4/5 Port Solenoid Valve

For the allowable voltage fluctuation for S, Z and T types (with power saving circuit), please observe the following range because they have voltage drop due to internal circuit. 1 (P) 5 (R1) 3 (R2) 1 (P) 3 (R) 3 position closed center 3 position closed center S and Z types 24 VDC: -7% to +10% 12 VDC: -4% to +10% T type 24 VDC: -8% to +10% 12 VDC: -6% to +10% (B) 2 (A) 4 (B) 2 (A) 4 Built-in

Compact Cylinder

32 30 D Z CQ2 B R 32 to 100 30 M9BA B CDQ2 32 Z R D With auto switch With auto switch (Built-in magnet) Number of auto switches Mounting B A L F G D Nil S n 2 pcs. 1 pc. n pcs.

Table of Contents

Color of lead wire Black Symbol Contact C Z I SE3 Common A White Normally Open B (N.C.)

CV/MVGQ

2 10-15-13 14 Series CVJ3 Single Acting, Spring Return/Basic Style (B) M5 x 0.8 CVJ3B S Bore size Stroke M5 x 0.8 28 [34.5] 48 [49] Manual override Width across flats B1 Rod End Nut Bore size (mm) 10 16 H1 B1 7 3.2 16 [17] S + Stroke Z + Stroke 8 4 [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) NN NB NA MM HX H F D C B A ND Z Z S Z S Z S S

CV/MVGQ

Z + 2 x Stroke 7 3.2 8 4 C J G5-S [ ]: Denotes the values of AC. 5 to 15 st 16 to 30 st 31 to 45 st 46 to 60 st Bore size (mm) CV LA H F D LY NN C LX Y B LC LT MM X A LB LH LZ NA NB S Z Z S Z S Z S 128 [129] 129 [130] 116 [117] 117 [118] 96.5 [97.5] 104 [105] 96.5 [97.5] 105 [106] 10 16 28 8 4 M8 x 1 84 14 24 7 72 12 1.6 5 60 15 15 9 32 9.5 37.5 4.5 16.5 M4 x 0.7 12.5 52.5 MVGQ 28 8 5 M10

NCQ2/CQ2

Series (N)CQ2 Made to Order Individual Specifications 6 Symbol Cylinder Tube: With Concave Boss on Head End -X1876 D(C)(M)(Z) S(M)(Z) T(M)(Z) C Q2 C Q2K C Q2 S X1876 Mounting Bore size Stroke With concave boss on head end The specifications are the same as those of the CQ2 series.

Air Slide Table

72 42 60 30 36 B N x M5 x 0.8 F N 2 1 x F 29 3 Cross-sectional view B-B 2 x M5 x 0.8 thread depth 7 27 0.5 M 7 ZZ Z J I 16.5 Pilot port 3 x M5 x 0.8 (Plug: Width across flats 7) +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 +0.030 5H9 ( 0 ) depth 3 24 G H 24 G H HA 10.7 16.3 A 9.5 5.1 10 A 6 6 NN x M6 x 1 thread depth 9 HB GB GB HB B stroke: 50 mm B stroke: 20 to 40 mm Cross-sectional

5-Port Solenoid Valve

C8: 8 (SMC) N9: 5/16" (SMC) Manifold block internal wiring specifications Nil: Double wiring S : Single wiring 68.8 (Slide locking manual override) 1 P 1 P 21.6 10.6 13.6 71 63.1 56.6 2 S E 3/5 E 3/5 2 B B 2 B 2 B 2 B 40.2 (11.8) 31.5 4 A 4 A 4 A 4 A 4 A (7.5) 18 16.5 (17.8) (Pitch) P = 10.5 2 x M20 x 1.5 thread depth 13 (Conduit port) One-touch fitting [4(A), 2(B) port] Applicable tubing

LJ1H

H B C 8mm 12mm 20mm Non-standard motor switch P N S Ground ball screw Rolled ball screw Slide screw Motor output: 100W None N.C. (B contact) 2 pcs.

