Modular F.R.L. Pressure Control Equipment

(except when the bowl material is metal) 221 Regulator / AR20K to AR60K Regulator with Backflow Function AR10 to AR60 Replacement Procedure is P.404 Construction AR10 AR20(K)/AR25(K) AR30(K)/AR40(K) AR50(K)/AR60(K) t e t t t IN OUT e e e IN OUT IN OUT r IN OUT r r r AR20K to AR60K (Regulator with Backflow Function) A-A y A 2 OUT 1 I N C SM A The numbers are the same as the "Construction"

VFR

Piping port 3 8 03 04 06 1 2 3 4 3-5-79 80 Series VFR5000 Construction 2 position single 2 position double VFR520 VFR510 (B) (A) 4 2 (B) (A) 4 2 (EA)(P)(EB) 5 1 3 (EA)(P)(EB) 5 1 3 r u e t r u q o e !

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 39.3 40.1 A 4 A 4 63.3 79.8 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-Plug [1 (P), 3/5 (R) port] 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 2-One-touch fitting [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting [4 (A), 2 (B) port] Applicable

VM

JIS Symbol 2 port Roller plunger VM122-M5-06 VM132-M5-06 VM122-M5-06S VM132-M5-06S Panel mounting hole Polyacetal or hard steel roller Hexagon nut thick 5, across flats 17 3 port 0.5 MPa supply R port (3 port only) 2-M5 x 0.8 depth 4 T.T. O.T. P.T.

VFS

0, Metal joint q, w, Terminal i, O-ring e, r, t, y, u, Receptacle assembly Plug-in type 04 06 VVFS5000-1A-1!0 Manifold block assembly 04 06 Manifold block !0, Metal joint q, w, O-ring e, r, t, y, u Non plug-in type End plate (U) !1, Metal joint q, w End plate (U) !1, Metal joint q, w End plate (D) !2, Metal joint q, w, O-ring e, r, t, y, u End plate (D) !

Vacuum Unit

Pressure switch for vacuum assembly (With 2 mounting screws) ZK2 ZS A E A G M r Wiring t Other specifications Construction !

Table of Contents

This can cause a loss of holding force and malfunction. AS2201F-01-06-X214 AS2301F-01-06-X214 RS H A AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 RZQ 3. When disassembling to replace the seals and wear ring, refer to the separate disassembly instructions. AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 MI W S 4.

Flow Control Equipment

AQ340F-06 04 06 06 4.3-3 4.0-2 Precautions Be sure to read before handling.

V100

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

Hydraulic

MA a A MA a Air release R (max.)

Secondary Batteries

With bracket a Option w Note) Applicable to 90-AF40-06, 90-AFM40-06 and 90-AFD-40-06.

F

E A D: M-5E B U L K H E A D R E D U C E R: M-5ER R E D U C I N G B U S H I N G: M-5B M5 female to 18 female taper M5 female to 18 male taper P R O D U C T S E L E C T O R P R O D U C T S E L E C T O R T E C H N I C A L SPECIFICATIONS S T R A I G H T B A R B C O N N E C T O R: M-01AU-4 M-01AU-6 S T R A I G H T A D A P T O R: M-01H-4 M-01H-6 Applicable Tube Material Nylon Soft Nylon Polyurethane

Modular Type Air Filter Series AF

Note 2) Bowl assembly for AFM30 to AFM40-06 includes a bowl guard (steel band material). 30 AFM20/30/40 Dimensions Bracket (option) AFM20 L G K D F M J E B H OUT IN C Port size OUT o s Drain Min. clearance for maintenance 45 A L AFM30, 40, 40-06 Bracket (option) A D G F K M J C B E H OUT IN OUT Port size Min. clearance for maintenance AFM30: 50 AFM40: 75 P Drain AFM20 AFM30, AFM40, AFM40

Vacuum Pad

Applicable pad Applicable pad Applicable pad 015U/02U/035U 04UM/06UM/08UM/04B/06B/08B 10UM/13UM/16UM/10B/13B/16B R R R R R R R 1.4 3.5 1.8 4 R R R R R 1.5 0.8 R 5 3 1.8 6 4 1.8 0.4 1.5 2 Note) R part has to be smooth with no corners.

ZP

ZP R 16 K20 A10 06 UGN [Pad model no.] Adapter connection thread Symbol Thread dia. 1 A8 Symbol Pad dia. 1 02 to 08 2 A10 B5 2 10 to 16 3 A14 3 20 to 32 B8 4 40, 50 T 2 ZP B5 [q Adaptor] S ZP 06 B5 R [w Type R adaptor] Buffer connection thread B5 Symbol S Pad dia. 02 to 16 Pad dia.

Modular Type Filter Regulator Series AW

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 3). Construction AW20K to 40K A-A i A w t SMC K P q C U O S L H o t OUT (Outlet pressure) IN (Inlet pressure) A Parts list y Material AW20K AW30K AW40K AW40K-06 Description No. Note e Zinc die-cast Aluminum die-cast Platinum silver 1 2 Body r Bonnet Black Polyacetal u Parts no.

2/3 Port Valve

VX Variations VNl ValveO OElectrical entry VQ OGrommet OConduit ODIN connector OConduit Terminal A Energized open (N.C.) R P A Energized closed (N.O.) R P A Common (C.O.)

Table of Contents

6 @9 r MTS $0 #6 MY A' CY $1 !1 !2 !0 !8 w $4 t e $2 !5 $3 y!7 @8 !4 !

Series KC Self-seal Fittings

KBE1-04 KBE1-06 KBE2-06 KBH1-R1S KBH2-R1S KBH2-R2S KBH2-R3S KBH3-R2S KBH3-R3S KBH3-R4S KBH4-R3S KBH4-R4S R(PT) 1 2 R(PT) 3 8 R(PT) 1 2 R(PT) 3 8 R(PT) 1 4 R(PT) 3 8 R(PT) 1 4 4 R(PT) 1 8 Air supply port: KBE, KBH, KBB, KBS, KBL (Page 84-85) 6 KBE2-08 KBE2-10 KBE3-08 8 10 10 8 2 KBE3-10 KBE3-12 KBE4-12 R1 KB 1 H S 12 Female connector elbow union: KBL Type With sealant (only male thread) standard

SX

141.1 99.2 99.2 19 42.9 (Lead wire length) 19 42.9 Polarity indication 13.6 13.6 A B A B B A A COM B + A B A B A B A Manual override (Push and turn for locking type) 42 31.4 Manual override (Press and turn for the locking type) 42 31.4 84.9 B: Green A: Orange 2-4.2 84.9 B: Green A: Orange 2-4.2 2-One-touch fittings (Mounting holes for manifold) (A, B port) (A, B port) 2-One-touch fittings