made to Order

(25 to 40) 2001 to 5000 (50, 63) 25, 32, 40, 50, 63 100 to 1000 10 to 100 20, 25, 32 10 15 20 25 100 to 300 100 to 500 100 to 600 100 to 800 301 to 500 501 to 750 601 to 1000 801 to 1200 10, 20, 30, 40, 50 75, 100, 125, 150 10, 15 CY1H CXSW 10, 20, 30, 40, 50, 75, 100 125, 150, 175, 200 20, 25, 32 ML1 25 32 1001 to 1200 1001 to 1500 25, 32, 40 100 to 1000 1001 to 2000 2001 to 4000 (25, 32