AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

ratio: 75% LEC S 5000 5000 Duty ratio: 50% LEC SS-T The value of 50% or less is the same as duty ratio 50% 0 1 2 3 4 5 0 0 0 2.5 5 7.5 10 LEC Y LEC Y Work load [kg] Work load [kg] Motorless LAT LEJS40B LEJS63B LZ 20 20 Duty ratio: 50% Acceleration/Deceleration [mm/s2] Acceleration/Deceleration [mm/s2] LC3F2 Duty ratio: 50% Duty ratio: 25% 15000 15000 10 10 Duty ratio: 100% Duty ratio: 100%

High Vacuum Angle Valve, XL Series

-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.

Table of Contents

Port size: 1/8, 1/4 50 173 30 45 50 11 Drain Discharge With float type auto-drain (N.C.)

Series SV

050 Cable length (l) Connector specifications 1m (3.24ft) 5m (16.2ft) Straight Angle 010 050 S A M12 M12 6 6 28.3 18 30 5 50 l 31.3 14.9 30 5 34 50 48 l 5 1 2 1 2 5 4 3 4 3 Socket connector pin arrangement Socket connector pin arrangement Terminal no.

Aluminum High Vacuum Angle Valve

VAC, 50/60 Hz XLA 3 110 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz U XL XL 5 24 VDC 6 12 VDC S type: Not available for AC.

Sine Rodless Cylinder Series REA/REB

8 17 13 36 15 M26 x 1.5 Rc 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 13 46 19 M32 x 2.0 P TN S W X ZZ R T Model Nil TF REA25 REA32 REA40 Rc 1/8 NPT 1/8 111 50 30 137 8 17 Rc 1/8 G1/8 NPT 1/8 124 50 40 156 8 17 Rc 1/4 NPT 1/4 150 60 40 182 10 19 REA50/63 14 2 x P L NA 33 14 E(h8) E(h8) I X D REA REB 4 x TC Effective thread depth R 14 REC 8 x Q Effective thread depth R 14 22 23 25 K W

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

VAC 50/60Hz 200 VAC 50/60Hz 110 VAC 50/60Hz [115 VAC 50/60Hz] 220 VAC 50/60Hz [230 VAC 50/60Hz] Standard With power saving circuit <24 and 12 VDC only> Nil Light/surge voltage suppressor T Nil S Z Without light/surge voltage suppressor With surge voltage suppressor (Non-polar type) Power saving circuit is not available in the case of "W" type.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Rated voltage VFN M5 x 0.8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Light/Surge voltage suppressor 4 Nil None Z 5 6 24 VDC 12 VDC S With light/surge voltage suppressor 9 With surge voltage suppressor Other Option Not available for GZ, HZ and DOZ Electrical entry Grommet L plug connector M plug connector DIN terminal G: Lead wire length 300 mm L:

MGP

or less V = 400mm/s 1 0 Over 30mm stroke V = 400mm/s 10 1 5 0.5 25 25 20 Load weight m (kg) 20 Load weight m (kg) 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance l (mm) Eccentric distance l (mm) MGPL32 to 100 1 1 50mm stroke or less V = 400mm/s 1 2 Over 50mm stroke V = 400mm/s 100 100 100 50 50 80 100 80 63 10 63 Load weight m (kg) Load weight m (kg) 50 5 10 50 40

2/3 Port Valve

Temp. rise C (Rated voltage) 5 50 3.5 45 6 55 7.5 55 6 45 8.5 60 11 60 9.5 50 11.5 60 Power consumption W (Holding) Apparent power VA Frequency Hz Model Power Inrush Holding 50 20 11 60 17 7 50 42 18 60 37 12 50 55 22 60 47 18 Application Example AC VX31 Style N.C. (VX31) N.O. (VX31) C.O.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

Surge voltage suppressor (S) is available only on grommet. 2 Option Coil rated voltage VQ5 Electrical entry: VFR41 3 2 1 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 3 position closed center VQC E: Grommet terminal D: DIN terminal 110 V to 120 VAC, 50/60 Hz 4 220 VAC, 50/60 Hz 3 VQZ B : Locking type B (Tool required) 5 6 24 VDC 12 VDC 7 SQ 240 VAC, 50/60 Hz 9 Other 3 position exhaust center

CNA

144 15 17 17 21 21 52 56.5 67 83 98 16 20 20 20 22 12 13 18 23 25 12 15 12 18 20 10 12 15 17 19 8 11 11 13 16 M8 X 1.25 M8 X 1.25 M10 X 1.25 M12 X 1.75 M12 X 1.75 6 7 7 11 11 14 18 18 22 26 With rod boot (mm) (mm) ZZ (One) ZZ (Both) Bore (mm) 40 50 63 80 100 Bore (mm) 40 50 63 80 100 Stroke range (mm) e M MM N P Q H S T V W ZZ f h l 37 to 39.5 42 to 44.5 50 to 51.5 59.5 to 62.5 66.5 to 69.5

0.4

Linearity (77F) 0.15% F .S. Repeatability (77F) 0.6% F .S. 0.5% F .S.

