LEC-OM02704CN

S S S () 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L O F F L S N S N 1 S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F O F F L L S N S N 2 S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N O F F L S N O F F L S N 3 S S S S S S S 0 r / m i n 0 r / m i n L S P L S P O N O N L S N O F F L S N O F F 6 39 6 6.4.4 (PC31PC34) PD20 PD20 0 1

HRX-OM-W038

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-W038 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly. Incorrect piping might cause leakage of supplied or drained leakage and wet surrounding area and facility.

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-12-03-12 ZH18DL-12-03-12 ZH20DS-12-04-16 ZH20DL-12-04-16 Rc 12 12 16 16 15.8 35.5 50 17 10 15.8 35.5 50 10 17.2 38.5 54.3 12 17.2 38.5 54.3 12 17 21.7 21.7 Screw-in connection S type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19

Fluoropolymer Piping Equipment

B C E E H L1 L1 L2 L2 M Min. port size LQ3E2A-S 1/4" 4 6 17 16 16 34.5 33.5 39.5 38.5 20 3.9 LQ3E3A-S 3/8" 5 9 22.5 19.5 21 47.5 44.5 49.5 46.5 25 6.3 LQ3E4A-S 1/2" 6 10 24.5 22.5 24 52.5 50.5 54.5 52.5 29 9.5 LQ3E5A-S 3/4" 7 14 26.5 24 32 64 61.5 66 63.5 37 15.8 LQ3E6A-S 1" 8 18 30 26 41 78 74 80 76 49 22 LQ3E7A-S 1 1/4" 9 22 35 35 50 92.5 92.5 97.5 97.5 64 28 M H Class 7 929 A LQ3 Series

HRX-OM-O021

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-11 Connection of RS-232C 3.3 Installation HRS Series 3-16 HRX-OM-O021 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

LVQ

Metric sizes Inch sizes Body Class Type LQ-GP J PAX 3 03 03 10 10 10 12 12 12 19 19 19 25 25 1/8" 03 03 03 03 3/16" 05 05 1/4" 07 07 07 3/8" 11 11 1/2" 13 13 3/4" 19 19 1" 25 4 04 04 04 04 6 06 06 06 8 08 Insert pin holder assembly (with the parts case) Type Insert pin/ Holder type 1 2 1 2 3 4 5 6 J PB Insert pin material (J/K type only) Nil N Metric sizes Inch sizes Nil S Resin

JIS Standard Hydraulic Cylinder

+ Stroke H + Stroke H B F F LW LW NA NA 2 x Rc P CHN GA GA J R J CHM MM MM CHS D E D E CH2 CH2 LH LT Width across flats G CHA Width across flats G 4 x CD C K MA MA Y Y X X K M Related Products LX Z + Stroke SS + Stroke A SS A BB ZZ + 2 strokes D(mm) Bore size (mm) Stroke range (mm) C B BB LX R LW GA LT LH F J Y X SS Z S P M NA CD 32 25 to 800 109 58 38 14 21 11 35 14 37 104 88 M10 x 1.25

Air Cylinder

Air cushion: 50 to 1000 mm/s Cushion Rubber bumper, Air cushion Male thread 0.27 J 0.4 J 0.65 J 1.2 J Rubber bumper Female thread 0.11 J 0.18 J 0.29 J 0.52 J Allowable kinetic energy Symbol Male thread 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) Rubber bumper Female thread 0.11 J 0.18 J 0.29 J 0.52 J Standard Strokes Bore size (mm)

HRX-OM-X027

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-X027 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

2/3 Port Valve for Various

Table(2) Rated Voltage-Electrical Entry-Electrical Option PAX Table(1) Connection Size and Applicable Model Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) Class B Class H G C D, T G, C T PB S L, Z S L, Z S Note ) Connection Applicable model VXP2130-02 VXP2130-03,VXP2140-03 VXP2130-04,VXP2140-04 VXP2150-06

