Vacuum Pad

5 x 30 6 x 30 8 x 30 Pad type Applicable tube O.D.

AC

17 25 35 37.5 40.5 48 48 25 40 48 53 70 70 90 95 26 56.8 60.8 60.8 65.5 69.5 75.5 78 25 30 30 41 50 50 70 70 28 34 34 40 54 54 66 66 30 44 44 46 54 56 65.8 65.8 4.5 5.4 5.4 6.5 8.5 8.5 11 11 6.5 15.4 15.4 8 10.5 10.5 13 13 40 55 55 53 70 70 90 90 2 2.3 2.3 2.3 2.3 2.3 3.2 3.2 20.5 33.5 33.5 42.5 52.5 52.5 52.5 19 25 25 32.5 36 38 44 AR1000 AR2000 AR2500 AR3000 AR4000 AR4000-06 AR5000 AR6000

C85

62 126 6 13 115 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 32 11 65 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

JXCx-OMT0023

Type A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 clamp B: 1pc. B 45 11 21 11.

C85

126 6 115 13 11 8.5 95 20 44 24 8 16 12 22 17 8 8 11.5(13) 15(17) 15(17) 20 28 8 25 M22 x 1.5 G 1/8 M10 x 1.25 30 65 32 11 137 8 126 17 11 104 22 50 28 10 16 12 22 20 8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

Table of Contents

(Refer to page 14-19-11.)

Modular F.R.L. Units

33.8 3 50 40 9 18 5 48 AC50B-B 3/4, 1 1/8 186.2 220.1 43 93.1 30 43.3 3.2 70 50 11 20 6 60 AC55B-B 1 1/8 191.2 234.1 43 98.1 30 43.3 3.2 70 50 11 20 6 60 AC60B-B 1 1/8 196.2 234.1 46 98.1 30 43.3 3.2 70 50 11 20 6 60 Optional specifications Semi-standard specifications Metal bowl with level gauge With drain guide Metal bowl with drain guide With barb fitting With auto drain Metal

KQ2

30 30 31 5 14 6 14 15 13 15 25 24 30 46 40 48 68 85 12.7 15.5 2.3 2.5 2.3 2.8 3.5 2.3 11 13.6 11 13.6 13.6 12 13.6 18.5 14.6 18 19.4 19 19.4 20.4 23.6 9.8 13.4 9.8 13.4 13.4 17.2 21.5 20.5 22 23 10-32 UNF 8 1 8 1 8 10-32 UNF 5 32 10.4 8 16 1 8 3 16 1 8 11.4 8 16.5 Applicable tubing 10-32 UNF 13.4 24 M5 x 0.8 1 8 13.2 8 17 1 4 4.6 1 4 15.3 23.5 1 8 11.11 17.6 28.5 1 4 15.2 18.5

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

Note) The counterbore configuration differs only for the mounting hole section between the auto switch mounting grooves. (16, 20 only) (mm) H 7 8 7.8 G 30.5 32 34.2 FZ 3 3 5 FY 11 13 14.5 FX 12.5 14.5 17 EC 8.5 9 10 EO 13.5 14 16 DC 18.5 21 24 DO 23.5 26 30 BA 30 36 42 BD 12 16 19 CB 14 14 16.5 BB 40 45 52 NB BC 30.6 36.6 42.6 NA 8 11 13 AD 28 29 31.5 K 4 5 6 AA 43.5 46 49 AB 40.5 43 46 J

Aluminum High Vacuum Angle Valve

-30-1-1 XLF80-30-1 XLF80A-30-1 XLF80-30-1H XLF80A-30-1H XLFV80-30-1 XLFV80A-30-1 XLD80-30-1 XLD80-30-1H XLDV80-30-1 XLG80-30-1-1 XLG80-30-1H-1 XLGV80-30-1 63 XLA63-30-1 XLA63A-30-1 XLA63-30-1H XLA63A-30-1H XLAV63-30-1 XLAV63A-30-1 XLC63-30-1-1 XLC63-30-1H-1 XLCV63-30-1-1 XLF63-30-1 XLF63A-30-1 XLF63-30-1H XLF63A-30-1H XLFV63-30-1 XLFV63A-30-1 XLD63-30-1 XLD63-30-1H XLDV63-30-1 XLG63-30-1

XL

30-1 XLF25-30-1 XLF25-30-1H XLFV25-30-1 XLG25-30-1 XLG25-30-1H XLGV25-30-1 XLD25-30-1 XLD25-30-1H XLDV25-30-1 XLH25-30-1 XL -40 XLA40-30-1 XLA40-30-1H XLAV40-30-1 XLC40-30-1 XLC40-30-1H XLCV40-30-1 XLF40-30-1 XLF40-30-1H XLFV40-30-1 XLG40-30-1 XLG40-30-1H XLGV40-30-1 XLD40-30-1 XLD40-30-1H XLDV40-30-1 XLH40-30-1 XL -16 XLA16-30-1 XLA16-30-1H XLAV16-30-1 XLC16-30-1 XLC16-30-1H XLCV16-30-1

5-Port Solenoid Valve

) SY30M-11-1A SY50M-11-1A SY70M-11-1A Part numbers shown on the left are for 10 valves (10 pcs.).

