Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type), Switch Rail: N (w/o Magnet & Switch Rail)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: N (w/o Magnet & Switch Rail)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type), Switch Rail: N (w/o Magnet & Switch Rail)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: w/o Axial Piping, Switch Rail: N (w/o Magnet & Switch Rail)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: CS (Metal Stopper Extension End), Function: P (Axial Piping Type)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: CT (Metal Stopper Retraction End), Function: P (Axial Piping Type)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: P (Axial Piping Type)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 5mm, Adjuster: C (Metal Stopper Both Ends)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: w/o Adjuster, Function: P (Axial Piping Type)

Specification: 11- (Clean Series, Vacuum Type), Bore Size: 4.5 mm, Symmetric Type: Standard, Stroke: 10mm, Adjuster: C (Metal Stopper Both Ends), Function: w/o Axial Piping, Switch Rail: N (w/o Magnet & Switch Rail)

1

Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).

Table of Contents

0 0.036 0 0.043 0 0.043 +0.025 0 +0.025 0 +0.030 0 +0.030 0 +0.036 0 12 14 17 23 31.5 8 10 11 15 21.5 2H9 8h9 6 7 9 11 12 3H9 8h9 4H9 10h9 6H9 12h9 8H9 14h9 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Aluminum High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

Table of Contents

Refer to page 8-11-96.

Free Mount Cylinder

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.