CG1

(mm) Bore (mm) Standard stroke (mm) Long stroke (mm) ZZ TB GB A H J K P TA B1 NA D AL H1 KA S C E I MM F GA Up to 200 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 20 25 32 40 50 63 80 100 106 (114) 111 (119) 113 (121) 130 (139) 150 (162) 150 (162) 182 (196) 182 (196) 11 11 10 (11) 10 (12) 12 (13) 12 (13) 12 18 22 22 30 35 35 40 40 15.5 35 40 40 50 58 58 71 71 M4

Base Mounted Metal Seal/Rubber Seal Series VQ

L dimension 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L dimension No.

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-4A SYJ5000-21-3A Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Round head combination screw M2.5 x 7, Matt nickel plated (with spring washer) Blanking plate SYJ5000-21-1 Blanking plate SYJ5000-21-1 Gasket DXT192-10-15 Gasket DXT192-10-15 Caution Mounting screw tightening torques Applicable manifold base Type SS5YJ5-20 Type SS5YJ5-40 Type SS5YJ5-41 Type SS5YJ5

Electric Slide Tables

] 150 300 100 200 Mey 50 100 m 0 0 0 0.2 0.4 0.6 0.8 1 0 1 2 3 4 5 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350 250 500 L5 200 400 L5 [mm] L5 [mm] L5 [mm] 150 300 Mer m 100 200 50 100 0 0 0 1 2 3 4 5 0 0.2 0.4 0.6 0.8 1 0 0.5 1 1.5 2 2.5 3 Work load m [kg] Work load m [kg] Work load m [kg] 300 600 0 50 100 150 200 250 300 350

SY

SS5Y52, #1 40 Type20 Note) [ ]: Values for AC < >: Values with surge voltage suppressor SY7000: SS5Y7-20Stations Grommet (G) Scale: 35% L1 L2 10 Manual override 4-4.5 (mounting hole) 6-Rc 1/4 (P, EA, EB port) 19 21 52.8 39.8 B B B B B 39.4 60.7 <61.4> [62.3] 134.4 <135.8> [137.6] P EB EA P EA EB 121.4 <122.8> [124.6] 21 21 30 60 20 26 A A A A A 11.5 16.5 (lead wire length) Approx. 300 (Pitch

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 Up to 300 M12 x 1.75 depth 22 For mounting brackets, refer to page 6-5-21.

LEC-OM07605CN

(2) (a) () TDKZCAT3035-1330NEC TOKINESD-SR-250GRFC-13 ZCAT3035-1330(TDK) [] [mm] 131 10MHz100MHz 100MHz500MHz 80 150 3 9 1 301 34 1 (ZCAT3035-1330) (B) () AC ON OFF MC MC SK 20 cm ()CR-50500(OKAYA) C [30%] mm] R AC [V] [F20%] :625V AC50/60Hz 60s -2000V AC 50/60Hz 60s 250 0.5 50 (1/2W) AWG 18 (18.5+2)1 151 3.6 61 61 300 300 481.5 161 (18.5+5) DC 4 2 + RA 11 21 11.

Precautions 1

Stroke range Bore size (mm) 20 25 32 40 70.5 40 3.2 102 25 6.8 4 5 28 8 5 41 13 8 26 13 40 15.5 18 Up to 300 76.5 40 3.2 102 28 6.8 4 5.5 33.5 8 6 45 13 10 32 17 47 19.5 22 Up to 300 78.8 40 3.2 104 28 6.8 4 5.5 37.5 8 6 45 13 12 32 17 47 19.5 22 Up to 300 84.8 55 3.2 134 30 7 4 7 46.5 10 8 50 16 14 41 22 54 21 24 Up to 300 (mm) ZZ Z Y X S MM LZ NN NA N Bore size (mm) 20 25 32 40 131 21 8

