LVQ

N.C. valve Q E (P) R Sensor (breathing) port Rc 1/8 (NPT 1/8) LQ3 integral fitting 1/8 ( 3, 4) Pilot port Rc 1/8 (NPT 1/8) Pilot port F K A B A B J G L (H) Threaded type Pilot port Rc 1/8 (NPT 1/8) N M C A B D (mm) LVQm0-Zmm Dimensions (N.C. valve) A B C D E F G H J K L M N P Q R Model LVQ20-Zmm LVQ30-Zmm LVQ40-Zmm LVQ50-Zmm LVQ60-Zmm 25.5 46 31.5 58 33.6 56.5 12 75 21.8 37 5 7 15 53.5 21

HRX-OM-W038

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

5 Port Solenoid Valve

kit J kit Page 26 Manifold Optional Parts Page 28 Construction Page 29 Manifold Exploded View S kit Page 32 Plug-in Manifold Stacking Base EX260 Page 32 Serial Transmission S kit EX250 Page 44 D-sub Connector F kit EX600 Page 48 Flat Ribbon Cable P kit F kit EX500 Page 52 PC Wiring System Compatible Flat Ribbon Cable J kit P kit Page 56 Terminal Block Box T kit J kit T kit Page 60 Lead Wire

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

Vacuum

(Check leakag) 100 lloninntal lype Uacuum tntny: Without BufleU Wilh Ban[eil ]itting Specif ications l',.1.t':.,.l,',,,l,. : : : t : . : : . : : . ,t I , i I .. .1. q2-6 8:t) 04 . 06 Nylon tube, 04 . 06 Urethane tube olQ-s16 04 . 06 Nylon tube, a4. 66 Urethane tube szj-sgz 04. oO Nylon tube, @4. oO Urethane tube s40-o5O o6 Nylon tube, oG Urethane tube Vacuum entry Connection o2-o I M 5 x

JIS Standard Hydraulic Cylinder

Auto switch model Cylinder model Bore size (mm) 80 63 50 40 32 100 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V Note 2) BA7-063 BA7-063 BA7-080 BS5-160 BS5-180 CH2E/H/F D-F5/J59 D-F5W/J59W D-F5BA/F59F/F5NT D-A5/A6/A59W BT-06 BT-06 BT-06 BT-08 BT-16 BT-18 The figure shows how auto switch models, D-M9(V), M9W(V), and M9A(V) are mounted.

HRX-OM-O021

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-R005

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

CA2

(Example) CDA2WL40-100 Nil J K Nil JJ KK Nil N Cylinder stroke (mm) For more information, please refer to the next page.

IIIIIII

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

Mechanical Valves Series NVM, NVFM, NVZNI

To reassemble, push button firmly into spring clip. 2 Series NVM MECHANICAL VALVES HOWTO ORDER DIMENSIONS NVM 100 HOW TO ORDER NVM 120 N01 065 -rr vatve series T = 2-way;2porls = 3-way;2ports 120 130 I lRoller Material (06 & 07 Only) | -: Nylon(Standard) I S : Steel I lActuator 00 = Valve Body Only 05 = Plunger 06 : Roller plunger Inline 07 = Roller Plunger, Set 90" 08 : Toggle 30 = Push

HRX-OM-M090

The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

HRX-OM-X027

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Sine Rodless Cylinder Series REA/REB

AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3201F-02-08-X214 AS3301F-02-08-X214 2. Speed adjustment is possible with meter-in/meter-out type speed controllers, but it may not be possible to obtain the cushion effect (smooth start-up, soft stop). 3.

HRX-OM-R026

HRSH Series 6.1Option M [DI water (Pure water) piping] 6-1 HRX-OM-R026 Chapter 6 Option 6.2 Option J [Automatic fluid filling] 6.2.1 Option J [Automatic fluid filling] This function is available for customers who selected automatic fluid filling. Refer 3.6 Option J Piping ofAutomatic fluid filling for the installation of the automatic fluid filling.

REA/REB

Bore size (mm) Model Elbow type Straight type In-line type 10 15 20 25 32 40 50 63 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS1201F-M5-04-X214 AS1301F-M5-04-X214 AS1001F-04-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 AS2201F-02-06-X214 AS2301F-02-06-X214

HRX-OM-W058

As the circulating fluid temperature is within the set range of "AS.06", "AS.06" alarm monitoring starts. Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts.

HRX-OM-R016

The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

Modular Type Lubricators Series AL

Note 3) Bowl assembly for the AL30 to AL60 models comes with a bowl guard (steel band material). 511 Series AL10 to AL60 Dimensions AL10 AL20 J M U T N S D Bracket (Option) A B C R B C Q IN OUT IN OUT OUT 2 x P (Port size) OUT 2 x P (Port size) Clearance for maintenance G Clearance for maintenance A G AL30, AL40 AL50, AL60 Bracket (Option) T N S T M U M U D J D J N S Bracket (Option) R B