SV

Specified layout (Up to 8 solenoids possible.) 18 08 20 08 18 stations 8 stations 20 stations 8 stations PG: Flat ribbon cable 20 pins PG: Flat ribbon cable 20 pins 02 02 2 stations 2 stations (1) (1) Double wiring specifications Double wiring specifications 09 02 09 02 9 stations 9 stations 2 stations 2 stations (2) (2) Specified layout (Up to 18 solenoids possible.)

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Dual Speed Controller with One-touch Fitting Series ASD

1/4 28.2 46.5 ASD430FG-02-08S 15.2 11 34.4 29.4 18.5 19.7 10 31 49.3 ASD430FG-02-10S 18.5 21 6 25.2 48.3 ASD530FG-02-06S 12.8 17 20.3 28.2 8 51.3 ASD530FG-02-08S 15.2 18.5 23 19.8 46.9 41.9 48.8 43.8 19 R 1/4 15.4 42.8 37.8 32.6 10 54.1 ASD530FG-02-10S 18.5 21 23.1 34.4 12 55.9 ASD530FG-02-12S 20.9 22 25.2 48.3 6 17 ASD530FG-03-06S 12.8 20.3 28.2 51.3 8 18.5 ASD530FG-03-08S 15.2 23 19.8

VQ4000

03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 02 03 VVQ4000-R-1(Plug-in type) 163 (Plug-in

Smooth Cylinder/Low Speed Cylinder

B J Type A mounting bracket Type B mounting bracket 32, 40 YU-03 YA-03 YB-03 CY 50, 63 YU-05 YA-05 YB-05 Material: Stainless steel CX CX 80 YU-08 YA-08 YB-08 (mm) 100 YU-10 YA-10 YB-10 Bore size (mm) B D E J M O Part no.

ZP

Weight (g) Pad form Flat/Flat with ribs Female thread Female thread Female thread One-touch fitting One-touch fitting One-touch fitting Barb fitting Barb fitting Barb fitting Deep Bellows Stroke (mm) Vacuum entry port Model NU NU NU B5 B01 04 06 08 B5 B01 04 06 08 B3 B5 B01 04 06 08 B3 ZPT2004 3507 4010 ZPT thin section series 10 to 16 02 to 08 6 22 24 26 27 22 22 24 26 27 22 10 to 16 10

0.4

Unit Series SQ1000 [Option] How to Order Manifold SS5Q SB 3 1 08 D CE compliant Manifold series Nil Q CE compliant 1 SQ1000 SI unit output polarity 1(P), 3(R) port size Nil N Positive common Negative common 1(P), 3(R) port, One-touch fittings for 8 Nil 1(P), 3(R) port, One-touch fittings for 5/16" 00T Valve stations Symbol 1 station Note Stations Option 01 Nil 02 to 16 (1) None DIN rail

Hydraulic

-32 BAF-04 BAF-05 BAF-06 BAF-08 BAF-10 BGS1-032 BH2-040 BH2-050 BA-06 BH2-080 BH2-100 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 BD1-04M BD1-05M BD1-06M BD1-08M BD1-10M BDS-04M BDS-05M BDS-06M BDS-08M BDS-10M BD1-04M BD1-05M BD1-06M BH1-080 BH1-100 40 25 to 800 1800 (1401 or more with tie-rod reinforcing ring) Note 1) 50

Vacuum System Peripherals:

(mm ) 0 2 4 M V VX311 -01 1.5 ZCU 0.29 0 2 4 M V VX312 -01 2.2 1 8 0.60 AMJ 0 2 4 M V VX313 -01 3 0.82 Misc. 0 2 4 M V VX311 -02 1.5 0.29 0 2 4 M V VX312 -02 0.60 M V VX3224 -02 2.2 0.64 M V VX3324 -02 0 2 4 M V 0.82 VX313 -02 1 4 Series VX31 Series VX32 Series VX33 M V 3 VX3234 -02 1.1 M V VX3334 -02 M V 4 VX3244 -02 1.6 M V VX3344 -02 M V VX3224 -03 2.2 0.64 M V VX3324 -03 M V VX3234 -03

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 12.7 12.3 7 25.1 28.8 30.1 9.6 33.8 M5 x 0.8 8 13.5

Series AS-FM/AS-M/ASD-FM

Max. 3.2 4 6 3.2 4 6 8 4 6 8 10 22.1 22.1 22.9 27.5 27.5 27.5 32.4 34.4 34.4 36.4 43.2 8.4 9.3 11.6 9.3 9.3 11.6 15.2 10.4 12.8 15.2 18.5 17.3 17.3 18.1 20.4 20.4 20.4 25.3 25.2 25.2 27.2 33.9 AS121FM-M5-23 AS121FM-M5-04 AS121FM-M5-06 AS221FM-01-23 AS221FM-01-04 AS221FM-01-06 AS221FM-01-08 AS221FM-02-04 AS221FM-02-06 AS221FM-02-08 AS221FM-02-10 12.7 12.3 7 25 25.8 22.2 9.6 28.6 M5 x 0.8 8

Speed Controller for Low Speed Operation with One-touch Fitting Elbow Type/Universal Type (Resin Body) AS-FM Series

