Body Size: 40, Thread: Rc (Rc: for Sizes 20~60; M5: for Size 10), Port Size: 02 (1/4), Mounting: None, Semi-Standard, Body Size 10: Standard, Semi-Standard, Body Size 20: Standard, Semi-Standard, Body Size 30, 40, 50 & 60: Standard

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 11 (1000cm³ Tank w/Switch Lower Limit OFF)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 1 (1000cm³ Tank)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 11 (1000cm³ Tank w/Switch Lower Limit OFF), Option 2: R (Flow Direction: Right->Left)

Size: 40 (1/2), Thread: M Thread, Rc(PT), Port Size: 02 (1/4), Accessory: None, Option 1: 10 (1000cm³ Tank w/Switch Lower Limit ON), Option 2: R (Flow Direction: Right->Left)

Table of Contents

02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 EVS VFN With light/surge voltage suppressor Lead wire O.D.

CATALOG

D-B53 No/2 Wire D-B64 D-B73 D-C73 D-C73C D-B76 D-C76 D-B80 D-C80 D-C80C Yes/2 Wire Yes/2 Wire 20mA 4~8VDC 50mA 40mA 20mA 24V 48V 110V No/2 Wire ACCESSORIES SWITCH BANDS FOR SWITCHES D-B7, D-B8, D-G7 ACCESSORIES SWITCH BANDS FOR SWITCHES D-B5, D-B6, D-G5, D-K5 ACCESSORIES SWITCH BANDS FOR SWITCHES D-C75, D-C8, D-H7 BM1-01 3/4 BM1-02 1 BM1-32 1 1/4 BM1-04 1 1/2 BM1-05 2 BM1-06 2 1/2 BA-01

Table of Contents

-01-D Meter-out M5 type U10/32 port AS3200-02-D Meter-out M5 type U10/32 port AS2210-01-D AS3210-02-D Component Parts No.

Table of Contents

VX2122-02 VX2-02 VX2322-02 VX2132-02 VX2232-02 VX2332-02 VX2242-02 VX2342-02 VX2-03 VX2322-03 VX2232-03 VX2332-03 VX2242-03 VX2342-03 VX2110-01 VX2120-01 VX2130-01 VX2110-02 VX2120-02 VX2220-02 VX2320-02 VX2130-02 VX2230-02 VX2330-02 VX2240-02 VX2340-02 VX2250-02 VX2350-02 VX2260-02 VX2360-02 VX2220-03 VX2320-03 VX2230-03 VX2330-03 VX2240-03 VX2340-03 VX2250-03 VX2350-03 VX2260-03 VX2360

5 Port Solenoid Valve Series SY3000/5000/7000/9000

+ B A X PE EA EB P M5 x 0.8 62.8 G: Approx. 300 H: Approx. 600 107.2[111.6] (Pilot EXH port) (Lead wire length) 50.6[57.6] 22 9.5 18 18 28 (P, EA, EB port) 1/4 56 L plug connector (L): 10-SY5240(R)-L-02 M plug connector (M): 10-SY5240(R)-M-02 DIN terminal (D): 10-SY5240(R)-D-02 M8 connector (WO) 10-SY5240(R)-WO-02 127[131.4] Approx. 300 (Lead wire length

Table of Contents

Connection L2 M d A Effective area (mm2) Weight (g) L1 thread R Model 1 8 1 4 1 8 1 4 3 8 1 8 1 4 3 8 1 8 1 4 3 8 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 1 4 3 8 1 2 KFH04-01 KFH04-02 KFH06-01 KFH06-02 KFH06-03 KFH08U-01 KFH08U-02 KFH08U-03 KFH08N-01 KFH08N-02 KFH08N-03 KFH10U-02 KFH10U-03 KFH10U-04 KFH10N-02 KFH10N-03 KFH10N-04 KFH12U-02 KFH12U-03 KFH12U-04 KFH12N-02 KFH12N-03 KFH12N-04 10 10

