Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G MM L J K C D B A W MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 26 55 115 235 420 4.45 5.8 7.45 8.9 14.8 17.7 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 3 5 6 8

MHZ

Flat Type Fingers [3] D4-MM thread depth L (Thread for mounting attachment) 20K J A A D G B D B K J F C S W O (mm) Model Open Closed Weight (g) F G A W B C D J K MM L MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 2H9 2.5H9 3H9 4H9 5H9 6H9 +0.2 0 2 2.45 3.05 3.95 4.9 7.3 8.7 5 1 1.4 1.4 1.6 2 3 3 4 5 8 10 12 15 18 3.5 6 8 10 12 20 24 7.2 5.2 8.3 10.5 13.1 18 22 7.5

Compact Cylinder Series CQS

D 30 35 30 35 35 40 40 45 C CDQSB12-5S -10S CDQSB16-5S -10S CDQSB20-5S -10S CDQSB25-5S -10S M3 x 30L x 35L M3 x 30L x 35L M5 x 35L x 40L M5 x 40L 45L 6.5 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt Mounting bolt 8.5 Single Acting, Spring Extend Cylinder model Mounting bolt size C D 30 35 30 35 35 40 40 45 CDQSB12-5T -10T CDQSB16-5T -10T CDQSB20-5T -10T

Parallel Style Air Gripper Series MHZ

MHZ Flat Type Fingers [3] MHF 4 x MM thread depth L (Thread for mounting attachment) MHL K J MHR A A D G B MHK MHS D B MHC K J F MHT C MHY S W MHW O -X (mm) F G Mass (g) L MM J K D C B W Model A MRHQ Open Closed MHZ2-63 (1) 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 0 0.05 +1.2 0.8 +2.2 0 +2.2 0 +2.3 0 +2.5 0 +2.7 0 +2.9 0 +0.2 0 5 4 5 8 10 12 15 18 1 1.4 1.4 1.6 2 3 3 3 5 6 8 10 12 16 M2

ZP

Note 3) ZP3-(015/02/035)U ZP3-Y(015/02/035)U;(J/K)3-@ ZP3-Y(015/02/035)U;(J/K)6-@ ZP3B-Y1(J/K)3-B3 ZP3B-Y1(J/K)6-B3 ZP3-Y(10/13/16)UM;(J/K)3-@ ZP3-Y(10/13/16)B;(J/K)3-@ ZP3-Y(10/13/16)UM;(J/K)6-@ ZP3-Y(10/13/16)B;(J/K)6-@ ZP3-Y(10/13/16)UM;(J/K)10-@ ZP3-Y(10/13/16)B;(J/K)10-@ ZP3-Y(10/13/16)UM;(JB/K)15-@ ZP3-Y(10/13/16)B;(JB/K)15-@ ZP3-Y(10/13/16)UM;(JB/K)20-@ ZP3-Y(10/13/16)B;(JB/K)20-@

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

CG5-S

(mm) Connection threads Connection threads Universal type Universal type ASD230FG-M5-04 ASD230FG-M5-06 ASD330FG-01-06S ASD430FG-02-06S ASD530FG-02-06S -03-06S ASD330FG-01-08S ASD430FG-02-08S ASD530FG-02-08S -03-08S ASD430FG-02-10S ASD530FG-02-10S -03-10S ASD630FG-04-10S ASD530FG-02-12S -03-12S ASD630FG-04-12S M5 x 0.8 R 1/4 M5 x 0.8 JIS symbol 10 R 3/8 R 1/8 R 1/2 6 R 1/4 R 1/4 12 R 3/8 R

CQS

Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l M3 x 25l x 30l M5 x 25l x 30l M5 x 30l x 35l CQSB12-5S -10S CQSB16-5S -10S CQSB20-5S -10S CQSB25-5S -10S Example) Bolt M3 x 25l 4 pcs. 6.5 Single acting, Spring return Single acting, Spring extend 6.5 Mounting bolt 6.5 Mounting bolt 8.5 Single Acting, Spring Extend Model C D 25 30 25 30 25 30 30 35 Mounting bolt M3 x 25l x 30l

CQS

Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125S 10S CQSB165S 10S CQSB205S 10S CQSB25-5S 10S 6.5 6.5 6.5 8.5 Single acting/Spring extend Mounting bolt M3 X 25l X 30l M3 X 25l X 30l M5 X 25l X 30l M5 X 30l X 35l Model C D 25 30 25 30 25 30 30 35 CQSB125T 10T CQSB165T 10T CQSB205T 10T CQSB255T 10T 6.5 6.5 6.5 8.5 Note) The

5-Port Solenoid Valve

SY Type 10/Side Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System 2 (128 Points) p. 97 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX500 Gateway Decentralized System (64 Points) p. 103 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX250 p. 125 SS5Y-10S SY Type 10/Side Ported Plug-in Connector Connecting Base: EX260 p.

