Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1 For auto switch mounting position and its mounting height, refer to page 7-6-22.
0 100 200 300 400 500 600 700 0 50 100 150 200 250 0 50 100 150 200 250 Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) Flow rate l/min (ANR) 238 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SLOVENIA SMC Slovenia d.o.o.
Dimensions page 22 (Single unit) 16 17 Series VX21/22/23 For Air /Manifold (Inert gas, Non-leak, Medium vacuum) Solenoid Valve for Manifold/Valve Specifications N.C. N.O.
1/8 4 19.5 to 500 40 35 10 30 22 8 52 104 38 10 14 16 13 14 16.5 63 12 91 52.5 1/8 4 14 27 to 500 50 40 12.5 35 27 11 65 120.5 46.5 14 20 20 14 15.5 19 75 15 104.5 58.5 1/4 5 18 32 to 600 63 45 17.5 35 27 11 75 134.5 56.5 14 20 20 14 16.5 23 90 12 119.5 68 1/4 9 18 32 to 600 80 45 22 40 32 13 95 169 72 22 30 25 20 19 33 102 18 150 81 1/4 11.5 22 37 to 750 100 55 25 40 41 16 114 189 89 22
(mm) AS5000-02 AS420-02 AS4000-03 400 200 200 100 0 0 400 800 CS1 125 MB 100 600 300 Stroke (mm) AS5000-02 AS420-02 200 400 AS4000-04 200 100 0 0 Solenoid valve Silencer Tubing Speed controller Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end (mm/s) Speed at the end (mm/s) Applicable
0.5 1000 1000 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 200 200 100 100 40 32 30 40 50 30 40 50 25 40 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 [Example] 25 10 10 20 5 4 5 4 3 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 1000 1000 Maximum speed: V(mm/s) Maximum speed: V (mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP 200 200
X 1.25 32 22 19.5 47 17 32 49.5 12 13 11 45 6 8 46.5 5.5 6.8 28 199 40 55 22 42.5 150 to 1000 M14 X 1.5 40 24 21 54 22 41 55.5 14 16 12.5 50 8 10 56.2 7 7 30 227 55 75 26.5 51 200 to 1000 NN P S X Y Z ZZ Bore size Stroke range 1 8 1 8 1 8 1 4 20 M20 X 1.5 150 to 700 146 20 8 21 215 M26 X 1.5 25 150 to 700 146 20 8 25 219 M26 X 1.5 32 150 to 1000 159 20 8 25 232 M32 X 2 40 200 to 1000 181
, 250, 320, 400, 500 40 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 100 1000 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Intermediate strokes are available.
19.5 18 5.5 17 12 32 6 38 Up to 200 42.4 2 25 22 19.5 14 5.5 17 10 32 6 31 Up to 200 36.4 2 20 18 15.5 12 5 13 8 27 5 26 Up to 150 30.4 2 N P X ZZ Bore size 30 26 22 20 10 10 10 10 14 10 8 6 11 9 9 8 94 83 77 75 16 13 12 11 5.5, 9.5 counterbore depth 6 M14 x 1.5 M10 x 1.25 M10 x 1.25 M8 x 1.25 37 1/8 55 135 33 1/8 45 117 29 1/8 44 111 27 1/8 38 104 26 21 18 15 32 24 22 18 6.6, 11 counterbore
. 8-17 8.4.9 HRSH250-W-20/40. 8-17 8.5 Pump Capacity . 8-18 8.5.1 HRSH100-A-20/40-, HRSH100-W-20/40. 8-18 8.5.2 HRSH150/200-A-20/40-HRSH150/200/250-W-20/40. 8-18 8.5.3 HRSH250/300-A-20/40-. 8-19 8.5.4 Option T High head pump . 8-19 8.6 Types of Hazard Labels (HRSH***-**-40-**,HRSH***-**-20-S) . 8-20 8.6.1 Positions of danger warning label . 8-21 8.7 Standards . 8-22 8.8 Sample DoC. . 8-23
With end lock (12): MXQ12-R Operating port 2-M5 x 0.8 5 22 22 51 3 Other dimensions are the same as basic style.
30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h Bore size (mm) e f 1 to 50 25 25 25 25 25 25 51 to 100 37.5 37.5 37.5 37.5 37.5 37.5 101 to 150 50 50 50 50 50 50 201 to 300 100 100 100 100 100 100 301 to 400 125 125 125 125 125 125 401 to 500 150 150 150 150 501 to 600 175 175 601 to 700 200 200 701 to 800 73 81 89
VF KQ2P-04 KQ2P-06 KQ2P-08 KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 4 6 8 10 5/32" 1/4" 5/16" 3/8" 16 18 20.5 22 16 18 20.5 22 32 35 39 43 32 35 39 43 6 8 10 12 6 8.5 10 11.5 VP4 VQ 1/2 VQ 4/5 Port plug VVQ1000-58A VQC 1/2 VQC 1/2 The plug is used to block the cylinder port.
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
Bore size (mm) Z DA DB DL DU DC DX DE DR DO DT DS DH Z DD H10 +0.058 0 +0.058 0 +0.070 0 +0.070 0 +0.084 0 +0.084 0 32 40 50 63 80 100 32 40 50 63 80 100 6.6 6.6 9 9 46 52 65 75 95 114 32 32 43 43 64 64 22 22 30 30 45 45 10 10 11.5 11.5 14 14 44 44 60 60 86 86 14 14 20 20 30 30 62 62 81 81 111 111 15 15 18 18 22 22 7 7 8 8 10 10 33 33 45 45 65 65 154 158 182 182 228 228 10 10 14 14 22 22
Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.
Note 2) When the valve is a standard (dust-protected) specification, it is not compatible with 200 or 220 VAC.
25, 50, 75, 100, 125, 150, 200 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 150, 200, 250, 300 3/8 1/2 25, 50, 75, 100, 125, 150, 200 Available Available (40 to 63) 11-/22-CG120 11-/22-CG125 11-/22-CG132 11-/22-CG140 11-/22-CG150 11-/22-CG163 11-/22-CG180 11-/22-CG1100 Non-lube Double acting, Available 20 25 32 40 50 63 80 100 single rod 1/8 25, 50, 75, 100, 125, 1/4 150
0.5MPaP 200 200 40 100 100 32 30 40 50 30 40 50 40 25 20 32 Load weight: m (kg) Load weight: m (kg) 20 20 25 20 10 10 5 4 3 5 4 3 2 2 1 1 0.5 0.5 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) 1000 1000 Maximum speed: V(mm/s) Note: 1kg = 2.2046lb 1MPa = 1450psi 1in = 25.4mm 20