Bearing Style: Ball Bush Bearing, Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 75mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Bearing Style: Ball Bush Bearing, Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 40mm, Auto Switch: M9BWV--Solid State, 2-color Indication, 2 Wire, Vertical, Lead Wire or Prewired Connector: 3m, Number: -

Plug-in/Plug Lead: Single Unit

-1 (Plug-in type) VVQ5000-25A-5 (Plug lead type) Specifications Handling Precautions Intermediate stop Drop prevention VVQ5000-25A1 5 Double check spacer part no.

SFOD-OMT0011CN

Result area (LER ) ) LEY16RA-100BMLLEY16RA-100 LERH30K-3LLERH30K-3 0 ) LEY16RA-75LEY16RALEY16RA-100 LEFSH LEFS ) LEFSH25RH-300LEFS25RH-300LEFS25RH-300 11-)(25A-) 11-25A-11-25A) 11-LEFSH16A-100BRLEFS16A-100LEFS16A-100 29 No.SFOD-OMT0011CN-A c) Execute Execute b) c) (Apply) d), d) download e) 30 No.SFOD-OMT0011CN-A (2) a View(V) 4.1 (1-1-2) View (V) b c) download e) 31 No.SFOD-OMT0011CN-A

1

: A22 Symbol: A26 Symbol: A23 T W1 L L L L CP95 RD 30 DA 30 30 DA H1 H1 DA E NCM H1 Symbol: A5 Symbol: A6 Symbol: A7 Symbol: A8 30 DB DB NCA B C1 H B C T B RD T X LA H C1 DW X L H C1 X L X L K L LB -X W E L 30 30 30 L DC 30 Symbol: A30 Symbol: A29 Symbol: A28 Symbol: A27 20L L H1 Data 30 30 30 30 H1 W H1 DA E DA W Symbol: A9 Symbol: A10 Symbol: A11 Symbol: A12 X C0.5 R sphere T T C1

V100

V100-31-1A V100-74-1 Material FKM, Steel Aluminum die-casted Number 10 11 Note Gasket, 2 screws Gasket assembly Sub-plate VFN R A P 2 4 8 6 11 10 1 How to Order Connector Assembly For DC: SY100 30 4A For 100 VAC: SY100 30 1A For 200 VAC: SY100 30 2A For other voltages of AC: SY100 30 3A SY100 30 A Lead wire length Without lead wire: (With connector and 2 sockets) Nil 6 10 15 20 25 30 50

Bearing Style: L (Ball Bush Bearing), Bore Size: 10mm, Port Thread: Bore 6-25: M Thread; Bore 32: Rc, Piping: Standard Porting, Stroke: 30mm

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.1 to 0.7, Specification: Built-in magnet, Port

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 30, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Cylinder with functions of thrusting and boosting, Environment, Applications: Standard, Cushion: Rubber bumper at both ends, Operating Pressure(MPa): 0.1 to 0.7, Specification: Built-in magnet, Port

Environment

, 50, 100, 150, 200 250, 300, 350, 400 30, 50, 100, 150, 200 250, 300, 350, 400, 450, 500 For LECP6 LECP1 LECPMJ (3000 [mm/s2]) 20 40 60 30 45 60 Horizontal (2000 [mm/s2]) 30 60 70 40 60 80 Work load [kg] Note 2) For LECPA (3000 [mm/s2]) 12 30 30 20 40 40 (2000 [mm/s2]) 18 50 50 30 60 60 Actuator specifications Vertical Note 15) (3000 [mm/s2]) 7 15 29 10 21 42 Pushing force [N] Note 3) Note

Slider Type Ball Screw Drive/11-LEFS Series

16 20 24 0 10 20 30 40 50 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 1000 800 800 800 800 L6 L6 [mm] L6 [mm] L6 [mm] L6 [mm] 600 600 600 600 Z 400 400 400 400 200 200 200 200 0 0 4 8 12 16 20 24 0 0 0 0 2 4 6 8 10 12 14 16 0 10 20 30 40 50 0 10 20 30 40 50 60 Work load [kg] Work load [kg] Work load [kg] Work load