■How to Order ASP-X369 Series ASP330F－01－06S－X369 Applicable tubing O.D. Body size Metric size Inch size Port size φ6 3 φ1/4” 06 07 1/8 standard Symbol Cylinder side φ8 4 φ5/16” 08 09 1/4 standard 01 R1/8 φ3/8” φ10 5

Cylinder side Metric size Inch size Model Pilot port Port size 6 8 10 12 1/4 5/16 3/8 1/2 ASP330F R1/8 M5X0.8 ASP430F R1/4 Rc1/8 ASP530F R3/8 ASP630F R1/2 Rc1/4 ASP330F NPT1/8 10-32UNF ASP430F NPT1/4 NPT1/8 ASP530F NPT3/8 ASP630F NPT1/2 NPT1/4 Port size Body size 02. Rc1/4 2571 Body O.D.;52 03 Rc3/8 1239 Body O.D.:84 04. Rc1/2 1719.

Free Mount Cylinder Series CU

Series CU comparison Allowable kinetic energy (J) CUJ Noise reduction of more than 11 dB is possible (compared to Series CU20 with rubber bumper). : with air cushion : with rubber bumper 3 CU Interchangeable mounting Mounting dimensions (J, K, R, and E) are the same as the rubber bumper type Series CU.

Cylinder

s st 10s' j 15 st" 20',' 1 3051 ~' 5~" 10.1[ 15 " 2ost L30s, R , 6 35.5 40.5 45.5 50.5 148.5 53.5 58.5 63.5 ' I52.5 57.5 162.5 67.5 7 10 40.5 45.5 50.5 55.5 65.5 1 54 59 '1 64 69 I 79 160.5 65.5.1 10.5 75.5 165.5 8 . 1 15 42 47 52 57 67 !

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

-03-10S 18.5 23.1 22 101 34.4 55.9 12 ASD530FG-03-12S 20.9 21 177 32.6 64.3 10 ASD630FG-04-10S 18.5 64.8 57.3 56.7 49.2 28.6 26.5 25.9 24 R 1/2 49.6 42.1 18.6 22 179 34.4 66.1 12 ASD630FG-04-12S 20.9 Note 1) Reference dimensions Note 2) Reference dimensions of M5 x 0.8, R threads after installation. 705 ASD-FG Series Dimensions: Inch Size Applicable tubing O.D. d ASD230FG ASD330FG/430FG ASD530FG

LEC-OM07605CN

0.01 0.02 0.02 1 [J] 5.6 22 64 [J] 56 220 640 (5) [] 2.5 1.2 0.9 (3) [] 20 1 [J] 5.6 22 64 145V TND20V-680KB (135[V]) (78) 370V TND10V-221KB (360[V]) 1.

Ejector Valve Unit Series ZYY/ZYX 1

Ejector valve ZYY35LZ-10S-E15C Double solenoid (24 VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24 VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6 : With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Example) ZYY-J3U ZYY35LZ-10S1-E15C ZYY35LZ-10S 2 SET 1 SET 1 SET U side Stations3 2 1 D side 13-8-6 7 Ejector

Refrigerated Thermo-chiller

Specific heat C: 0.96 x 103 J/(kgK) (at 20C) Refer to page 79 for the typical physical property values by circulating fluid.

MHZ2/MHZJ2

Flat Finger Type [3] 4-MM thread depth L Attachment mounting thread K J A A D G B D B K J F C S W O Unit: mm Weight g F G Open Closed 2 2.5 3 4 J K MM L B C D Model A W 5.4 7.4 4.45 5.8 7.45 8.9 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 5 6 8 10 55 115 235 420 5.2 8.3 10.5 13.1 10.9 14.1 17.9 21.8 2.45 3.05 3.95 4.9 6 8 10 12 5 8 10 12 +2.2 0 2H9 2.5H9 3H9 4H9 1.4 1.4 1.6 2 0 -0.2 0 -0.2 0 -

Ejector Valve Unit, Series ZYY/ZYX

For ejector valves only (without solenoid valves) Ejector valve ZYY35LZ-10S-E15C Double solenoid (24VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Ejector mounting position U D U side D side U side Stations