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

D D 300 K F C C J J E IN IN E A 2 x Port size 1(IN), 2(OUT) port B1 B B1 B 2 x Port size 1(IN), 2(OUT) port A G G 2 x M thread depth N 2 x M thread depth N CS: Conduit D F K 500 NPT1/2 C J IN E B1 B A 2 x Port size 1(IN), 2(OUT) port G 2 x M thread depth N [mm] Size Port size A B B1 C D E F G M N 20 1/8, 1/4 19 43 21 64.3 36 9.5 18 12.8 M4 6 30 1/4, 3/8 24 45 22.5 80.7 42 12 21 19 M5

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ/H Type ）

PB53] Gain characteristics 1 Hz 300 Hz Resonance of more than 300 Hz is not the target of control. Vibration suppression control 1 Vibration frequency Vibration suppression control 1 (anti-resonance frequency) Resonance frequency [Pr. PB19] [Pr. PB20] Phase -90 deg.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

Basic type / Direct mount type Series CY3B/CY3R

250, 300 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 1000 1500 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 25 3000 32 40 3000 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 50 5000 63 Note 1) Long stroke specification (XB11) applies to the strokes exceeding 2000 mm.

CNA

MXS 50 50 50 40 40 40 80 80 80 100 100 63 63 63 MXQ Load weight m(kg) Load weight m(kg) 50 50 50 40 40 40 50 40 30 50 40 30 MXF 20 20 [Example] MXW 10 10 MXP 5 4 3 5 4 3 MG 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 MGP Max. speed V(mm/s) Max. speed V(mm/s) MGQ Graph m Graph v 0.5MPa P 0.5MPa P MGG 1000 1000 100 100 100 80 80 80 MGC 500 400 300 500 400 300 63 63 63

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

-1A Blank plate ass'y SYJ3000-21-2A Blank plate ass'y SYJ3000-21-4A Blank plate ass'y SYJ3000-21-3A Phillips head screw SYJ3000-33 -2 (M1.7 7, Non-gloss nickel plated) Blank plate SYJ3000-21-1 Blank plate SYJ3000-21-1 Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) Phillips head screw SY100-33-2 (M1.7 7,Non-gloss nickel plated) A A Blank plate SYJ3000-21-1 Manifold gasket

AC Servo Motor Driver (CC-Link Type ）

When resuming operation after deactivating the alarm, make a home position return. 4 21 4.

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

length) Applicable cable O.D. 3.5 to 7 65 31.5 [38.5] 57.5 Max. 10 89.6 16.1 46.2 31.1 M8 x 1 36 18.5 42.6 [49.6] Approx. 300 (Lead wire length) Pg7 80.5 [82.7] 90.5 70.7 [72.9] 79.6 72.2 65.7 49.7 23.5 10.9 23.5 10.9 23.5 10.9 23.5 10.9 21 21 21 21 25 25 25 25 2-3.2 (For mounting) 2-3.2 (For mounting) 28 2-3.2 (For mounting) 2-3.2 (For mounting) 28 28 28 Refer to the page 68 for dimensions

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

(For details, refer to pages 20 and 21.)

Metal Seal/Rubber Seal Series VQ Body Ported

Bore size Series CJ2 Pressure 0.5 MPa Load factor 50% Stroke 60 mm Series CM2 Pressure 0.5 MPa Load factor 50% Stroke 300 mm Series MB, CA1 Pressure 0.5 MPa Load factor 50% Stroke 500 mm 6 10 16 20 25 32 40 40 50 63 80 100 Average speed Series (mm/s) VQC 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation Horizontal actuation SQ VQ0149-C4 VQ0 VQ4 800 700 600 500 400 300 200

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

MY1

Allowable Moment MY1HT/M1 MY1HT/M3 1000 1000 500 500 300 300 Moment (Nm) Moment (Nm) MY1HT63 MY1HT63 100 100 MY1HT50 MY1HT50 (2) (4) (1) (3) 50 50 40 40 30 30 20 20 10 10 100 200 300 400 500 1000 100 200 300 400 500 1000 Piston speed (mm/s) Piston speed (mm/s) 8-11-93 89 Mechanically Jointed Rodless Cylinder High Rigidity/High Precision Guide Type Series MY1HT 50, 63 How to Order MY1HT 50