AIR COMBINATION

AD38-A AD48-A Y100-A Y200-A Y300-A Y400-A Y500-A Spacer Y100T-A Y200T-A Y300T-A Y400T-A Y500T-A Spacer with bracket AKM2000-01-A AKM3000-(01)-A AKM4000-(02)-A Check valve Note4) Note5) AKM2000-(02)-A AKM3000-02-A AKM4000-03-A IS10M-20-A IS10M-30-A IS10M-40-A IS10M-50-A Pressure switch Note5) Y210-01-A Y310-(01)-A Y410-(02)-A Y510-(02)-A T-Spacer Note4) Note5) Y110-M5-A Y210-(02)-A Y310

Free Mount Cylinder

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10 20 50 Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) 40 30 5 10 20 10 0 5 0 5 20 10 10 0 10 Number of needle rotations Number of needle rotations Number

NCQ8

Clevis (1) RCS-015 RCS-02 RCS-03 RCS-04 RCS-05 RCS-08 RCS-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Clevis (1) RCD-015 RCD-02 RCD-03 RCD-04 RCD-05 RCD-08 RCD-10 Pin (1) PS-015 PS-02 PS-03 PS-03 PS-05 PS-08 PS-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 Snap rings (2) PC-01 PC-02 PC-03 PC-03 PC-05 PC-08 PC-10 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2")

Smooth Cylinder/Low Speed Cylinder

16 0.090 J Precautions Standard Stroke Be sure to read before handling.

SQ1000/2000

plate assembly u F kit L kit T kit S kit P (J) kit q !

AC Servo Motor Driver (Pulse input type/Positioning type ）

1 A Q a q 0 0 1 0 2 STX DC2 2 B R b r 0 0 1 1 3 ETX DC3 # 3 C S c s 0 1 0 0 4 $ 4 D T d t 0 1 0 1 5 % 5 E U e u 0 1 1 0 6 & 6 F V f v 0 1 1 1 7 7 G W g w 1 0 0 0 8 ( 8 H X h x 1 0 0 1 9 ) 9 I Y i y 1 0 1 0 10 * : J Z j z 1 0 1 1 11 + ; K [ k { 1 1 0 0 12 , < L l | 1 1 0 1 13 = M ] m } 1 1 1 0 14 . > N ^ n 1 1 1 1 15 / ?

Hydraulic

SO-03 SO-04 SO-05 NT-02 NT-03 NT-04 AC-NI-50 8 8 9 11 M22 x 1.5 M24 x 1.5 M30 x 1.5 M33 x 2.0 20 25 32 40 30 36.9 43.9 47.3 5 6 8 10 26 32 38 41 12.5 16.5 21.0 23 M8 x 1.25 M10 x 1.25 M14 x 1.5 M16 x 1.5 20 25 32 40 15.0 19.6 25.4 27.7 26 32 38 41 13 17 22 24 Accessory Brackets (Optional) I-type single knuckle joint Bracket L tap 4-J counter bore 20: I-02 25: I-03 Material: Rolled steel

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLA 2 A 05 02 C LVN Body class TL/TIL Material Symbol 2 3 4 5 Body class 2 3 4 5 Thread type Manifold PFA Symbol C LQ3 Symbol Nil N Thread type Rc NPT Base type Port size (port P) A Stacking type Symbol 02 03 04 06 Body class 2 3 4 5 Port size 1/4 3/8 1/2 3/4 Manifold stations 02 2 stations 05 5 stations How to Order Valve LVA 2 0 02 C A Option Body

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

ZH13BL-08-02 I J K L M N O P Model 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 8 Rc 1 4 Rc 1 4 ZH05BS-06-01 ZH05BL-06-01 ZH07BS-06-01 ZH07BL-06-01 ZH10BS-06-01 ZH10BL-06-01 ZH13BS-08-02 ZH13BL-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in