1.1

8 8 6 6 4 4 2 2 0 0 0 10 20 30 40 40 0 10 20 30 Circulating fluid temperature (C) Circulating fluid temperature (C) 16 Series HRG Thermo-cooler Pump Capacity HRG001-A, HRG001-W HRG002-A, HRG002-W 0.3 0.3 30 30 Outlet port [60 Hz] Outlet port [60 Hz] Outlet port [50 Hz] Outlet port [50 Hz] 0.2 0.2 20 20 HRG HRGC HRZ HRW HEC HEB HED Technical Data Related Products 0.1 0.1 10 10 Return port

Refrigerated Thermo-chiller

[Outlet port: Max.] 0.9 50 40 0.8 0.4 0.7 40 30 0.6 0.3 30 0.5 20 0.4 0.2 20 0.3 [Return port] 10 0.2 0.1 10 [Return port] 0.1 0 0 0 0 0 10 20 30 40 0 10 20 30 40 Lifting height (m) Pressure (MPa) Lifting height (m) Pressure (MPa) Circulating fluid flow (l/min) Circulating fluid flow (l/min) The pump capacity of the HRZ010-W1S is same as that of the HRZ001-L1 group on page 85.

Programless controller Step motor (servo 24 VDC)

LEFB LEFS 16, 25, 32 common 16A 16B 25H 25A 25B Direction Motor side Return to origin Speed [mm/s] 60 30 Acceleration[mm/s2] 1000 Speed [mm/s] 48 10 5 20 12 6 Jog Acceleration[mm/s2] 1000 Inching Distance [mm] 5 1 LEFS 32H 32A 32B 40H 40A 40B Direction Motor side Return to origin Speed [mm/s] 30 Acceleration[mm/s2] 1000 Speed [mm/s] 24 16 8 30 20 10 Jog Acceleration[mm/s2] 1000 Inching Distance

JXCx-OMT0023

5.11 One-touch tuning 5 -30 6.

JXCx-OMU0004

200 20 200 10 200 1 30 300 20 300 10 300 40 300 30 300 12 300 2 40 400 30 400 15 400 50 400 40 400 15 400 3 50 500 40 500 20 500 60 500 50 500 20 500 4 60 600 50 600 25 600 80 600 60 600 25 600 5 80 700 60 700 30 700 100 700 80 700 30 700 6 100 800 80 800 40 800 200 800 100 800 40 800 7 200 900 100 900 50 900 300 900 200 900 50 900 8 300 1000 200 1000 75 1000 500 1000 300 1000 75 1000 9

High Purity Fluoropolymer

3/8" 6 30 21 33.1 28 11 22 30 (M) N 28.5 1/2" 10 19 12 19 35 1/2" LQ2R52-M H 7 42.5 46 40 32 14 28 36 LQ2R54-M LQ2R53-M Class 4, 5 33.5 3/4" 12 Inch sizes Connection threads R/NPT Model Applicable tubing O.D.

0.4

Max. voltage (with no load): 30 Vrms (42.4 V peak) or less Max. current: q 8 A or less (including shorts), and w When controlled by a circuit protector (fuse) with the following ratings: VQC VQZ SQ VFS VFR VQ7 No-load voltage (V peak) Max. current rating 0 to 20 [V] 5.0 100 Over 20 [V] and up to 30 [V] Peak voltage value (2) A circuit (class 2 circuit) with maximum 30 Vrms (42.4 V peak)

PF-OMM0004_C

ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA -68No.PF-OMM0004-D PF3W711 PF3W721 0.4 V ()30 ms 2 4 7 /6 11 ) 5 / 12 DC1224 V10 50 mA IP65 050 () 3585R.H.() AC1000V 1 50M (DC500V ) CE UL(CSA)RoHS PPSFKMCPVC 25A 30 A 285 g 340 g 370 g 425 g 171 3mPas(3 cP)70 20.5 s 3F.S. 374 4OFF (2 5 ) 5 100 (24 5 100 500 9.5 ) 590 690 -69No.PF-OMM0004-D PVC ammonium hydroxide

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.