CNG

19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG

CNG

19.5 17 45 103 1/8 51.5 16.5 10 14 2 96 10 (12) 25 6.5 9 7 10 6 31 Up to 300 301 to 400 20 to 300 301 to 400 22 19.5 17 45 104 1/8 51.5 20 12 18 2 97 10 (12) 25 6.5 9 7 10 6 38 Up to 300 301 to 450 20 to 300 301 to 450 30 27 19 52 112 1/8 58.5 26 16 25 2 104 10 (13) 26 7 11 7 12 8 47 Up to 300 301 to 800 20 to 300 301 to 800 Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG

SY

750 150 300 450 600 750 150 300 450 600 750 150 300 450 600 750 SY3120 -C6 Cv = 0.23 SY5120 -01 Cv = 0.59 SY7120 -02 Cv = 0.87 SY9120 -03 Cv = 2.1 The speed of CJ2 and CM2 cylinders is controlled by a fixed orifice built into the cylinder.

Valve Single Unit

A: Orange B: Green G: 300 H: 600 (Press and turn for the locking type.)

0.4

Bore size MB, CA2 series Pressure 0.5 MPa Load factor 50% Stroke 500 mm CM2 series Pressure 0.5 MPa Load factor 50% Stroke 300 mm CJ2 series Pressure 0.5 MPa Load factor 50% Stroke 60 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQC1101 800 700 600 500 400 300 200 100 0 VQC2101 It

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

7.5

262.5 275 275 88.3 95.8 103.3 110.8 118.3 125.8 133.3 140.8 148.3 155.8 163.3 170.8 178.3 185.8 193.3 200.8 208.3 215.8 223.3 230.8 238.3 245.8 253.3 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 22 18 20.5 23 19.5 19 Series SJ2000/3000 Dimensions: SJ3000 for Flat Ribbon Cable / PC Wiring SS5J3-60 D U (S, R, RS) 1 2 P J Stations (Pitch) P = 10 23.6 12.8 [External

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

SYJ3000 22--1 Note White White White Material Zinc die cast Resin Resin Resin 6 1 2 3 4 5 7 SY114-22 22 22 22 22 22 Valve Drawings Series SYJ3000 2 Position Single (mm) Grommet (G), (H) : SYJ3120G H -M3 With bracket 53.6(GZ:54.6)[54.6] 28.4 23.5 (Mounting holes) Manual override 33.5 22 3.2 13.2 7.1 16.4 2 10 A 8.2 4 11.5 7 15.7 21.8 (Mounting holes for manifold) 22.3 34.8 [41.3] G :

Integrated Controller

EQY16HA Horizontal/Lead 10 Vertical/Lead 10 20 18 16 14 12 10 8 6 4 2 0 200 100 400 300 500 600 700 800 3.5 3000 mm/s2 3000 mm/s2 3 Work load: W [kg] Work load: W [kg] 2.5 2 5000 mm/s2 1.5 10 mm/s2 1 0.5 0 100 200 300 400 500 600 700 800 900 0 0 Speed: V [mm/s] Speed: V [mm/s] EQY16HB Horizontal/Lead 5 Vertical/Lead 5 7 28 26 24 22 20 18 16 14 12 10 8 6 4 2 0 50 100 150 200 250 300 350 400

Refrigerated Air Dryers Series IDF/IDU

80 300 328 15 485 31 90 Rc 3/4 270 909 Rc 1 960 425 93 258 330 66 470 358 16 620 79 54 300 38 Refrigerant R407C (HFC) High Temperature Air Inlet Series IDUE 22E, 37E, 55E, 75E (Inlet air temperature: 55C, Outlet air pressure dew point: 10C) HAA HAW How to Order AT IDU 22 30 E Nil C L M R T V IDF IDU IDFA Size Air compressor size Note) Size IDFB 22 37 55 75 22 kW 37 kW ID 55 kW 75 kW IDG

Cylinder with Lock Series CNG

7 to 300 45 22 19.5 17 103 1/8 51.5 16.5 10 14 2 25 6.5 10 6 31 301 to 400 96 10 (12) 9 301 to 450 20 to 300 7 to 300 45 22 19.5 17 104 1/8 51.5 20 12 18 2 25 6.5 10 6 38 301 to 450 97 10 (13) 11 301 to 800 20 to 300 7 to 300 52 30 27 19 112 1/8 58.5 26 16 25 2 26 7 12 8 47 301 to 800 104 (mm) Without rod boot With rod boot Bore size (mm) P J K KA MM NA PG PH PL S TA TB TC XA XB l 0.25 ZZ

5 Port Solenoid Valve Series VQZ1000/2000/3000

Body Ported Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA2 Pressure 0.5 MPa Load factor 50% Stroke 500 mm Average speed (mm/s) Series 6 10 16 20 25 32 40 40 50 63 80 100 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation VQZ1121-C6 SJ SY 800 700 600 500 400 300

LJ1H

empty weight deflection 2 2 Lateral empty weight deflection Lateral empty weight deflection 1 1 0.5 0.5 0.2 0.2 0.1 0.1 200 300 500 1000 100 Load point distance mm 200 300 500 1000 100 Load point distance mm 146

Basic type / Direct mount type Series CY3B/CY3R

250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

VQZ1000/2000/3000

83 (Metal seal) 300 (Lead wire length) 55 81 (Rubber seal) Indicator light Indicator light 61 47.5 <52.5> R1 R2 R1 R2 P P 82 Cover diameter 1.5 76 Cross section 0.23 mm2 < >: AC < >: AC 2-7-39 Base Mounted 40 40 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1250 1(R)-G-01 23.4 mounting hole 300 (Lead wire length) 95 47.5 18 7.2 7.2 3 R3 4 2 22 10 SMC SMC

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

App.-22 App. 8 Recommended parameter values for each actuator . App.-31 5 1. FUNCTIONS AND CONFIGURATION 1.

Table of Contents

Port size A B C D E F 28 3/4 31 34 22 143 107 IF320 104 1 37 62 89 28 194 IF321 IF323 104 1 29 39 56 28 161 16-12-9 5 Series IF3 Flow Rate vs.

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

MB1

30 35 35 40 40 19.5 27 32 32 37 37 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot Note) ZZ indicates the dimension for the double rod boot type. l h ZZ Note) Bore size (mm) e f 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to 600 601 to 700 701 to 800 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 501 to

Non-rotating Double Double Power Power Cylinder Cylinder (without Series MGZ Series MGZR non-rotating mechanism)

Vertical upward load Load extended horizontally Load retracted horizontally m m m Maximum speed (mm/s) Maximum speed (mm/s) Maximum speed (mm/s) Up to 300 Up to 500 Up to 700 Up to 300 Up to 500 Up to 700 Up to 300 Up to 450 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) Selection Graph (1) to (3) (Vertical Upward Load) Graph (1) up to 300 mm/s Graph (2) up