IZx-OMT0049

50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 15 200 to 300 200 to 1400 150 to 2000 100 to 2000 50 to 125 50 to 1100 50 to 2000 50 to 2000

AC Servo Motor Driver (CC-Link Type ）

2 11.

High Vacuum Angle Valve

70 170 69 70 95 87 11 3 100 88 196 96 83 110 114 11 3 117 90 235 131 102 130 134 11 3 154 108 300 112 153 180 190 11 3 200 138 315 Note 1) Dimension E applies when heater option is included.

XL

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

High Vacuum Angle Valve, XL Series

11 11 11 39 63 68 69 96 95 110 Note 1) Dimension E applies when heater option is included.

42

Maximum stations are 18. 18 6 19 7 20 8 21 9 22 10 23 11 24 1.

SV

8 @2 @1 SOL.B Station 11 SOL.A @5 Light/Surge voltage suppressor @1 @6 !

HRX-OM-W002

21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 24 14 34 2B 1B 1A 3A 2A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 2 22

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

11 11 A B D-Y59/Y69/Y7P/Y7PV D-Y7W/Y7WV 7 6 6 7 6 Some switches cannot be mounted.

SFOD-OMT0009CN

No.SFOD-OMT0009CN-B 4 I/O // JXC73/83 Series 1. . 5 2. . 7 2.1 . 7 2.2 . 8 2.3 . 9 3. . 10 3.1 . 10 3.2 . 11 3.3 . 11 3.4 . 11 3.5 . 11 (1) . 11 (2) . 12 (3) . 13 3.6 . 14 (1) . 14 (2) . 17 (3) . 19 3.7 JOG . 20 (1) . 20 (2) . 21 (3) JOG . 22 3.8 . 23 (1) . 23 (2) . 23 (3) . 24 (4) . 24 4. . 25 4.1 . 25 4.2 . 26 4.3 . 27 (1) . 27 (2) DIN . 27 4.4 . 28 (1

SFOD-OMT0010

Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check. 13 3.6 Parameters and Step data . 14 (1) Select the actuator. 14 (2) Setting parameters . 17 (3) Step data settings

VQ4000

SOL.B 23 23 () (+) Gray Red 10 stations SOL.B SOL.A 11 11 () (+) White Red SOL.A SOL.B 24 24 () (+) Black White 11 stations SOL.B SOL.A 12 12 () (+) Yellow Red SOL.A SOL.B 25 25 () (+) White None 12 stations SOL.B COM. 13 13 (+) () Orange Red COM. Note) Negative common specifications Positive common specifications Note) There is no polarity. It can also be used as a negative common.

Profile Design ISO/VDMA Air Cylinder Series CP95

11 95 90 50 100 113 60 89 41 5 25 10 55 20 20 11 12 115 110 60 Mounting type E Bore d2 CK S5 K1 K2 l3 G1 l1 G2 EM G3 CA H6 R1 32 11 10 6.6 38 51 10 21 7 18 26 31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70

JXCx-OMU0026

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, setting date and time, Alarm and error check . 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Setting date

HRX-OM-X071

9.4.1 HRR050-A-20. 9-11 9.4.2 HRR050-W-20. 9-11 9.4.3 HRR050-A-40. 9-12 9.4.4 HRR050-W-40. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR050-A/W-20. 9-13 9.5.2 HRR050-A/W-40. 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR050-A/W-20. 9-14 9.6.2 HRR050-A/W-40. 9-14 9.7 Required facility water flow (for water-cooled type) . 9-15 9.7.1 HRR050-W-20. 9-15 9.7.2 HRR050-W-40. 9-15 9.8 Types of Hazard Labels

JXCx-OMT0001CN

PLC 11.

JXCx-OMT0002

Procedures to Trial run . 10 3.1 Checking the contents of the package . 10 3.2 Mounting the controller . 11 3.3 Install the setting software and the driver . 11 3.4 Wiring and connection . 11 3.5 Power supply, Start-up of controller setting software, and Alarm check 11 (1) Supplying power . 11 (2) Start-up of controller setting software . 12 (3) Alarm check . 13 3.6 Parameters and Step data

Mechanically Jointed Rodless Cylinders

11 14 Applicable cylinder Model Mounting directionq C1 D1 F1 K1 16 19 20 Applicable cylinder Model Mounting direction q C1 D1 F1 K1 10 10.5 11 11 Q1 B1 A1 Q1 B1 A1 MY340 MY350 MY363 MY316 MY320 MY325 MY332 MYAJ16 MYAJ20 MYAJ25 MYAJ32 MYAJ40 MYAJ50 MYAJ63 29 34 38.5 47 68 81 90 106 34 40.5 45 53 18 20 24 30 88 102 112 128 5.5 6 6.5 6.5 56 69 86 130 156 186 65 78 93 32 40 50 162 192 226 9.5

Ionizer Gun

1200 1350 1500 Distance [mm] Distance [mm] 5) 6) Supply pressure 0.4 MPa Consumed flow rate 316 L/min (ANR) Supply pressure 0.5 MPa Consumed flow rate 390 L/min (ANR) 200 200 150 150 2s 1.5s 100 100 50 50 1.5s 1s 0.5s 1s 0.5s 0 0 -50 -50 -100 -100 -150 -150 -200 -200 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 Distance [mm] Distance [mm] 7)

LG1H

1050 1200 1060 500 360 500 350 600 460 600 450 Dimensions inside ( ) are for a 100 mm stroke.