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2 O-ring NBR 2 5.5 x 3.5 x 1.0 5.5 x 3.5 x 1.0 C-5 C-5 C-5 !

2 Phase Stepper Motor/Without Motor Brake Series LXS

E-M5 thread depth 10 6 38 76 46 Motor wire (300mm) Photo micro sensor wire (300mm) 2-M2.5 thread depth 4 3 10 8 J 25 25 27 J x K Stroke + 220 10 Stroke + 127 13 15 (5) 0.5 46.5 3.5 2-M6 thread depth 13 58 52 27 19 [18] 15 Stroke + 127 (39) The dimension inside [ ] shows the location at which the home position switch operates. 58 (52) 28 36: T-slot pitch U N x P 20 5 N C 1 0.2 (5.1) 10 5.8

ZP

> > > > > > /5 /5 Gasoline/Gas oil /5 > > /5 /5 Benzene/Toluene > > > > 5 5/> > > > > > Alcohol /5 /5 /5 /5 /5 Ether > > Ketone (MEK) /5 /5 /5 5 5 Ethyl acetate > > > > > > 5 > > Water /5 /5 5/> > > Organic acid Organic acid of high concentration Organic acid of low concentration 5/> 5/> > > 5 5 > > > > > > 5 > > > > > > > Strong alkali > > > > > > > Weak alkali > > = Excellent -

5 Port Solenoid Valve Series SY3000/5000/7000/9000

: Not available for SY3000-52-5A) 5 Bushing assembly SY3000-52-5A CE-compliant: SY3000-52-1A 6 VZ1000-11-1Refer to page 186.

Table of Contents

4 7,, 9= 5,'., ?4 , 9= 5,'., ?4 77, 9= 5,'., ?4 70, 9= 5,'., ?4 0( 9= 5,'., ?

Table of Contents

5 No. q w e r t y u i o !0 !11 !2 !33 !4 !5 !

5

0.7 6.5 7.5 7 4 0.5 20 5 to 50 29 24.5 39 34.5 7 10 36 5.5 M5 x 0.8 47 8 4.5 25.5 5.4 M6 x 1.0 9 8 10 7 1 25 5 to 50 32.5 27.5 42.5 37.5 12 12 40 5.5 M6 x 1.0 52 10 5 28 5.4 M6 x 1.0 9 9 10 7 1 Bore size (mm) Stroke range (mm) Note) Threaded through-hole is used for the standard of 20 with 5 to 10 mm strokes and 25 with a 5 mm stroke. 228 A Smooth Cylinder CQSY Series Dimensions: 12 to 25

ZP

Applicable pad 4020W/5020W/6020W/8020W Applicable pad 3507W/4010W/5010W/6010W Applicable pad 4030W/5030W/6030W/8030W A-A A-A A-A (5) (5) (5) 14.8 8.8 6 1.5 A A A A A A 2 0.8 2 3.5 4 4 15 15 30 3 5 5 3 5 3 0.8 0.8 8.4 12.8 20.4 Note) R part has to be smooth with no corners.

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

7 $1 y#6 #5 @0 $3 @5 @4 @9 #3 #7 @1 @3 #2!6 #0!4!3 !2 !9 #9 #8!5 $2$0 r w#1 @8 @2 t Air-hydro type #6 $5 $4 $6 Component Parts No.

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K L DJ 20M5 x 0.8 (Finger closing port) G I M (mm) G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 26 35 EO 38 51 DC 74 91 DO 86 107 M 2 3 B 70 86 K 10 11 AC 3 4 J 24 28 AA 55 66 AB 52 62 NA 18 24 L 4H9 6H9 NB 10h9 12h9 I Model MHS4-50D MHS4-63D CA 9 12 CB 20 22 +0.030 0 +0.030 0 0 0.036 0 0.043 9 11 SC 12 14 RB 34 38 O 5 5.5 VA Q 14 17 RA 52 66 VB 4 5 WA WB 2 2.5 XA XB 4 5 YC 7 7.5 Model MHS4-50D

Modular Design with Uniform Body Style

5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

ISO Cylinder

5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9l D-A9lV 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C D-M9lV D-F7lV D-J79C 5 5 10 + 10 (n 2) (n = 4, 6) D-F7l D-J79 5 5 15 + 15 (n 2) (n = 4, 6) D-A9lV*2 5 10 10 + 15 (n 2) (n = 4, 6) D-A7l D-A80 D-A73C D-A80C Rail mounting 5 10 15 + 10 (n 2) (n = 4, 6) 5 10 15 + 10 (n 2) (n = 4, 6) D-A7lH

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

0.5 1 5 10 20 50 0.5 1 5 10 20 50 Load (kN) Load (kN) Bore size 80 B rod C rod 2000 6 4 8 3 7 5 1 5 2 4 8 3 7 6 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 1 5 10 20 50 Load (kN) Load (kN) Bore size 100 B rod C rod 4 8 8 3 3 7 7 5 4 5 2000 6 6 1 2 1 2 1000 Stroke (mm) 500 100 50 1 5 10 20 50 100 1 5 10 20 50 100 Load (kN) Load (kN) 28 Series CH2E/CH2F/CH2G/CH2H Technical Data 3 Relationship

CLA

Y. 44 M14X l .5 M18X l .5 M\8X l .5 M22Xl.5 M26X1.5 , 50 -600 20-600 32 35 70 108 Y. Y. 52 63 ! -600 20-600 :J2 35 86 11 5 '/, Y. 64 20 40 10 95 17 27 59 13 12 MaX 1 25 7 30 80 20 40 10 102 17 26 67 18 15 Ml0Xl .2S 25 52 14 11 3 21 30 72 23 17 M1 2X 175 30 52 14 124 21 31 76 25 19 M12X1.75 7 40 99 80 1 750 20750 37 40 102 129 'I.

CL

5 !6 !7 !8 !

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

4" x 5/8" 1/2" x 3/8" 3/4" x 5/8" 1/2" x 3/8" No. 2 2 2 2 3 3 3 3 3 3 4 4 4 4 5 5 5 5 No. 2 2 2 2 2 2 3 3 3 3 4 4 4 4 5 5 5 5 Tubing O.D.

Micro Mechanical Valve Series VM1000

port 3 port 5 port 3 port 5 port 111 g (Add to 2 basic units.)

CL

5 !6 !7 !8 !

Free Mount Cylinder

15 10 5 15 10 5 15 10 5 6 67 62 52 67 62 52 57 52 47 57 52 47 42 42 9 8 10 80 65 55 80 65 55 65 55 50 65 55 50 45 45 9 8 16 94 79 69 84 69 59 69 59 54 59 49 44 49 39 9 8 20 90 75 65 80 65 55 75 65 60 65 55 50 55 45 9 8 25 96 81 71 86 71 61 81 71 66 71 61 56 61 51 11 10 32 100 85 75 90 75 65 85 75 70 75 65 60 65 55 13 12 The dimensions other than the table above are the same as those of standard