Modular Type Filter Regulator Series AW

Note 2) Bowl assembly for AWM30 and AWM40 comes with a bowl guard (steel band material). 69 Mist Separator Regulator AWM20/30/40 Dimensions H M AWM20 D T J N U Panel fitting dimension Bracket (option) S Y W IN OUT Z C Q P V Plate thickness AWM20: Max. 3.5 IN OUT K B Pressure gauge (option) OUT Pressure gauge port size Square embedded type pressure gauge (option) Port size O S Drain E Min

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B

HRX-OM-W058

Configuration 1 master : 1 thermo-chiller 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C HRS-R Series 3.3 Installation 3-19 HRX-OM-W058 Chapter 3 Transport and Setting Up 3.4 Piping Connect piping firmly.

5 Port Solenoid Valve

(The specification is the same as that for the option -D.) 1 set of DIN rail mounting bracket is included for 1 manifold (2 or 3 DIN rail mounting brackets (S, T kit)). Symbol Specifications S(EX260/600/ 500), F , P , J, L, M kit Nil S T S(EX250) kit T kit DIN rail mounting bracket When ordering this option incorporated with a manifold, suffix D to the end of the manifold part number.

Industrial Filters

Applicable model 84 84 03 FGD-CV002-04 06 03 FGD-CV003-04 06 03 FGD-CV004-04 06 03 FGD-CV001-04 06 32 32 FGDT/F FGDT/F FGDC/E FGDC/E Note 1) Same as standard product except for cover assembly Note 2) 03, 04, and 06 indicate the relevant port sizes (Rc3/8, 1/2, 3/4).

Table of Contents

Rush speed into cushion is as follows: M + m 2 = 1.4a Ek = 2 Ek: Kinetic energy (J) M: Weight for the driven object (kg) m: Weight for movable part of cylinder (kg) : Maximum speed (m/s) a: Average speed (m/s) = 1.4 x 300 = 420 mm/s. Note) Set a so that rush speed into cushion should not exceed 0.75 m/s.

Series VQ Base Mounted Metal Seal/Rubber Seal

S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) F 25P U S P 26P U S F 15P U S A S U S P 16P U S B P 20P U S C P A 10P Model T1 T2 (1) (1) (1) Max. number 16 14 16 16 14 8 8 16 16 Note 1) Due to the limitation of internal wiring.

AC Servo Motor Driver (Network card type ）

Prepare a network card (LEC-S-N). Network Network card EtherCAT LEC-S-NE EtherNet/IP LEC-S-N9 PROFINET LEC-S-NP 1 2 1.

NCQ8

100 (1") 3.37 5.22 9.32 15.8 22.7 30.3 125 (1 1/4") 4.43 6.00 12.9 21.1 24.3 32.0 150 (1 1/2") 4.71 6.42 13.6 22.2 25.9 33.6 175 (1 3/4") 5.00 6.84 14.4 23.3 27.5 35.2 200 (2") 5.28 6.27 15.1 24.3 29.1 36.8 NCDQ8056-S NCDQ8075-S NCDQ8106-S NCDQ8150-S NCDQ8200-S NCDQ8250-S Product,s Weight (Single Acting, Spring Return, With Auto Switch, Super Compact) (OZ) 012 (1/8") 025 (1/4") 2.14 3.37

LEC-OM07605CN

S AC S SSCNET S 0.15m L 0.3m K 0.5m J 1m 1 3m 3 LE-CSNS LECSS S LE-CSNS 3M 10126-3000PE()/10320-52F0-008(shellkit) AWG2430 d) LEC-MR-RB-032 30W 032 100W 12 MR-RB 1 10 1. e)(MR Configurator2) LEC-MRC2 E SW1DNC-MRC2-J C USB LECSS2-TLEC-MR-SETUP221 f) USB (3) LEC-MR-J3USB SET -MR-J3USBCBL3M G) LEC-MR-BAT6V1SET MR-BAT6V1SET h) STO (3m) LEC-MR-D05UDL3M MR-D05UDL3M 1 11 1. i) I/O LEC-CSNS1