Basic type / Direct mount type Series CY3B/CY3R

1 0 1 2 3 4 5 6 10 7 8 9 10 11 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CY3R20 CY3R63 1000 200 Allowable driving force Fn (N) Allowable driving force Fn (N) 100 500 400 50 300 30 200 100 10 20 30 40 50 Usable range 5 Usable range 1 0 1 2 3 4 5 6 10 7 8 9 10 11 12 13 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

33.5 105 to 120 95 125 to 200 70 43.5 205 to 300 85 51 25 M6 x 1.0 12 80 18 30 95 6.8 40 40 28.5 75 20 to 35 64 5 6 34 8.5 40 to 100 50 33.5 105 to 120 105 125 to 200 70 43.5 205 to 300 85 51 32 M6 x 1.0 12 95 28 40 117 7.3 60 Size Without lock With lock VA VB VC VA VB VC 25 115.5 82.5 11 160.5 127.5 11 32 120 80 14 160 120 14 756 Electric Actuator/Guide Rod Type LEYG Series AC Servo Motor

CA2

Refer to pages 6-8-7 to 11. -X 20Data 6-8-25 26 Air Cylinder: Non-rotating Rod Type Double Acting, Double Rod Series CA2KW 40, 50, 63 How to Order Without auto switch L 40 200 CA2KW L 200 40 Y7BW Number of auto switches CDA2KW With auto switch Nil S 3 n 2 pcs. 1 pc. 3 pcs. n pcs.

Base Mounted Metal Seal/Rubber Seal Series VQ

AXT661-34A-, for 200/220 VAC.

Series SV

100 70% 50% 30% 10% 0 400 MB 40 300 Stroke mm AS2201F -02-08 AS2200-02 200 100 0 ANA1 -C10 T0806 400 MB 50 300 Stroke mm AS3201F -02-08 AS3000-02 200 100 0 400 MB 63 300 Stroke mm AS4000-03 200 100 0 Solenoid valve Silencer Tubing Speed controller 200 300 400 500 600 700 800 900 1000 1100 1200 Speed at the end mm/s Applicable related components For details regarding different conditions,

CL

6 6 8 15 15 15 15 35 40 40 50 178 193 196 221 38 41 41 41 154 169 23 25 28.5 33 30 30 35 35 11 11 11 12 16 17 17 17 11 11 M5 X 0.8 M6 X 0.75 M8 X 1 M10 X 1.25 55 62 62 70 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

24

speed of 200 mm/s.

MGP

120 201 to 300st 200 200 301 to 400st 300 300 20 to 39st 29 29 40 to 124st 39 39 125 to 200st 77 77 201 to 300st 117 117 301 to 400st 167 167 20 25 20 to 400 WA WB Bore size (mm) Standard stroke (mm) 25 to 49st 24 24 24 28 28 48 50 to 124st 48 48 48 52 52 72 125 to 200st 124 124 124 128 128 148 201 to 300st 200 200 200 200 200 220 301 to 400st 300 300 300 300 300 320 25 to 49st 33 34 36 38

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

MLGP

78 14 19 19 6.5 6.8 7.5 27 32 39 25, 50, 75, 100, 125, 150 175, 200, 250, 300, 350 M8 11 12 39.5 107 14 44 M10 13.5 16.5 46 115 16.5 49 WA Bore size (mm) ML S T U VA OA OB OL P PA PB PW Q R VB MM NN st 25 25 < st 100 100 < st 200 200 < st 300 300 < st 350 38 47 55 30 40 50 13 9 14 18 104 44 60 70 72 92 110 40 50 63 1/8 1/4 1/4 20 22 22 6.6 8.6 8.6 124 124 128 11 14 14 200 200 200 24

Electric Actuators

T-slot 2 dimensions Compatible Motors Switch Internal Circuit D-Y7GL Motor output (W) Motor model Brake Manufacturer Power supply voltage (VAC) Motor specification symbol Controller driver model + Brown lead wire 100/110 200/220 100 200 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 100/115 200/230 LC1-1B1H1Without brake (Horizontal specification) Main circuit

