Air Slide Table Series MXS

Refer to the Specific Product Precautions. 55 62 ZZ Z 16 34 16 34 G H (NN 1) x H B A 6.6 11 12 12 6H9 depth 6 +0.030 0 38 2 7 B A NN x M8 x 1.25 thread depth 16 6H9 depth 6 +0.030 0 GA HA Section AA Section BB (mm) F 50 50 50 60 35 60 70 75 80 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35 35 38 40 NN 2 2 2 2 3 4 5 6 7 GA 22 22 22 22 55 61 102 154 190 HA 45 45 45 55

MXS Series Air Slide Table

0 NN-M8 x 1.25 thread 16 deep 6H9 6 deep +0.030 0 HA GA Cross section AA Cross section BB (mm) Model F 50 50 50 60 35 60 70 75 80 FF 40 40 40 50 35 60 70 75 80 GA 22 22 22 22 55 61 102 154 190 KA NA 2 2 2 2 2 2 4 4 4 M 92 92 92 102 115 156 197 255 295 HA 45 45 45 55 35 70 70 76 80 ZZ 108 108 108 118 131 172 213 271 311 N 4 4 4 4 6 6 6 8 8 G 22 22 22 22 20 26 32 40 30 H 45 45 45 55 35 35

AC Servo Motor Driver (Pulse input type/Positioning type ）

B-phase 0 A-phase A-phase B-phase B-phase 1 _ _ x _ Encoder output pulse setting selection 0h Refer to app. 15 for details.

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

ends (A) 16 2 Extension end (CS) 20 3 Stroke adjustment range 0 to 5 mm Retraction end (CT) 25 5 Metal stopper Both ends (C) Proper Auto Switch Mounting Position (Detection at Stroke End) E A B Reed auto switch: D-A93 Stroke B Stroke E Auto switch operating range Model A 100 40 50 150 30 75 125 150 10 20 30 125 75 100 20 50 10 40 13-/22-MXQ6(L) 13-/22-MXQ8(L) 13-/22-MXQ12(L) 13-/22-MXQ16(

MB1

Stroke S + Stroke H A F N N C B Cylinder tube sectional view B-B' Width across flats Stroke range Bore size (mm) Effective thread length C B G F E A H ZZ W V S P N MM J MB 32 40 50 63 80 100 32.5 38 46.5 56.5 72 89 13 14 15.5 16.5 19 19 13 13 14 14 20 20 30 35 40 45 45 55 46 52 65 75 95 114 22 30 35 35 40 40 47 51 58 58 72 72 135 139 156 156 190 190 6.5 9 10.5 12 14 15 4 4 5 9 11.5 17 84

CNA

MGG (Max.)W1 B DX Z + Stroke MGC DDH10 hole 90 B MGF 4-DT B DS A DH DF CY1 DO DO DC DE DU DU DL DA 4-DR MY1 Rotation angle (mm) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 A B A + B + 90 Part No.

CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

Compact Cylinder with Lock Series CLQ

Without auto switch With auto switch Bore size (mm) G L A A B 48 58 56.5 66.5 69 79 LS B LS 100.2 36 46 43.5 53.5 53 63 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 110.2 46 58 38 18 110.2 Special cap bolt LY LH 118 80 128 53.5 66.5 43 20 128 138 100 148 63 79 50 22 148 4-LD A + Stroke LS + Stroke X Y X Y LG LT LZ LX Bore size (mm) L1 LD LG LH LT LX LY LZ X Y 63 43.5 11 5 46 3.2

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA ø 40, ø 50, ø 63, ø 80, ø 100, ø 125, ø 160

Hs Auto switch 12 15 22.5 A B 33 101 Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Single Rod Series CHA Proper auto switch mounting positions (mm) Auto switch type D-A5, D-A6 D-A3, D-A44 D-G39, D-K39 D-F5, D-J5 D-F5W, D-J5W D-F5BAL D-A59W D-F5NTL D-F5F D-B5, D-B64 D-B59W Bore size (mm) A B A A A A A B A B B B B B 40 10.5 11.5 14.5 14 21 17 22 23 11 12 15 15.5 22 18 50 11 13

Compact Cylinder with Lock Series CLQ

bolt CT Head Side Flange Style (mm) CD hole H10 Shaft d9 Stroke range Without auto switch With auto switch Bore size (mm) CD CT A A B CL B CL 36 112 126 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 136 46 122 14 8 46 122 136 CU 43.5 134.5 152.5 80 162.5 53.5 144.5 18 10 CZ CX +0.4 +0.2 DG B + Stroke RR CW L 53.5 144.5 162.5 CL+ Stroke 0.1 0.3 53 160 182 100 192 63 170 22 13 A + Stroke

ISO Standard Hydraulic Cylinder

Bore size (mm) B C d D H CH2 NTH-32S NTH-040 NTH-050 NTH-060S NTH-080S NTH-100S 21 21 26 39 48 62 8 10 12 16 20 25 25.4 25.4 31.2 47.3 57.7 75 M14 x 1.5 M16 x 1.6 M20 x 1.5 M27 x 2 M33 x 2 M42 x 2 32 40 50 63 80 100 22 22 27 41 50 65 CHA Related Products D351 CHSG Series Auto Switch Mounting Refer to pages 431 to 490 for detailed specifications.