Air Cylinder

Z ZZ S Z ZZ S Z ZZ S Z ZZ S Z ZZ 20 87 132 141 112 157 166 137 182 191 25 87 136 145 112 161 170 137 186 195 32 89 138 147 114 163 172 139 188 197 164 213 222 40 113 168 179 138 193 204 163 218 229 188 243 254 213 268 279 Symbol Bore size The bracket is shipped together.

MY1

MY-S A 2-G 2-H F E C D A B Side support B MY-S B 2-J E C D A B J M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 C 15 25 35 45 E 4.9 6.4 8 11.7 F 3 4 5 6 H 3.4 4.5 5.5 6.6 A 61 67 81 100 120 142 172 G 6.5 8 9.5 11 D 26 38 50 64 B 71.6 79.6 95 118 142 164 202 Applicable cylinder MY1C16 MY1C20 MY1C25 MY1C32 MY1C40 MY1C50 MY1C63 Model MY-S16A B MY-S20A B MY-S25A B MY-S32A B M10 x 1.5 55 14.8 8.5 9 14 80

Mechanically Jointed Rodless Cylinder Series MY1

Wn X-axis Xn Y-axis Yn Z-axis Zn Z X Wa 65 mm 0 mm 0.88 kg 5 mm 111 Wb 150 mm 0 mm 4.35 kg 42.5 mm 210 Y Y Wc 150 mm 111 mm 0.795 kg 42.5 mm Wd 150 mm 210 mm 0.5 kg 42.5 mm n = a, b, c, d 3.

Magnetically Coupled Rodless Cylinder

moment (6 to 15) [Graph 11] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 Moment M1, M3 [Nm] Moment M1, M3 [Nm] CY1S15-Z CY1S32-Z CY1S25-Z CY1S10-Z CY1S20-Z CY1S6-Z 1 10 0.5 5 100 400 200 300 100 400 200 300 Piston speed [mm/s] Piston speed [mm/s] M2 M2 [Graph 12] Allowable moment (6 to 15) [Graph 13] Allowable moment (20 to 40) 20 200 CY1S40-Z 10 100 CY1S15-Z CY1S32-Z Moment M2 [Nm

Smooth Cylinder/Low Speed Cylinder

(mm) B 12 18.3 C 14 20 D 4 5 F 8 8 FB 13 19 FC 4.5 5.5 FT 1.6 2.3 FX 24 33 FY 14 20 FZ 32 42 GA 8 8 GB 5 5 H 28 28 MM M4 x 0.7 M5 x 0.8 NA 12.5 12.5 NB 9.5 9.5 NN M8 x 1.0 S 46 47 T A 15 15 Z 74 75 Bore size (mm) 10 16 M10 x 1.0 Double Clevis Style (D) Bore size Stroke CJ2XD Z + Stroke S + Stroke Rod end nut Piping port 2 x M5 x 0.8 Clevis pin CZ 0 -0.3 B 0 -0.3 T-bracket For details, refer

Table of Contents

S) PB PA PB SMC B PA A A B SMC SMC (mm) Dimensions (Max.

LVQ

T) V N 1 2 1 2 1 2 1 2 LVQ3 S, LVQ4 S LVQ5 S, LVQ6 S M V A B SMC U C A B Z D (Max. T) View Z LVQm0-S shown.

High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

MY1

Wn Y-axis Yn Z-axis Zn X-axis Xn Z X Wa 0 mm 5 mm 0.88 kg 65 mm 111 Wb 0 mm 42.5 mm 4.35 kg 150 mm 210 Y Y Wc 111 mm 42.5 mm 0.795 kg 150 mm Wd 210 mm 42.5 mm 0.5 kg 150 mm n = a, b, c, d 3.

CJ2

M5 x 0.8 Piping port M5 x 0.8 S + Stroke Z + Stroke Rod end nut Rod End Nut 2-LC Mounting hole Material: Iron Applicable bore (mm) 10 16 B H C d Part no.

Table of Contents

06 Thread type Nil Rc Plug-in VFR5000 P B 06 G F N NPT Non plug-in VFS5000 S B 06 NPTF T Note) Bottom ported is not available for external pilot.