NCG/CG1

Other dimensions are the same as basic style. 18 Air cylinder: Standard Type Double Acting, Single Rod Series NCG/CG1 Basic Style with Single Clevis: NCGC ZZ + Stroke Z + Stroke CD 8-J LE TC L G B TH TW UL TA UE TS UT 4-TB Inch Bore size (mm) Standard stroke range CD J L LE TA TB TC TH TS TW UE UL UT Z ZZ G B 0.250 0.250 0.250 0.375 0.375 0.375 0.31 0.70 0.68 1.07 0.88 0.91 0.91 0.28 0.28

Air Cylinder Series CM2

Rubber bumper 0.4 J 0.65 J 1.2 J Allowable kinetic energy 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) CG1 With air cushion MB Standard Stroke MB1 Bore size (mm) Maximum stroke (mm) Standard stroke (1) (mm) Made to Order Specifications (For details, refer to pages 1373 to 1498.)

Modular Type Lubricators Series AL

J C 2 A E EE D DD With Auto Drain PANEL FITTING IN OUT Z CC AA K L V U X W T S Y Q F H Bracket and Mounting Nut (Optional) IN OUT J C 2 A E D DD 7 Series AR20~40 Regulator How To Order AR 20 N 02 B Y Z X48 Regulator With External Epoxy Coating, Stainless Fasteners Name Plate, Caution Plate On Bowl in psi, F Body Size Symbol 20 30 40 Size 1/8 3/8 1/2 Handle Orientation Symbol Nil Y Description

VEX1

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System Solenoid valve Speed controller Tubing diameter x Length Silencer A B C D E F G H I J K 10 x 1 m 12 x 1 m 12 x 1 m SGP15A x 1 m SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m VEX VEX3 2-02 1 2 AS4000-02 AN200-02 AS420-03 AS420-04 AS420-04 AS500-06

0.4

Note 2) L kit: Nil F P PC J Nil S F kit P kit (26P) P kit (20P) J kit (20P) L kit S kit q w Note) L kit: Nil F e r kit SE SSQ1000 No.

LEC-OM02704CN

C 1. ##0064 ## 00 01 1 02 2 03 3 62 62 63 63 64 64 2. $$$0255 3. ** 4.

ZP

A D H J B Y C B Y C D H Model Model Misc.

Digital Flow Switch (Integrated display type)

-J Dimensions PFM7-(N)01/(N)02/F01 -59No.PF-OMJ0006-J PFM7-(N)01L/(N)02L/F01L -60No.PF-OMJ0006-J PFM7S-(N)01/(N)02/F01 -61No.PF-OMJ0006-J PFM7S-(N)01L/(N)02L/F01L -62No.PF-OMJ0006-J PFM7-F02 -63No.PF-OMJ0006-J PFM7-F02L -64No.PF-OMJ0006-J PFM7S-F02 -65No.PF-OMJ0006-J PFM7S-F02L -66No.PF-OMJ0006-J PFM7-C4/C6/C8/N7 -67No.PF-OMJ0006-J PFM7-C4L/C6L/C8L/N7L -68No.PF-OMJ0006-J PFM7S-C4/C6/C8/N7

VCL

VCHm Dimensions: Bracket VDW VQ A J LVM 4 x G C 1.5 VCA VCB VCL B D L E VCS VCW 4 x H Valve mounting hole F Bracket Mounting Dimensions/Bracket Material: Stainless Steel (mm) B C D E F G H J L A Bracket part no.

Vacuum Pad

(for Heavy-duty) Buffer assembly model Applicable pad model Series ZP Page ZP40H ZP50H ZP40HB ZP50HB P. 80 P. 81 ZPB-T1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 80 P. 81 ZPB-T2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB P. 80 P. 81 ZPB-T3 (J/JB/JF)01 ZP40H ZP50H ZP40HB ZP50HB P. 82 P. 83 ZPB-X1 (J/JB/JF)01 ZP63H ZP80H ZP63HB ZP80HB P. 82 P. 83 ZPB-X2 (J/JB/JF)01 ZP100H ZP125H ZP100HB ZP125HB