Basic type / Direct mount type Series CY3B/CY3R

20 20.5 22 29 33 33 CC 32 38 I 28 34 40 50 58 72 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 J 4.5 4.5 6 6 8 8 10 12 12 E 4 1.5 2 2 2 2 3 8 8 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111 124 150 176 188 V T C 8 14 14 26 32 32 41 F 8 9 10 13 13 16 16 2 2 L 35 38 57 66 70 80 92 110 122 MM NA 10 14 17 24 30 36 46 55 69 A 4 4 4 8 8 8 10 Model CY3B6 CY3B10

Air Cylinder

7/16 1 3/8-24 1/2 1 1/2 1.57 3/4-16 4.7 1 1/2 5 53/64 1/2-13 3.32 Double Detachable Rear Clevis Mounting Type NC A1D (MP2 Mounting Style) P + Stroke Y LR 2-EE (NPTF) D Across Flats CW CW C CD AA KK EA MM B CB DD G J WF LF + Stroke F L R XD + Stroke M E A ZD + Stroke (in) DD EA Y G J C CB CD CW L KK ZD B D LR R E WF A P M F AA Bore (in) XD MM EE LF 1/4-28 0.3 1.71 1.26 1.1 3/4 3/8 1/2 1/2

Air Cylinder

0.035 J 0.090 J Air cushion Allowable kinetic energy (Effective cushion length) 0.07 J (9.4 mm) 0.18 J (9.4 mm) Stroke length tolerance +1.0 0 Made to Order: Individual Specifications (For details, refer to pages 150 and 151.)

Electric Slide Tables

0.3 6 510.3 220 to 250 65 Table operating range Note 1) [1] 1 Stroke end [Origin] Note 3) K 8 Origin Note 2) [Stroke end] 13 N (M) Stroke 16.5 (2.3) 5 J 4H9 ( ) depth 4 +0.030 0 +0.030 0 4H9 ( ) depth 4 40 (25) F (G 1) x F 18 With lock Connector Servo motor Step motor 20 24 340 to 380 Motor cable 20 24 65 Lock cable 20 20 15 15 Lock cable (3.5) Motor cable (2 x 5) [mm] C F G J K M D N Model

SMC

63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 139 MXS Air slide table 1322Dimensions: MXS12 1322Basic style 2-M4 x 0.7 thread depth 5 Operating

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

39 48 58 45 52 88 88 I 12 12 12 12 20 15 18 23 J 40 40 50 60 68 105 145 165 K 28 38 48 58 68 93 118 143 KA 91 123 166 191 NA 4 4 4 4 8 8 8 8 M 78 78 88 98 114 146 189 214 Z 77 77 87 97 113 145 188 213 ZZ 109 109 119 129 145 177 220 245 13-/22-MXQ16L10 13-/22-MXQ16L20 13-/22-MXQ16L30 13-/22-MXQ16L40 13-/22-MXQ16L50 13-/22-MXQ16L75 13-/22-MXQ16L-100 13-/22-MXQ16L-125 Note) Note) Note) Refer

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

MY1

absorber stroke) T S F FC FB For MY1M50, 63 SMC EY EC FH W 58 58 70 88 104 128 152 TT 5.4 (max. 11) 5 (max. 11) 5 (max. 16.5) 8 (max. 20) 9 (max. 25) 13 (max. 33) 13 (max. 38) T 6 6 7 12 12 15 15 S 40.8 40.8 46.7 67.3 67.3 73.2 73.2 h 3.6 3.6 3.5 4.5 4.5 5.5 5.5 FW 66 80 91 FH 13 16 17.5 FC 14 14 13 17 17 26 31 FB 54 67 78 F 4 4 6 6 6 6 6 EY 39.5 45.5 53.5 67 83 106 129 EC 5.8

MXS

MXU With end lock(16) MXS16-llR With buffer(16) MXS16-llF 2-M6 X 1 thread 10 deep MXS Operating port 2-M5 X 0.8 J 13 MXQ 12 18 48 MXF MXW 20 41 3 MXP 30 0.5 37.5 * Dimensions not indicated are the same as the basic sytle.

Air Slide Table Series MXS

energy Ea (J).

MY1

85 121 13 M6 x 1 45 30.5 MY1H40 63 Rc 1/4 61.5 75 P indicates cylinder supply ports.

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA 82.5 132.5 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 13-/22-MXS8L-10 13-/22-MXS8L-20 13-/22-MXS8L-30 13-/22-MXS8L-40 13-/22-MXS8L-50 13-/22-MXS8L-75 785 MXS 1322Air Slide Table Dimensions: MXS12 1322Basic 2 x M4 x 0.7 thread

Vacuum Pad

J Dimensions: Pad Unit ZP2-B10J ZP2-06J ZP2-09J Adapter Mounting Dimensions Lock ring 13 7 7 If an adapter will be made by the customer, design the adapter with the dimensions shown below.

Vacuum Pad

J Dimensions: Pad Unit ZP2-B10J ZP2-06J ZP2-09J Adapter Mounting Dimensions Lock ring 13 7 7 If an adapter will be made by the customer, design the adapter with the dimensions shown below.

Vacuum Pad

J Dimensions: Pad Unit ZP2-B10J ZP2-06J ZP2-09J Adapter Mounting Dimensions Lock ring 13 7 7 If an adapter will be made by the customer, design the adapter with the dimensions shown below.

Vacuum Pad

J Dimensions: Pad Unit ZP2-B10J ZP2-06J ZP2-09J Adapter Mounting Dimensions Lock ring 13 7 7 If an adapter will be made by the customer, design the adapter with the dimensions shown below.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

K K K J K, T K K XA51 K K J J J K K J J J K K K J J J J XA52 MSZ XA53 J J J J J J J XA55 CRQ2X MSQX J XA57 J Reversed shaft, Change of double shaft length A combination of up to two XAs are available.

1

3 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less H: M6 or more, X: 22.5 mm or less H: M6 or less 16 16 J :4 mm or more, I: 6 mm or less J: 4 mm or more, I: 6 mm or less XA2 XA17 H: M8 or more, X: 26.5 mm or less H: M8 or less 20 20 J: 5 mm or more, I :11 mm or less J: 5 mm or more, I: 11 mm or less H : M10 or more, X: 33 mm or less H: M10 or less 25 25 J: 6 mm or more, I: 13

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

Rotary Actuator

Applicable shaft types: J, X, Z d1 = d1 = d1 = d1 = Y = C2 J axis X axis K axis T axis D2 = C2 = C L2 = [mm] [mm] [mm] Size Y L2max D2 30 3 to 25 Y-2 5 to 7.9 50 1 to 36 Y 5 to 14.9 63 1 to 41 Y 5 to 16.9 80 1 to 50 Y 8 to 19.9 100 1 to 60 Y 8 to 24.9 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 Size d1 30 2.5 50 4 to 7.5 63 4 to 8 80 6.8 to 11 100 6.8 to 13 218