Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

Vacuum Pad

across flat 14 (Hexagon) E 11 E 11 D E 11 3 3 3 3 3 3 M10 x 1 M10 x 1 M10 x 1 Q Q Q D D (F) (F) (F) P P P Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) S S S 31 8 31 8 31 14.9 14.9 14.9 R R R 6 6 6 M5 x 0.8 M5 x 0.8 M5 x 0.8 8 Y Y Y A A A C a a a C C b B 20 30 21 31 Dimensions Model Dimensions Model Dimensions a 3.5 4 5 6 A 4.5 5 6 7 b 7 B 8

LEC-OM069xx

OFFSET Device Type/Name DEVICE_ CODE 00 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 0F 10 11 12 Model 00H S G D 1 1 2 2 2 3 4 4 5 6 6 6 6 6 6 00 DRIVER Ver. 02H Software version Model 20H S G M 7 7 8 8 9 10 11 12 13 00 Servomotor Ver. Encoder software version 12H Model 30H External Encoder Software version 32H Ver.

Stability of suction position,

0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-50UM ZP3E-125UM 4 8 Displacement [mm] Displacement [mm] 3 6 2 4 N, S, U, F, CL N, S, U, F, CL 1 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] 0 0 10 20 30 40 50 60 70 80 Vacuum pressure [kPa] ZP3E-63UM 6 Displacement [mm] 4 N, S, U, F, CL 2 0 0 10 20 30 40 50 60 70 80 Vacuum pressure

Proposals for Energy Saving

S S Effective area ratio 3.2 : 1 Pressure loss: Small Filter regulator S coupler Coil tube 2 Nozzle 2 Upstream side S: 9 Nozzle side S: 2.8 Effective area (mm) Effective area ratio Nozzle size (mm) Number of nozzles Supply pressure S: S = 3.2 : 1 2 1 0.5MPa 0.35MPa 0.33MPa Regulator pressure Outlet pressure Effect of Energy Saving Improvement 50 to 75% Reduction 50 to 75% Reduction 100%

LEC-OM02704CN

20 50 20 9 15 9 (2) (a) PB06 GD2 4.0 PB07 PG1 100 rad/s PB08 PG2 120 rad/s PB09 VG2 3000 rad/s PB10 VIC 20 ms PB29 GD2B 10.0 PB30 PG2B 84 rad/s PB31 VG2B 4000 rad/s PB32 VICB 50 ms PB26 CDP 0003 () PB27 CDS 50 pulse PB28 CDT 100 ms (b) CDS [pulse] 0 pulse CDS CDT100ms 100 4.0 10.0 4.0 10.0 120 84 120 84 3000 4000 3000 4000 20 50 20 50 9 16 10 10 .2 10.1

42

Port size 02 1/4 03 3/8 Porting specifications Nil Side ported B Bottom ported Note) Note) For bottom ported, port size is 1/4 only. 451 VQ4000 Series Dimensions: Plug-in Type Conduit terminal 2-position single: VQ410 -l 0 1 2 156 50 23.5 23.5 2 50 90 106 156 Indicator light 11 (12.5) 11 (12.5) 5 3 4(A) port 2(B) port 9 11 4 2 48 38 1 10.5 A B 38 24.6 48 4 2 A 13.5 13.5 2 x 5.6 Mounting hole

Table of Contents

N-04 N-06 L-04 L-06 S-04 S-06 LL-04 LL-06 4 6 N-08 8 N-10 10 N-12 12 4 6 L-08 8 L-10 10 L-12 12 4 6 S-08 8 S-10 10 S-12 12 4 6 LL-08 8 LL-10 10 LL-12 12 Precautions Be sure to read before handling.

smcmaintenancepartslist

6 Single acting, spring return Piston seal Rod seal NBR 12 16 20 25 32 40 50 CQ2B12-S-PS CQ2B16-S-PS CQ2B20-S-PS CQ2B25-S-PS CQ2B32-S-PS CQ2B40-S-PS CQ2B50-S-PS Gasket Left no. !4. Seal kit includes !4. Order the seal kit, based on each bore size. Since the seal kit does not include a grease pack, order it separately.