5-Port Solenoid Valve

Dimensions Applicable fitting size d (Metric size) Model A L D Applicable fitting size d (Inch size) Model A L D 2 KJP-02 8.2 17 3 3.2 KQ2P-23 16 31.5 5 4 KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 KQ2P-10 22 43 12 12 KQ2P-12 24 45.5 14 1/8" KQ2P-01 16 31.5 5 5/32" KQ2P-03 16 32 6 1/4" KQ2P-07 18 35 8.5 5/16" KQ2P-09 20.5 39 10 3/8" KQ2P-11 22 43 11.5 d D A L * Shipped together

V100

Common exhaust: VV3P3-41Stations 1-02 (G) (E) (T) (D, Y) N.C. N.O.

SY

SY5240(R)-M-02 DIN terminal (D): SY5240(R)-D-02 Manifold spec. sheets Order made Type 45 Type 45Applicable cable O.D. 3.5 to 7 81.7 74.2 145.2 Max. 10 62.9 Pg.7 18 18 147 28 9.5 22 Grommet .

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

DIN terminal Closed center: VFR2310Exhaust center: VFR2410Pressure center: VFR2510L plug connector Closed center: VFR2310-LExhaust center: VFR2410-LPressure center: VFR2510-LM plug connector Closed center: VFR2310-MExhaust center: VFR2410-MPressure center: VFR2510-M01 02 01 02 01 02 01 02 01 02 01 02 01 02 D Y 01 02 D Y 01 02 D Y Applicable cable O.D. 6 to 8 [4.5 to 7] Light/Surge voltage

AC

Y60 Interface G36-10-01 G36-10-01G46-10-02 G46-10-02 G46-10-02 G46-10-02 G46-10-02 G36-10-01 1.0MPa G27-10-R1 Pressure gauge (G27-10-R1)(4) G36-2-01 G36-2-01 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G46-2-02 G36-2-01 0.2MPa AD43 AD43 AD44 AD44 AD44 AD44 AD44 N.O.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

Grommet terminal: Double VFS2210-E-01 02 Closed center VFS2310-E-01 02 Exhaust center VFS2410-E-01 02 Pressure center VFS2510-E-01 02 DIN terminal: Double VFS2210-D Y-01 02 Closed center VFS2310-D Y-01 02 Exhaust center VFS2410-D Y-01 02 Pressure center VFS2510-D Y-01 02 With light/surge voltage suppressor 151 (3 position: 159) Lead wire O.D.

AS

A (2) Model T D1 H1 L4 (1) Applicable tubing O.D. d (g) Mass H2 D2 L1 L2 L3 M AS221F-01-06W2 AS221F-01-08W2 AS221F-01-10W2 AS221F-02-06W2 AS221F-02-08W2 AS221F-02-10W2 AS321F-02-06W2 AS321F-02-08W2 AS321F-02-10W2 AS321F-02-12W2 AS321F-03-06W2 AS321F-03-08W2 AS321F-03-10W2 AS321F-03-12W2 AS421F-04-10W2 AS421F-04-12W2 31 19 17 23.9 6 13.2 13.4 32.4 36.4 31.4 21 28.3 33.3 18.5 8 25.3 15.2 10

ZP

D D 10 14 B B 24 31 A 8 11 A 7 10 Weight (g) Weight (g) Weight (g) Weight (g) 3.4 4.4 6.8 8.2 11 26.5 3.4 4.4 6.8 8.2 11 26.5 With Buffer: Vacuum Inlet Construction Adapter Applicable Pad List 14.5 33 14.5 33 Vacuum Inlet Dimensions ZP3-T035U;J -B3 ZP3-T035U;K -B3 Barb fitting One-touch fitting 5 7 ZP3-T015U; -02 ZP3-T02U; -02 ZP3-T035U; -02 ZP3-T015U; -U2 ZP3-T02U; -U2 ZP3-T035U; -U2 M3