3

Apparent power (VA) Volt-ampere is the product of voltage (V) and current (A). Power consumption (W): For AC, W = VAcos. For DC, W = VA. Note) cos shows power factor. cos 0.9 3. Symbol When the valve is closed, flow is blocked from port 1 to port 2.

VNH

AC (50/60/Hz) DC VO301-00T-X302 Conduit terminal 100 V, 200 V, Other voltage (Option) 24 V, Other voltage (Option) 15 to 10% of the rated voltage Class B or equivalent (130C) 70C or less (When rated voltage is applied.) 12 VA (50 Hz), 10.5 AV (60 Hz) 7.5 VA (50 Hz), 6 VA (60 Hz) 4.8 W Non-locking push type LVA Allowable voltage fluctuation Coil insulation type Temperature rise LVH LVD Inrush

JXCx-OMT0001CN

M M 1 2 ... ... 0mm 50mm 60mm 100mm 0mm 50mm 60mm 100mm ... ...

LEY-OM007

12250 6125 [mm/s 2] 3,000 [mm/s] 6) 50 35 30 [mm] 0.02 [mm] 10 5 2.5 12 6 3 16 8 4 [m/s 2] 7) 50/20 + LEYG* M L_ LEYG* M LD LEYGM,LEYGL [] 540 [%] 90 RH ) 28 42 56.4 (DC24V) A/B 800 / [V] DC2410% [W] 8) 23 40 50 [W] 9) 16 15 48 [W] 10) 43 48 104 11) [N] 20 39 78 78 157 294 108 216 421 [W] 12) 3.6 5 5 [V] DC2410% LEYG 16M _ LEYG 25M _ LEYG 32M _ [mm] 30 50 100 150 200 30 50

VXR21/22/23

LQ LVN Table(1) Connection Size and Applicable Model Table(2) Rated Voltage-Electrical Entry-Electrical Option Insulation type Electrical entry Electrical option 1 (100 V) 2 (200 V) 3 (110 V) 4 (220 V) 7 (240 V) 8 (48 V) 5 (24 V) 6 (12 V) TI/ TIL Applicable model VXR2150-04 VXR2150-06 VXR2260-10 1 VXR2270-12 1 VXR2380-14 2 VXR2390-20 Size Class B Class H G PA 1 2 3 4 C D, T G, C T S L,

PF-OMN0009_C

1.8 V 5 V 4 mA 7.2 mA 20 mA (PF3W521-U30) A B C 1 V 1.48 V 5 V 4 mA 5.92 mA 20 mA [L/min] PF3W504 0.5 4 PF3W520 2 16 PF3W540 5 40 PF3W511 10 100 PF3W521-12/14 50 250 PF3W521-U30 30 250 () A B C D 0.6 V 1 V 5 V 5.4 V -40No.PF-OMN0009CN-F PF3W504/520/540/511 2X A AA B DD E F G H J K L N P PF3W504 3/8 70 50 30 45.6 40.6 15.2 24 14 35 26 18 13.6 2.7 14 PF3W520 3/8 1/2 78 54 30 45.6 40.6

Fluoropolymer Piping Equipment

Connection threads R/NPT A A E E H L L M W N Min. port size W LVA M N LQ3H11-M 4 1/8" 29.5 28.5 10 9 11 33.5 32.5 14 10 4 2.5 LQ3H12-M 3 2 LQ3H21-M 6 1/8" 39.5 38.5 17 16 16 43.5 42.5 20 14 4 4 LQ3H22-M 1/4" 37.5 36.5 6 LQ3H31-M 10 1/8" 51 48 LVH (E, E) Port size R (NPT) LVD LVQ 4.4 4.4 LQ3H32-M 8 LQ3H33-M 10 1/4" 49 46 6.4 6.4 LQ3H34-M 8 LQ3H35-M 10 3/8" 48.5 45.5 10 7.5 LQ3H36-M 8 10 6.4

Series: 25A-ZSE20, Rated Pressure Range: 0 to -101 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specifications: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Panel Mount Adapter,

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: M (SI Unit Only), Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof), Bracket: A1 (Bracket A)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: SI Unit Only, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: Bracket A, Operation Manual: -

JXCx-OMT0002

M M ... Axis 1 ... Axis 2 0mm 0mm 50mm 60mm 100mm End position 50mm 60mm 100mm Origin position Origin position End position Actuator Load Actuator Load Motor Motor ... ... M M ... Axis 3 ... Axis 4 0mm 50mm 60mm 100mm End position 0mm 50mm 60mm 100mm End position Origin position Origin position -58No. JXC-OMT0002-C Flow chart (Reference) (1) Select Step No.1. (Turn IN0 ON.

JXCx-OMU0026

Example) When LEFSH25RH-300 isordered, input LEFS25RH-300 (c) When a Clean type (11-) or Secondary battery type (25A-) is ordered. Search without inputting 11or 25A-, and find the actuator to which 11or 25Ais applicable.

ZISE20C-L.eng

Bracket C Units specification Pressure range Default setting ISE20C: 0.050 MPa/ZSE20C: 5.1 kPa/ ZSE20CF: 5.0 kPa/ISE20CH: 0.100 MPa Hysteresis ISE20C(H) MPa Self tapping screws: Nominal size 3 x 8L "Nil" or M Self tapping screws: Nominal size 3 x 10L ZSE20C(F) kPa Delay time 0.00 sec.

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: W (Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof)

Rated Vacuum Range: -101 to 0 kPa, Output Specification: PNP Open Collector 2 Outputs + Analog Current Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: 02 [R1/4, (M5, Female Threaded)], Piping Direction: Rear Ported, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Waterproof, Bracket: -, Operation

Air cylinder (Series compatible with secondary batteries)

(See page 15, Table 8.) < Applicable Auto switches > Solid state auto switch D-M9N(V)-900M9P(V)-900M9B(V)-900 D-M9NW(V)-900M9PW(V)-900M9BW(V)-900 Reed auto switch D-A90-900 Fig 4. How to Mount and Move the Auto Switch Fig 4.

VND

G (Valve open) Pilot port Indicator (Option) (Back side P2) Bracket (Option) Main port Main port Rc A B C D E F G M N P Q R S T U Model 3 8 1 2 3 4 1 VND20D-10A VND20D-15A VND30D-20A VND40D-25A 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 80 90 50 60 35 40 17.5 20 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 17-4-40 5 Series VND Steam Valve: 2 Port Valve

Slider Type Ball Screw Drive/11-LEFS Series

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table V: Standard Stroke [mm] Model 50 100 150 200 250 300 350 400 450 500 550 600 650 700 750 800 850 900 950 1000 11-LEFS25 V V V V V V V V V V V V 11-LEFS32 V V V V V V V V V V V V V V V V 11-LEFS40 V V V V V V V V V V V V V V V V V V Support Guide/LEFG Series

Environment

4 mm) LEJ Vent hole Note 3) V EV J LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25

1

L M L Max.