AC Servo Motor Driver (CC-Link Type ）

When you carry out adhesion mounting of the driver, make circumference temperature into 0 to 45 (32 to 113 ), or use it at 75% or smaller effective load ratio. 1000 1000 During operation During operation 100 100 Operation time[s] Operation time[s] During servo lock During servo lock 10 10 1 1 0.1 0.1 0 50 150 200 250 300 100 0 50 150 200 250 300 100 (Note) Load ratio [%] (Note) Load ratio

XL

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Electric Actuators

s) Time (s) LXFH5BD LXPB2BD/LXSH2BD LXPB5BD/LXSH5BD 80 80 80 Ultimate speed (mm/s) Ultimate speed (mm/s) Transfer load Transfer load 10kg 10kg Transfer load 50 50 50 3kg 6kg 6kg 2kg 3kg 3kg 1kg 0kg 0kg 0kg 0.01 0.02 0.03 0.04 0.01 0.02 0.03 0 0 0.01 0.02 0.03 0 Time (s) Time (s) Time (s) Acceleration Time Guide/Ball Screw Specification (Vertical) Caution LXPB2BC/LXSH2BC LXPB5BC/LXSH5BC Transfer

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

(mm) With rod boot Bore size (mm) Stroke range (mm) l J B BB C F GA GB M NA NB P R S T CD LH LT LX LW X1 Y1 SS Z e f Q 32 M10 x 1.25 58 62 38 16 32 15 11 37 31 3/8 39 141 11 11 40 8 40 30 32 13 203 205 52 21.5 15 25 to 1400 1/3.5 stroke 40 M10 x 1.25 65 69 45 12 32 15 11 36 30 3/8 42 141 11 11 43 8 46 33 32 13 203 205 52 12 15 25 to 1400 50 M10 x 1.25 76 85 52 15 40 19 11 43 35 1/2 46 155

CNA

to 1000 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) l KA M MM N P Q H S T V W ZZ d e f h ZZ K 40 50 63 80 100 40 50 63 80 100 1/4 stroke 6 14 11 M14 x 1.5 27 1/4 37 to 39.5 51 153 37.5 9 8 215 52 43 15 59 223 20 to 800 7 18 11 M18 x 1.5 30 3/8 42 to 44.5 58 168 44 11 0 237 58 52 15 66 245 1/4 stroke 20 to 1000 7 18 14 M18 x 1.5 31 3/8 50 to 51.5 58 182 52.5 12 0 254 58

CNA

30 52 14 144 21 98 22 25 20 19 16 M12 x 1.75 11 26 Up to 750 With Rod Boot Bore size (mm) Bore size (mm) Stroke range (mm) e l ZZ M MM N P Q H S T V W ZZ f h 40 50 63 80 100 40 50 63 80 100 11 27 1/4 37 to 39.5 51 153 37.5 9 8 215 20 to 500 43 11.2 59 1/4 stroke 223 M14 x 1.5 1/4 stroke 11 30 3/8 42 to 44.5 58 168 44 11 0 237 20 to 600 52 11.2 66 245 M18 x 1.5 14 31 3/8 50 to 51.5 58 182

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

ratio: 75% LEC S 5000 5000 Duty ratio: 50% LEC SS-T The value of 50% or less is the same as duty ratio 50% 0 1 2 3 4 5 0 0 0 2.5 5 7.5 10 LEC Y LEC Y Work load [kg] Work load [kg] Motorless LAT LEJS40B LEJS63B LZ 20 20 Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] LC3F2 Duty ratio: 50% Duty ratio: 25% 15000 15000 10 10 Duty ratio: 100% Duty ratio: 100%

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

Port size: 1/8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)