Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

Type: Throttle Valves, Body Material: [Resin] PBT, Control Method: Meter Out / In, Format: [Elbows] Dual, Environment, Applications: Standard, Ambient Temperature and Working Fluid Temperature(°C): -5～60, Thread Portion Material: [Brass] Brass + Electroless Nickel Plating, Operating Pressure Range(MPa): null～1.0, Knob Type: Resin, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male

MHK2

Internal Grip External Grip MHK2-12S MHK2-12C 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Table of Contents

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

MHK2

Internal Grip External Grip MHK2-12C MHK2-12S 20 15 Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Pressure 0.6 MPa Gripping force (N) Gripping force (N) 15 10 0.5 MPa 0.5 MPa 10 0.4 MPa 0.4 MPa 5 5 0.3 MPa 0.3 MPa F F 0 0 10 20 30 40 50 10 20 30 40 50 Note) In case of single acting type, the value is for stroke center.

Wedge Cam Operation Provides

distance (mm) (L1) Open distance (mm) (L2) Opening/Closing stroke (mm) (L2_L1) Bore size (mm) Weight (g) Model MHZ2 MHK2-12D 12 External hold: 15 Internal hold: 16 4 9 13 75 MHZJ2 External hold: 31 Internal hold: 36 External hold: 46 Internal hold: 56 External hold: 80 Internal hold: 86 MHK2-16D 16 6 14.6 20.6 113 MHQ Double acting MHK2-20D 20 10 16 26 235 MHL2 MHK2-25D 25 14 19 33 440 MHK2-12S

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

operating frequency (c.p.m) Mass (g) Effective gripping force per finger (N) Action Model Bore size (mm) External grip: 15 Internal grip : 16 External grip: 31 Internal grip : 36 External grip: 46 Internal grip : 56 External grip: 80 Internal grip : 86 MHK2-12D 12 4 9 13 75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S

ASR/ASQ (PFC/QFC valve) can reduce air consumption by 25%. The PFC control valve has a pressure adjustment and speed control function.The QFC control valve offers a high speed exhaust and cylinder speedcontrol function. Series ASR/ASQ with one-touch fitting (Pressure/Flow valve),can reduce air consumption by 40%. The pressure valve has a regulator withcheck valve, plus speed controller.

Wedge Cam Operation Gripper Series MHK2

Holding Force MHK2-12C MHK2-12S 20 15 Pressure 0.6MPa Pressure 0.6MPa Holding force N Holding force N 15 10 0.5MPa 0.5MPa 10 0.4MPa 0.4MPa F F 5 5 0.3MPa 0.3MPa Note) In case of single acting type, the value is for stroke center. 0 0 10 20 30 40 50 10 20 30 40 50 1N = 0.2248 lbf = 0.102 kgf 1MPa = 145 psi = 10.2 kgf/cm2 Holding point L mm Holding point L mm MHK2-16S MHK2-16C O.

PF2M7.eng

[inP] External input setting 5 [F20] [inP] [rAC] Accumulated value reset SET button Press this button to change to another mode and to set a value. [1-5] 1 to 5 V Voltage output (when voltage is output) [---] Analogue output is not selectable (for current type output) [F22] [AoUt] [AoUt] Analogue output setting 3 Displays the output status of OUT1 and OUT2.

PFMB.eng

PFMB7201 : If the error cannot be reset after the above measures are taken, then please contact SMC. [ inP] External input 3 [F20] [r AC] Accumulated flow external reset G1/4 21 mm PFMB7501 Mounting screws Screw is prepared by customer.

PFMC.eng

[H_2] Hysteresis of OUT2 [ inP] External input 3 [REACUM] Accumulated flow external reset 25 50 100 [F20] Accumulated flow error Do not touch the terminals and connectors while the power is on. Otherwise electric shock, malfunction or damage to the product can result.

PF3W7.eng

[F20] Setting of external input Accumulated flow external reset Free range analogue output for instantaneous flow: OFF * (Analogue output for fluid temperature) Temperature lower limit exceeded The fluid temperature is below -10 oC. Rise the fluid temperature. Avoid any sealing tape getting inside the piping. Ensure there is no leakage from loose piping.

PF3W3.eng

Panel mount adapter (Part number: ZS-26-B) Front protective cover (Part number: ZS-26-01) [F20] Setting of external input Accumulated flow external reset [F22] Setting of analogue output Free range analogue output for instantaneous flow: OFF * Do not operate the product outside of the specifications. Do not use for flammable or harmful fluids.

SL5200

AP Tech 316L SS secondary remelt steel conforms to the SEMI standard F20 UHP grade. [Hastelloy] Trademark of Haynes International A nickel-chromium-molybdenum alloy with excellent corrosion resistance. [Elgiloy] Trademark of Elgiloy Specialty Metals A cobalt-chromium-nickel alloy with excellent corrosion resistance and superelasticity.

CS1

Foot CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order 2 foot brackets for one cylinder.

CE

CEP112 CEP120 Foot Rod side flange Extension cable 5 m Extension cable & connector 10 m CEP1-L12 CEP1-F12 15 m CEP1-L20 CEP1-F20 20 m Applicable Auto Switch/Refer to page 10-20-1 for further information on auto switches.

Air Cylinder: Standard Type Lube, Non-lube Type, Air-hydro Type Series CS1 Lube, Non-lube: ø180, ø200, ø250, ø300 Air-hydro: ø125, ø140, ø160

Foot style CS1-L12 CS1-L14 CS1-L16 CS1-L18 CS1-L20 CS1-L25 CS1-L30 Flange style CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 CS1-F30 Single clevis style CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 CS1-C30 Double clevis style CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 CS1-D30 Order two foot brackets per cylinder.

Cylinder with Lock Series CLS

CS1-F12 CS1-F14 CS1-F16 CS1-F18 CS1-F20 CS1-F25 Single clevis type CS1-C12 CS1-C14 CS1-C16 CS1-C18 CS1-C20 CS1-C25 Double clevis Note 3) CS1-D12 CS1-D14 CS1-D16 CS1-D18 CS1-D20 CS1-D25 Note 1) When ordering foot brackets, 2 pcs. should be ordered for each cylinder. Note 2) 125 to 250 front flange types use series CS1 long stroke flanges.