C85

32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105

C85

32 17 6 20 16 11 44 24 8 28 20 8 22 22 10 G 1/8 M22 x 1.5 10.2 M10 x 1.25 30 17 12 15 15 11 32 20 8 22 16 11 50 28 8 33.5 25 (mm) S XC ZZ Z Bore 1 to 50 1 to 50 1 to 50 1 to 50 101 to 150 101 to 150 101 to 150 101 to 150 51 to 100 51 to 100 51 to 100 51 to 100 8 46(52){56(62)} 64(70){74(80)} 76(82){86(92)} 86(92){96(102)} 10 46(50){56(60)} 64(68){74(78)} 76(80){86(90)} 86(90){96(100)} 105

24

less, V = 400 mm/s (10) Over 30 stroke, V = 400 mm/s 10 1 5 0.5 25 25 20 Load mass m [kg] Load mass m [kg] 20 16 1 0.1 16 12 12 0.01 10 50 100 200 0.1 10 50 100 200 Eccentric distance L [mm] Eccentric distance L [mm] MGPL32 to 100, MGPA32 to 100 (11) 50 stroke or less, V = 400 mm/s (12) Over 50 stroke, V = 400 mm/s 100 100 100 50 50 80 100 80 63 10 63 Load mass m [kg] Load mass m [kg] 50

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

7.5 16.5 24.5 11 11 20.5 (P, EA, EB port) 1/8 41 L plug connector (L): 10-SY3140(R)-L-01 M plug connector (M): 10-SY3140(R)-M-01 M8 connector (WO): 10-SY3140(R)-WO-01 (Lead wire length) Approx. 300 38.1 53.5 [60.5] 58 M8 x 1 40.5 (Lead wire length) Approx. 300 64.6 [71.6] 76.8 [79] 62 67 [69.2] 68.5 75.9 20.5 2 11 11 20.5 2 11 2 11 11 11 20.5 7.5 16.5 24.5 7.5 16.5 7.5 16.5 24.5 24.5 50

REA/REB

x 8 15 30 13 M26 x 1.5 Rc 1/8 60 35 16 9 22 40 15 80 M6 x 1.0 x 8 17 36 15 M26 x 1.5 Rc 1/4 70 43 16 11 29 50 16 92 M6 x 1.0 x 10 21 46 19 M32 x 2.0 S W X ZZ R T Model REA25 REA32 REA40 111 50 30 137 8 17 124 50 40 156 8 17 High Precision Guide Type REAH 150 60 40 182 10 19 REA 50, 63 14 2 -Rc 1/4 L 0 -0.2 NA 33 14 Max.

V

I O N S S E R I E S AQ240F/340F W I T H S I L E N C E R S Y M B O L S W I T H B U I LTI N S I L E N C E R S Y M B O L S W I T H O U T S I L E N C E R H O W T O O R D E R S E R I E S AQ240F/340F AQ 40 Models O.D size d D1 D2 D3 L1 L2 L3 M1 Weight AQ240F-04-00 4 9.5 8.9 10 39.3 5 14.1 13 4.2 B O D Y S I Z E AQ240F-06-00 6 11.5 11 10 43.9 6 15.2 14 5.2 AQ340F-06-00 6 11.5 11 11.8 45.2 6.3 20

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

12 10 11 11 12 11 12 6.3 6.8 12 12 12 12 10 11 10 10 11 11 6.5 6.8 0.18 0.15 0.18 0.15 0.18 0.18 0.16 0.15 0.22 0.22 2 position 3 position 40 or less 0.63 1,000 Single VFS4100 1 2 3 8 15 or less 0.75 Double VFS4210 VFS4200 1,200 1 2 3 8 1 2 3 8 1 2 3 8 1 2 Closed center 50 or less 0.82 VFS4310 600 VFS4300 Exhaust center 50 or less 0.82 VFS4410 VFS4400 600 Pressure center 50 or less 0.82