AS131FM-M5-23 AS131FM-M5-04 AS131FM-M5-06 AS231FM-01-23 AS231FM-01-04 AS231FM-01-06 AS231FM-01-08 AS231FM-02-04 AS231FM-02-06 AS231FM-02-08 AS231FM-02-10 3.2 19.8 8.4 17.5 28.7 12.7 M5 x 0.8 8 8 4 20.3 33.8 28.8 30.1 25.1 9.3 9.6 9.3 10.8 6 21.4 20.6 31.8 13.5 11.6 3.2 24.4 8.4 17 17.5 30.9 12.7 9.3 13.1 4 24.9 9.3 35.2 30.2 32.1 27.1 12 R 1/8 14.2 18 22.9 36.3 13.5 10.9 6 14 26.9 11.6 21

Compact and Lightweight

One-touch One-touch One-touch 06 01 08 One-touch Screw-in One-touch 01 01 01 Screw-in Screw-in Screw-in ZH10DA07 07 09 One-touch One-touch One-touch 07 N01 09 One-touch Screw-in One-touch N01 N01 N01 Screw-in Screw-in Screw-in ZH13DA08 10 10 One-touch One-touch One-touch 08 02 10 One-touch Screw-in One-touch 01 02 02 Screw-in Screw-in Screw-in ZH13DA09 11 11 One-touch One-touch

VQZ1000/2000/3000

-X19 KQP-10-X19 L A Dimensions Applicable fittings size d Model A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 3.2 31.5 16 Color: White 6 32 16 8 35 18 10 39 20.5 12 43 22 Silencer (For EXH port) Silencer is installed in the EXH port. 63 38 22 Dimensions 13 Silencer P/N Model VQZ1000 VQZ2000 VQZ3000 AN110-01 AN110-01 AN200-02 AN200-02 AN110-01 For a silencer to

Vacuum Pad

Adapter model Applicable pad model Series ZP2 Series ZP Page ZP2-03U ZP2-B04U ZP2-B06C ZP2-07C ZP2-B08C ZP2-B06B ZP2-B08B ZP2-05UT ZP2-06UT ZP2-11UT ZP2-14UT ZP2-18UT ZP2-20UT ZP2-06J ZP2-B10J ZP2-B15J ZP2-04UCL ZP2-06UCL ZP2-08UCL ZP (02, 04, 06, 08) U ZP (06, 08) B ZP (10, 13, 16) UT ZP (10, 13, 16) CT ZP2004U ZP3507U ZP4010U ZPT1-A5, A6 ZPT1-B4, B5 P. 72 ZP2-09J ZP2-14J ZP2-16J ZP2-10UCL

Vacuum Pad

Adapter model Applicable pad model Series ZP2 Series ZP Page ZP2-03U ZP2-B04U ZP2-B06C ZP2-07C ZP2-B08C ZP2-B06B ZP2-B08B ZP2-05UT ZP2-06UT ZP2-11UT ZP2-14UT ZP2-18UT ZP2-20UT ZP2-06J ZP2-B10J ZP2-B15J ZP2-04UCL ZP2-06UCL ZP2-08UCL ZP (02, 04, 06, 08) U ZP (06, 08) B ZP (10, 13, 16) UT ZP (10, 13, 16) CT ZP2004U ZP3507U ZP4010U ZPT1-A5, A6 ZPT1-B4, B5 P. 72 ZP2-09J ZP2-14J ZP2-16J ZP2-10UCL

Vacuum Pad

Adapter model Applicable pad model Series ZP2 Series ZP Page ZP2-03U ZP2-B04U ZP2-B06C ZP2-07C ZP2-B08C ZP2-B06B ZP2-B08B ZP2-05UT ZP2-06UT ZP2-11UT ZP2-14UT ZP2-18UT ZP2-20UT ZP2-06J ZP2-B10J ZP2-B15J ZP2-04UCL ZP2-06UCL ZP2-08UCL ZP (02, 04, 06, 08) U ZP (06, 08) B ZP (10, 13, 16) UT ZP (10, 13, 16) CT ZP2004U ZP3507U ZP4010U ZPT1-A5, A6 ZPT1-B4, B5 P. 72 ZP2-09J ZP2-14J ZP2-16J ZP2-10UCL

Vacuum Pad

Adapter model Applicable pad model Series ZP2 Series ZP Page ZP2-03U ZP2-B04U ZP2-B06C ZP2-07C ZP2-B08C ZP2-B06B ZP2-B08B ZP2-05UT ZP2-06UT ZP2-11UT ZP2-14UT ZP2-18UT ZP2-20UT ZP2-06J ZP2-B10J ZP2-B15J ZP2-04UCL ZP2-06UCL ZP2-08UCL ZP (02, 04, 06, 08) U ZP (06, 08) B ZP (10, 13, 16) UT ZP (10, 13, 16) CT ZP2004U ZP3507U ZP4010U ZPT1-A5, A6 ZPT1-B4, B5 P. 72 ZP2-09J ZP2-14J ZP2-16J ZP2-10UCL

H/DL/L/LL

Norte Parque Industrial Valle Grande, Lampa Santiago, Chile TEL: 02-270-8600 FAX: 02-270-8601 SWEDEN SMC Pneumatics Sweden AB Ekhagsvgen 29-31, S-141 05 Huddinge, Sweden TEL: 08-603-07-00 FAX: 08-603-07-10 ARGENTINA SMC Argentina S.A.

Series VQ Base Mounted Metal Seal/Rubber Seal

How to Order Manifold VV5Q 1 08 C6 1 N G Option Symbol Option Remains VQ1000 VQ2000 None Check valve for prevention of back press.