High Vacuum Angle Valve

52 68 11 88 196 100 3 87 95 70 69 11 90 235 117 3 114 110 83 96 11 108 299 154 3 134 130 102 131 11 138 315 200 3 190 180 153 112 Note 1) Dimension E applies when heater option is included.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

Stations n L1 L2 L3 L4 3 69 56 32 24 6 117 104 80 72 8 149 136 112 104 10 181 168 144 136 4 85 72 48 40 5 101 88 64 56 7 133 120 96 88 9 165 152 128 120 11 197 184 160 152 12 213 200 176 168 13 229 216 192 184 14 245 232 208 200 15 261 248 224 216 16 277 264 240 232 17 293 280 256 248 18 309 296 272 264 19 325 312 288 280 20 Stations 341 328 304 296 2 Stations 53 40 16 8 680 Manifold specifications

CM2

16 14 15 10 24 88 38 39 11 18 21 22 8 46.5 7 M14 x 1.5 21.5 42.5 M32 x 2 177 188 1/4 32 With Rod Boot l Z Symbol h B3 e f Stroke Bore size (mm) 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 1 to 50 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 20 36 17 30 68 81 93 106 131

AC Servo Motor Driver (CC-Link Type ）

4 11.

JXCx-OMU0004

900 50 900 25 900 8 150 1000 75 1000 38 1000 9 200 1200 100 1200 50 1200 10 250 1400 125 1400 63 1400 11 300 1600 150 1600 75 1600 12 350 1800 175 1800 88 1800 13 400 2000 200 2000 100 2000 14 450 2500 225 2500 113 2500 15 500 3000 250 3000 125 3000 LEY32A LEYG32A LEY32B LEYG32B LEY25C LEYG32C 2] 2] 2] [mm/s] [mm/s [mm/s] [mm/s [mm/s] [mm/s 0 24 200 12 200 6 200 1 32 300 19 300 15 300 2

MG

12 M10 x 1.5 22 M10 x 1.5 8.6 14 44 9 20 1/4 16 9 12 21.5 64 47 14 40 11 148 M8 32 32 46 77 16.5 M10 x 1.5 22 M10 x 1.5 8.6 14 49 9 20 1/4 16 14 12 28 78 55 16.5 50 13.5 162 M10 39 39 58 WA R S T U VA VB WB Bore size (mm) X XA XB XC XL YY YL Z Over 25 st to 100 st Over 300 st Over 100 st to 200 st 200 Over 200 st to 300 st 33 Over 25 st to 100 st 83 Over 100 st to 200 st 121 Over 200 st

Programless controller Step motor (servo 24 VDC)

900 200 900 100 900 8 150 1000 75 1000 300 1000 200 1000 9 200 1200 100 1200 400 1200 250 1200 10 250 1400 125 1400 500 1400 300 1400 11 300 1600 150 1600 600 1600 400 1600 12 350 1800 175 1800 700 1800 500 1800 13 400 2000 200 2000 800 2000 540 2000 14 450 2500 225 2500 900 2500 600 2500 15 700 3000 360 3000 1100 3000 750 3000 54 No.

Combination Cylinder

25 28.5 33 35 40 40 50 178 193 196 221 30 30 35 35 16 17 17 17 55 62 62 70 198 215 218 241 11 11 11 12 to 200 to 300 to 300 to 300 0.25 Stroke 105.5 Long stroke/Refer to p.3.1-28 and 3.1-29 for mounting dimensions except table below.

17

50,63 22 (10) 22 (10) 40 40 40 50,63 40 40 40 32 32 32 32 32 32 11 (5) 10 20 30 50 40 51 100 101 300 200 11 (5) 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80/100, MGPA80/100 MGPL80/100, MGPA80/100 110 (50) 110 (50) 100 100 100 80 80 80 Load mass m lbs (kg) Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29