CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

reduces flow setting time

ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

CG5-S

-04-12 AS1301FG-M5-23 AS2301FG-01-23 AS1301FG-M5-04 AS2301FG-01-04 -02-04 AS1301FG-M5-06 AS2301FG-01-06 -02-06 AS3301FG-02-06 -03-06 AS2301FG-01-08 -02-08 AS3301FG-02-08 -03-08 AS1211FG-M5-23 AS2211FG-01-23 AS1211FG-M5-04 AS2211FG-01-04 -02-04 AS1211FG-M5-06 AS2211FG-01-06 -02-06 AS3211FG-02-06 -03-06 AS2211FG-01-08 -02-08 AS3211FG-02-08 -03-08 AS2211FG-01-10 -02-10 AS3211FG-02-10 -03-10

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

)] Flow rate [L/min (ANR)] 06, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 200 400 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 100 200 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

Max.14 SV1 00-06 SV1 00-05 Individual SUP spacer 61 (N7:7) (C6:3.2) 10 B B B B (7.5) (DIN rail dimension) 109.5 111.4 118 102.9 11.8 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

B A A A B B B B A A A A SY 3 L1 L2 SV 2 11 11 71.5 (Pitch) P = 51 (Pitch) P = 51 71.5 6 [2] 1 SYJ 2n x 1/2, 3/4 (A, B port) Stations SZ 24 [23] 70 [71 .5] 58 28 105.5 176.5 209 9 9 20 2n x 1/2 VP4 D side Plug assembly: VVFS2000-30A(Option: Refer to page 1326.)

13

Vacuum pressure Suction flow rate 13-5-5 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS-

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

Metal Seal/Rubber Seal Series VQ Body Ported

A L D Model Applicable fittings size d KQ2P-23 KQ2P-04 KQ2P-06 3.2 4 6 31.5 32 35 5 6 8 16 16 18 When ordering assemblies incorporated with a manifold, add suffix -D to the manifold no. DIN rail mounting bracket VVQ1000-57A-3 It is used for mounting a manifold on a DIN rail. The DIN rail mounted bracket is fixed to the manifold end.

VM

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

Micro Mechanical Valve Series VM1000

1.5 R port (3 port only) Symbol 2 port (A) 2 12 10 1 (P) 44 25.4 17 (A) 2 3 port 2 x 4.6 mounting hole 2 x M5 x 0.8 depth 4 14 8.5 12 10 1 (P) 3 (R) Panel mounting hole * 0.5 MPa supply F .O.F .* 27 N T.T. 6.5 mm Max. 6 Push button (Extended) VM122-M5-32 (R, B, G, Y) A VM132-M5-32 (R, B, G, Y) A 23 38 T.T. 3 1.5 1.5 (75.6) (52.1) 23.5 22.1 30 10.5 R port (3 port only) Symbol 2 port (A) 2

0.4

P=11.5 1 2 3 4 5 6 7 8 n: Stations 40.5 Silencer cover Blanking plug (For One-touch fitting) L Dimensions 23 04 06 08 Applicable fittings size d 3.2 4 6 8 A A L D Model KQ2PKQ2P-23 KQ2P-04 KQ2P-06 KQ2P-08 16 16 18 20.5 31.5 32 35 39 3.2 6 8 10 It is inserted into an unused cylinder port and SUP/EXH ports.

VFR

1Bore size , VV5FR5-01FUStation 1Bore size Light/Surge voltage suppressor 235.5 204 (72) 60 11 4 60 U side Manual override (Non-locking) 6 [2] 21 R5.5 B B B B A A A A n B B B A A A B B B B A A A A 3 L1 L2 2 11 11 71.5 (Pitch) P = 51 Pitch P = 51 71.5 1 Stations 2n-Rc 1/2, 3/4 (A, B port) 20 24 [23] 105.5 176.5 209 Plug assembly: VVZS3000-21A(Option: Refer to page 3-5-8.) 2n-Rc 1/2 58 28 70

Table of Contents

To connect a drain discharge pipe, use a pipe with a minimum bore of 10, and a maximum length of 5 m. Avoid using a riser pipe.

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

23 16.2 AS331FG-02-12 AS331FG-N02-07 34.4 55.7 46.9 22 25.6 44.9 38.7 12 20.9 1/4" 13.2 69 60 17 20.6 12.9 NPT 1/4 AS331FG-03-06 AS331FG-N02-09 48.3 43.3 42.8 37.8 25.2 45 49.5 17 28.2 38.5 39.7 6 12.8 5/16" 15.2 56 63 18.5 23 19 20.6 12.9 AS331FG-03-08 AS331FG-N02-11 28.2 48 53.9 18.5 32.6 39.7 43.7 8 15.2 3/8" 17.9 23 59 69 21 16.2 23 40.4 45.4 19 R 3/8 40 35 AS331FG-03-10 AS331FG-N03-

KR

(mm) Effective area (mm2) Urethane Soft nylon L M1 Weight (g) D M2 Model a b Applicable thread Applicable thread a b KAH23-04 32.5 34.5 38.5 18.5 21 4 3.2 6 4 15.5 16 17 18.5 20.9 10.4 12.8 15.2 16 17 18.5 28.2 28.2 16.7 16.7 6 4 3 KAH04-06 KAH06-08 10.7 10.7 4.2 4.2 3.2 2.7 8 6 10 8 KAH08-10 42 44.5 21 22 11 14 KAH10-12 10 12 15-3-23 5 Series KA Union Elbow: KAL Effective area (mm2) Urethane

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

M1 ASR ASQ AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

AS-FG/ASD-FG

of 0.5MPa and a temperature of 20C. 7 Series AS-FG How to Order AS 200 1 F G 06 Body size Applicable tube outside diameter Metric size Inch size 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 01 03 05 07 09 11 13 3.2 4 6 8 10 12 23 04 06 08 10 12 With One-touch fitting Use a 1/8" tube.

Speed Controller with One-touch Fitting

Unlocked Locked Unlocked Locked AS221F-01-23(S)A 3.2 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-04(S)A 4 8.2 AS221F-01-06(S)A 6 10.4 10 (9) AS221F-01-08(S)A 8 13.2 22.4 29.5 14.2 11 (10) AS221F-01-10(S)A 10 15.9 25.3 32.4 15.6 12 (11) AS221F-02-23(S)A 3.2 1/8 13 (12.7) 7.2 20.9 30.2 (30.3) 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-04(S)A 4 8.2 AS221F-02-06(S)A 6 10.4