Fluoropolymer Piping Equipment

LQ3T11-R1 4 3 4 3.5 10 9 10 9 10 9 4.8 9.5 11 11 11 28.5 27.5 28.5 27.5 28.5 27.5 14 14 14 2 LQ3T11-R5 4 3 LQ3T21-R1 4 6 4 17 16 10 9 17 16 6 12 16 11 16 34.5 33.5 30.5 29.5 34.5 33.5 20 14 20 2.5 LQ3T21-R2 3 6 2 LQ3T21-R5 6 4 17 16 10 9 16 11 34.5 33.5 30.5 29.5 20 14 2.5 LQ3T21-R6 6 3 2 LQ3T31-R1 6 8 10 25 25 6.4 LQ3T31-R2 6 10 17 16 16 38 37 20 4 LQ3T31-R5 10 8 22.5 19.5 21 21 47.5 44.5

Battery-less

20 40 60 30 45 60 50 60 80 (2000 [mm/s2]) 10 23 35 30 55 70 40 60 80 60 70 90 Vertical (3000 [mm/s2]) 2 4 8 8 16 30 11 22 43 13 27 53 Pushing force [N]*2 *3 *4 14 to 38 27 to 74 51 to 141 63 to 122 126 to 238 232 to 452 80 to 189 156 to 370 296 to 707 132 to 283 266 to 553 562 to 1058 Actuator specifications Speed [mm/s]*4 15 to 500 8 to 250 4 to 125 18 to 500 9 to 250 5 to 125 24 to 500

AC Servo Motor Driver

OPTIONS AND AUXILIARY EQUIPMENT (b) Surge protector RAV-781BYZ-2 [Unit: mm] Black 1) 2) 3) Black Black 5.5 1 11 1 4.2 0.2 28.5 1.0 28 1.0 UL-1015AWG16 200 30 0 1 3 2 4.5 0.5 41 1.0 RAV-781BXZ-4 [Unit: mm] 1) 2) 3) 4) 5.5 1 11 1 28.5 1.0 200 30 0 28 1.0 4.2 0.2 UL-1015AWG16 1 3 2 4.5 0.5 41 1.0 12 36 13. COMMUNICATION FUNCTION 13.

AC Servo Motor Driver (CC-Link Type ）

2 11.

Basic type / Direct mount type Series CY3B/CY3R

30 27 M4 x 0.7 11 10.5 24 40 10 56 68 3.5 20 60 16 85 17.5 68 8 M8 x 1.0 M4 x 0.7 30 60 12.5 0.5 1.0 77 103 4.3 26 80 20.5 PA dimensions are for split from center.

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

35 9 6 204.5 4 36 12 7 208.5 6 6 40 33 234.5 37 238.5 15 20 30 35 11 7 205.5 5 36 13 8 210.5 7 7 40 34 235.5 39 240.5 D16 25 30 40 11 7 205.5 5.5 36 16 8 210.5 9.5 7 47 34 235.5 39 240.5 -X Individual -X 30 P 40 18 8 210.5 11 9 47 39 240.5 TN NPT 1/4 TF G 1/4 Nil Rc 1/4 1275 Series CKQ D/CLKQ D G P G P Dimensions G P CLKQ DA50 (CLKQ DB50 The angle of the cylinder port location against

ZP

14 18 30.5 37 47 11 14.5 20.5 11 14 18 30.5 37 47 11 14.5 20.5 Note 1) ;in the table indicates the pad material "N, S, U, F, GN, GS."

LEC-OM07605CN

LEC-CSS-L 11.2 11.2.1 [W] LECLECMR-RB-032 MR-RB-12 [40] [40] LECSS2-T5 30 LECSS2-T7 10 30 100 LECSS2-T8 10 30 100 LECSS2-T9 20 30 100 11 8 11. 11.2.2 [Pr. PA02] [Pr. PA02] 0 0 00: 100W 200W, 400W, 750W 02:LEC-MR-RB-032 03:LEC-MR-RB-12 11.2.3 11.5 100 5m 11 9 11. (1) LECSS2-T P+DP+CG3G4 G3G4 P+D P+D P P+ C C G3 D (3) (1) G4 5m 5 m (12) 1.