CXS

50 100 10 20 30 40 50 75 10 20 100 10 20 30 40 50 75 100 50 40 30 75 20 10 Model 60 22 100 110 120 130 140 170 190 40 80 124 134 144 154 164 194 214 22 27 CXS20-R 107 117 132 142 147 172 197 40 60 80 131 141 156 166 171 196 221 24.5 24.5 29.5 CXS25-R 70 90 122 132 142 152 162 192 232 50 152 162 172 182 192 222 262 49 34 29 CXS32-R Dimensions other than those listed above are the same as

Electric Actuator

B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Circuit Cable color Shield Brown Black Red Black Orange Black Y ellow Black Vcc GND A A B B Z Z Connector B terminal no.

0.4

RD SD LRUN PW 93.5 116 B RATE 42 (35) 66 75 80 x 1 x 10 STATION NO.

CLQ

B + Stroke G Stroke range Without auto switch With auto switch Bore size (mm) G L A LS A B LS B 100.2 36 48 10 to 50 75, 100 10 to 50 75, 100 10 to 50 75, 100 63 58 110.2 46 38 18 110.2 46 58 Special cap bolt LY LH 118 43.5 56.5 80 66.5 128 53.5 43 20 128 53.5 66.5 138 53 69 100 79 148 63 50 22 CL 4-LD 148 63 79 LT A + Stroke LS + Stroke X Y X Y LG LZ LX Bore size (mm) L1 LD LG LH LT LX

Table of Contents

Port size A B Port size A B C D E F 28 3/4 1 37 62 89 28 188 28 3/4 31 34 22 137 101 IF300 IF310 31 34 22 137 101 IF 98 98 IF301 IF303 IF311 IF313 1 37 62 89 28 188 98 1 29 39 56 28 155 98 1 29 39 56 28 155 Data Splashproof/Low jetproof type: 320/321/323 G1/2 depth 17 Regular hexagon For wiring width across flats 36 A: Paddle short B: Paddle middle Port size C: Paddle long Dimensions Part

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

C95

A B A B A B A B A B A B MB1 32 0 10.5 1.5 14 9.5 22 4.5 17 2 14.5 0 10.5 1 13.5 40 0 21.5 1.5 25 9.5 33 4.5 28 2 25.5 0 21.5 1 24.5 CA2 50 0 23 2 26.5 10 34.5 5 29.5 2.5 27 0 23 1.5 26 63 0 28 2 31.5 10 39.5 5 34.5 2.5 32 0 28 1.5 31 CS1 80 2.5 28 6 21.5 14 29.5 9 24.5 6.5 22 2.5 28 5.5 31 100 2.5 28 6 31.5 14 39.5 9 34.5 6.5 32 2.2 28 5.5 31 C76 C85 Auto Switch Mounting Height C95 D-F5,

SY

Scale: 25% For external pilot specification (Pitch) P = 24 24.3 22.2 11 18.3 18.8 40.1 39.3 18.8 3/5 R 3/5 R A 4 A 4 A 4 A 4 18 A 4 A 4 3/5 R 3/5 R A 4 A 4 A 4 A 4 A 4 A 4 39.3 63.3 79.8 4-One-touch fitting 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 1 P 1 P B 2 B 2 B 2 B 2 B 2 B 2 [1 (P), 3/5 (R) port] Applicable tube O.D.: 12 2n1-One-touch fitting One-touch fitting [4 (A), 2 (B) port] Applicable tube

Hygienic Design Cylinder Series HY

male thread Width across flats KA MM Width across flats B1 H1 C1 X K L1 A1 + Stroke CJ5 CG5 HY C M Rod End Male Thread (mm) Bore size A1 72 75 MM M6 x 1.0 M8 x 1.25 20 25 B1 10 13 C1 10 12 H1 3.6 5 K 5 5 KA 6 8 L1 22 24 X 12 14 (mm) Bore size A 60 61 H M4 x 0.7 M5 x 0.8 20 25 B 50 51 C 8 10 D 8 10 E 33 40 F 6 6 I 42 50 K 5 5 KA 6 8 L 10 10 M 22 26 N 4.4 5.4 OA M5 x 0.8 M6 x 1.0 Q 14 14 R