4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

actuation VZS VZ314--01 (Piping: 4 x 1 m) VFS VS4 VQ7 Speed controller/Silencer AS2301F-01-04/AN110-01 EVS 800 700 600 500 400 300 200 100 Perpendicular, upward actuation Horizontal actuation VFN VZ314--01 (Piping: 6 x 1 m) Speed controller/Silencer AS3301F-02-06/AN110-01 Bore size Series CA1 Pressure 0.5 MPa Load factor 50% Stroke 400 mm Average speed (mm/s) Series 100 40 50 63 80 800 700

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

0 -0.043 0 -0.043 2H9 6 7 9 11 12 MRHQ 3H9 8h9 4H9 10h9 6H9 12h9 MA 8H9 14h9 DTA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 SC 9 9 12 14 19 SB 8 9.5 9.5 11 11 R 44 53 62 76 95 SA 4.5 5.5 5.5 6.6 6.6 Y 6 8 7 7.5 8 O 4.5 4.5 5 5.5 6 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Q 11 12 14 17 20 TB 8 8 10 10 12 UA M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 M6 x 1 UB 6 7.5 10 9 12 VA VB 3 4 4 5 6 WA WB 2 2 2

Step Motor Controller

LECSB Positioning unit QD75D (Manufactured by Mitsubishi Electric) 24 VDC Note 2) Note 4) CN1 Note 4) 21 DICOM CN1 Failure Note 3) DICOM 20 48 ALM RA1 CLEARCOM 14 DOCOM 46 Zero speed detection 23 ZSP RA2 CLEAR 13 CR 41 Torque limiting RDYCOM 12 25 TLC RA3 Positioning completion READY 11 RD 49 24 INP RA4 PULSE F+ 15 PP 10 PULSE F 16 PG 11 10 m or less NP 35 17 PULSE R+ S/S NG 36 4 LA 18 PULSE

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

15

20 0.01 CY1H 100 400 250 0 200 400 600 800 1000 1200 1400 1600 Stroke [mm] Piston speed [mm/s] CY1F M2 M1, M3 [Graph 13] Allowable moment [Graph 11] Allowable moment CYP 200 200 100 100 Moment M1, M3 [Nm] Moment M2 [Nm] D CY1S25-Z CY1S25-Z E F D10 10 -X 5 5 100 400 250 100 400 350 Technical Data Piston speed [mm/s] Piston speed [mm/s] 1495 CY1S Series Calculation of Guide Load Factor Calculation

C85

-25 6-11-25 25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

C85

-25 6-11-25 Series C85 Construction [First angle projection] Single acting, Single rod Spring return: C858 to 16-S (Disassembly is not possible.) !

CATALOG VC10

Body Brass Body S. S.

CXS

Stroke (mm) up to 10 up to 30 up to 75 up to 100 up to 50 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 up to 100 up to 300 up to 400 More than 400 Max. speed (mm/s) 7 8 9 6 10 15 Selection graph 10 11 12 13 14 15 17 16 20 25 32 The maximum speeds for 10 to 32

1

Series CG1 NCM Series CG1 Stopper bracket Stopper Width across flats MA Series CM2 Bore size (mm) 20 25 32 40 50 63 MH 38 41 41 47 60 60 MI 16.2 19.7 19.7 27.8 37 37 ML 18 18 18 22 28 28 MT 9 11 11 11 11 13 S 77 77 79 87 102 102 ZZ 150 158 160 184 220 220 MA 14 17 17 24 32 32 NCA D-X JIS Symbol Series CG1 S + Stroke Stroke MH + Stroke + Adjustment ML + Adjustment (A) B Series CA2 20ZZ + 2

NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

NCA1

/16 2.59 4 1/4 2.72 2 5/8 6 5/64 400 (4") 6 5/64 5/8 1 1/4 3/8-24 3 3/4 0 1/2 5/8 1.57 1.18 3.32 5/8 1/2-13 2 1/16 1 5/8 2 11/16 2.59 4 1/4 2.72 2 5/8 1 3/8 1-14 1 5/8 4.7 2 1 1/2 6-15-25 25 Series NCA1 Oversized Rod-Foot Style: NCA1L (XB5) ZA + Stroke XA + Stroke P + Stroke E Y A WF 2-EE (NPTF) KK C AA EA B MM BA AE AT AH D across flats G 4-DD J AL AO S 6-AB (Hole) LF + Stroke AO AL FA SA

TABLE OF CONTENTS

Body Brass Body S. S.

MNB

/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 1000 1000 100 80 500 400 300 500 400 300 63 63 100 80 200 200 50 40 50 100 100 63 Load weight: m(kg) Load weight: m(kg) 32 50 40 50 40 30 50 40 30 32 20 20 [Example] 10 10 5 4 3 5 4 3 2 2 1 100 200 300 400 500 1000 1 100 200 300 400 500 1000 Maximum speed: V(mm /s) Maximum speed: V(mm/s) Graph 7 Graph 4 0.5MPaP 0.5MPaP

CNG

Graph (1) 10 500 st 600 st 700 st 700 st 500 st 600 st 400 st 400 st 4 5 300 st 300 st 3 200 st 200 st Load movement time: t (S) 2 100 st [Example] Example) 1 0.4 0.5 0.3 V' 0.2 300 0.1 V W 100 200 1000 400 500 Maximum speed: V (mm/s) Cylinder stroke Movement distance of load Step (2) Find the bore size.

XL

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

High Vacuum Angle Valve, XL Series

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

JXCx-OMT0023

11 11.

48

T = T1 + T2 + T3 + T4 T1: Acceleration time [s] Time until reaching the set speed T2: Constant speed time [s] Time while the actuator is operating at a constant speed T3: Deceleration time [s] Time from the beginning of the constant speed operation to stop T4: Settling time [s] Time until in position is completed = 0.1 + 1.57 + 0.1 + 0.3 = 2.07 [s] 500 500 500 mm or less T4 = 0.3 [s] 400

Table of Contents

P . 15-11-3 15-9-2 2 Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS How to Order 2 2 0 01 06 S AS 1F Nil Option Body size 1 2 3 4 M3, M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard None With seal Hexagonal lock nut Electroless nickel plated S K N If more than one option is required, write option part numbers in the order of S, K, N.