1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

F

35.3 13.2 27.8 17 1/4 19.4 39.3 NAS321F-U03-07 53.9 37.6 32.6 45 40 15.2 29.5 18.5 5/16 41 NAS321F-U03-09 54.9 21 17.9 31.8 3/8 43.3 NAS321F-U03-11 56.6 24 17.9 33.6 21 1/2 3/8 28.6 22.4 47.9 NAS421F-U04-11 93.6 44.5 37 54.6 47.1 21.7 35.2 22 1/2 49.5 NAS421F-U04-13 95.4 Courtesy of Steven Engineering, Inc. !

ITV

(For details, refer to page 14-8-11 in Specific Product Precautions.)

S Couplers

/O.D. mm Symbol Symbol Symbol 01 02 03 04 N01 N02 N03 N04 07 09 11 13 06 08 10 12 07 09 11 13 6 8 10 12 1/4" 5/16" 3/8" 1/2" R, Rc1/8 R, Rc1/4 R, Rc3/8 R, Rc1/2 NPT1/8 NPT1/4 NPT3/8 NPT1/2 50 60 65 80 85 110 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Metric size The figures in ( ) indicate the internal diameter of the applicable hose.

Secondary Batteries

02 11 stations 2 stations (2) Specified layout (Up to 23 solenoids possible.) 20 20 stations Note 1) Double wiring specifications: Single, double, 3 position and 4 position solenoid valves can be used at all of the manifold stations.

Digital Pressure Switch ( compatible)

No.PS-OMX0002-A PRODUCT NAME Digital Pressure Switch ( compatible) MODEL / Series / Product Number ZSE20C(F)-L ISE20C(H)-L Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 13 Mounting and Installation 17 Installation 17 Piping 20 Wiring 22 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step

V

ZFB300-10 10 (N)ZFB101-05 53 24 17.5 316" 48 26 22.5 12.5 15 50 15.5 14.4 12.8 8.5 (N)ZFB101-07 54 24.2 17.7 14" APPLICATION T O E J E C T O R S Y S T E M Inch size (N)ZFB201-07 52 28 65 24.5 13.5 27.2 19.7 16 61 17.5 16.6 15.2 14" 9.5 (N)ZFB301-11 57 30 70 27 14.5 30.2 21.7 17 65 21.5 8 18.5 38" 11 (N)ZFB401-13 64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E

20

Male thread nozzle 02 03 N02 N03 F02 F03 11 12 H06 H08 H10 H07 H09 H11 Rc1/4 Rc3/8 NPT1/4 NPT3/8 G1/4 G3/8 KK4P-02MS KK130P-02MS KQ2H06-02S KQ2H08-02S KQ2H10-02S KQ2H07-35S KQ2H09-35S KQ2H11-35S Threaded Thread size High efficiency nozzle Model no. of coupler used S coupler plug Low noise nozzle with male thread Metric size one-touch fitting Model no. of fitting used Extension nozzle Inch

Pneumatic Purification

Available N02 (1/4 NPT), N03 (3/8 NPT) and N04 (1/2 NPT) Metal bowl available as option (-2) Series SL Slimline Auto Drain and Filterstop SPECIFICATIONS Timer Solid-state construction Status Indication Power ON / Valve OPEN Interval Time 0.5 to 45 minutes (as required) Discharge Time 0.5 to 10 seconds (as required) Electrical Connection DIN 46242 LED indicators show operational status

Regulator for 2 MPa ARX 20

Dimensions Dimensions 4-R2.5 12 25 41.5 17 34 24 R16.5 Panel nut Gasket 26 11 1.5 24 44 Max. panel thickness 4.5mm 5.4 1.6 54 Install the gasket underneath the panel and bracket (bonnet side).

Auto Feed Lube, Auto Feed Tank ALF400 to 900, ALT-5/-9

12316 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 ALF-3 ALF-3-X208 12316 1 Auto feed 3 Sight dome 4 Polycarbonate 1 123122-3A (04) 123122-2A (03) 123122-1A (02) 123417A (12) 123416A (14) Bumper assembly 5 123122-3A 123210A 123310A 12356A 1 Needle stud assembly Retainer assembly Siphon tube assembly Sight dome seal Siphon nut seal Bumper retainer seal Bowl O-ring Housing O-ring 6 7 8 9 10 11

70pvpump

Circuit example/Built-in solenoid valve Ball valve Regulator FLUID OUT AIR EXH Filter AIR SUP FLUID IN Air supply Process pump PB1011 Transfer fluid 17-5-166 27 Series PB Process Pump: Built-in Solenoid Valve Type/ Air Operated Type (External Switching Type) Dimensions PB1000 FLUID OUT Rc 1/8 VC 11 OUT VDW 11 VQ 84 72 VX2 Mount with this surface (out port side) on top 7.5 41 60 45 VX Courtesy

VFM300

VH Roller plunge VFM250-02-06 VFM250-02-06S Panel mounting hole VHS 15 polyacetal or head steel roller Hexagon nut thick 11, across flats 27 (Pilot exhaust port) JIS symbol 0.5 MPa supply 1.5 mm P.T. 20 N F.O.F. 2.0 mm O.T. 3-4.5 mounting hole 3.5 mm T.T. Toggle lever VFM250-02-08 Panel mounting hole T.T.

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Note 11) Refer to Straight Piping Length and Accuracy on page 4 for details.

Digital Pressure Switch

No.PS-OMU0009-D PRODUCT NAME Digital Pressure Switch MODEL / Series / Product Number ZSE20C(F) ISE20C(H) Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 11 Definition and terminology 12 Mounting and Installation 16 Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 24 Pressure Setting 25 3 Step Setting Mode 26 Simple

ITV

REGULATOR Specifications tSpacer ITV20mm ITV30mm ITV2000 Approx. 189 Set pressure max. 0.1MPa 1 P P Standard specifications Optional specifications Set pressure max. 0.5MPa 3 P P Approx. 133 Set pressure max. 0.9MPa 5 P P Connection Rc(PT) 1/4 02 P P eL-bracket rT-bracket Connection Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02

VM

Mechanical Valves Series VM Model VM1000 VM100 VM200 Dimensions (mm) Side ported 11 x 36 x 16 Bottom ported 11 x 28 x 25 Side ported 17 x 44 x 25 Bottom ported 17 x 44 x 30 25 x 40 x 52 Basic Roller lever One way roller lever Straight plunger Roller plunger Cross roller plunger Toggle lever Push button (Mushroom) Push button (Extended) Push button (Flush) Twist selector (2 position) Key selector

IR1000/2000/3000

When mounting is performed, make connections while confirming port indications. 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SWEDEN SMC Pneumatics Sweden AB SWITZERLAND SMC Pneumatik AG. UK SMC Pneumatics (U.K.) Ltd. EUROPE AUSTRIA SMC Pneumatik GmbH. CZECH SMC Czech s.r.o.

pa

Rc 1/8 7 to 9 Rc 1/4 12 to 14 Rc 3/8 22 to 24 Rc 1/2 28 to 30 Rc 3/4 28 to 30 Rc 1 36 to 38 Rc 11/4 40 to 42 Rc 11/2 48 to 50 Rc 2 48 to 50 Reference How to tighten M5 threads on the fittings After tightening by hand, use a tightening tool to add about 1/6 turn more. But when using miniature fittings, after tightening by hand, use a tightening tool to add 1/4 turn more.