Modular F.R.L. Unit

115 44.5 11 6.4 84 3.3 303 264 43 105 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 105 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 105 297 Note 1) For AC20 only, the position of the pressure gauge is above the piping center.

Valve Single Unit

) SY3000-11-24 Mounting Screw Tightening Torques SX5000 SY5000-11-10 M2: 0.17 Nm M3: 0.8 Nm M4: 1.4 Nm SX7000 SY7000-11-9 Warning When mounting a valve or spacer on the manifold base or sub-plate, etc., those mounting directions are determined.

LEC-OM071xx

DISCONNECT 11 Turn OFF the control and main circuit power supplies.

KQ2

(inch) Mass (g) d Applicable fitting L M2 M1 Model a b Applicable fitting KQ2N01-03 KQ2N01-05 KQ2N03-05 KQ2N03-07 KQ2N05-07 KQ2N05-09 KQ2N07-09 KQ2N07-11 KQ2N09-11 KQ2N09-13 KQ2N11-13 36.5 37 37.5 38 38.5 41 41.5 45 46.5 47.5 50 16 16.5 16.5 17 17 18.5 18.5 21 21 22 22 0.2 0.4 0.4 0.6 0.6 1 1 1 11 22 24 5 32 15.5 2.2 1 8 3 16 3 16 5 32 16 2.5 1 4 1 4 16.5 3.5 3 16 5 16 5 16 1 4 17 4.6 3 8

Table of Contents

115 44.5 3.3 11 6.4 84 303 264 43 110 282 98 96 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 279 45 110 292 98 101 70 50 20 11 11 6.4 117.5 84 44.5 3.3 318 280 46 110 297 Note 1) For AC20 only, the position of the pressure gauge is above the center of the piping.

C95

G1 l1 G2 EM G3 CA H6 R1 Data 32 6.6 7 8 11 10 38 51 10 21 18 26 31 32 10 40 9 10 11 12 41 54 10 24 22 28 35 36 11 6.6 50 9 11 12 15 12 50 65 12 33 30 32 45 45 12 63 11 12 15 16 52 67 14 37 35 40 50 50 15 9 80 11 12.5 14 18 16 66 86 18 47 40 50 60 63 15 100 18 20 13.5 50 60 70 71 15 19 11 76 96 20 55 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for dimensions.

CG1

10 10 110 (118) 130 (138) +l 47 52 53 63.5 75.5 75.5 95 95 38.5 45 3.5 45 (53) 22 115.5 (123.5) 137.5 (145.5) +l 3.5 4 5 5 5 7 6.6 45 (53) 25 117.5 (125.5) 139.5 (147.5) +l 54.5 16.5 22 22 8.5 11 13 14 16 6.6 9 11 11 14 51 (60) 30 135 (144) 155 (164) +l 4.5 17.5 70.5 55 (67) 40 157.5 (169.5) 177.5 (189.5) +l CJ1 4.5 17.5 20 20 106 82.5 55 (67) 45 157.5 (169.5) 177.5 (189.5) +l 101 100 28.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

-7-11 to 11-7-12 for dimensions.

C95

G1 l1 G2 EM G3 CA H6 R1 Data 32 7 8 11 10 38 51 10 21 18 26 31 32 10 6.6 40 11 12 41 54 10 24 22 28 35 36 11 6.6 9 10 50 11 12 15 12 50 65 12 33 30 32 45 45 12 9 63 15 16 52 67 14 37 35 40 50 50 15 9 11 12 80 12.5 14 18 16 66 86 18 47 40 50 60 63 15 11 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size

Table of Contents

SET-ON 10 Start readiness signal CN2 24V DC + COM 1 COM 11 NO. 0 Indicates operation in progress when ON. ON when program is being executed and when returning to the home position. 2 BUSY 11 Operating signal NO. 1 12 NO. 2 3 When this signal is OFF, an alarm is being generated for the actuator/controller.

Magnetically Coupled Rodless Cylinder

14 19 CY1S10-Z 7.5 8 4.4 12 10 2.5 31.5 6.5 5 6 40 34 25 27 17 13.5 33 17 M4 x 0.7 6 45 4.6 6 M4 x 0.7 10.5 16.5 28 CY1S15-Z 7.5 9.5 5.4 16.6 12 2 38 6.5 5 6 52 40 28 29.5 20.5 15 39 20.5 M4 x 0.7 11 60 5.8 8 M5 x 0.8 10.5 16.5 28 CY1S20-Z 10 9.5 5.4 21.6 16 2 44 8.5 5.5 8 62 46 36 37.5 24 19 45 20 M6 x 1 16 70 5.8 10 M6 x 1 10.5 22 28 CY1S25-Z 10 11 6.5 26.4 16 2 52 8.5 5.5 8 70 54 40.5

CQS

X 45 l X 50 l X 55 l M5 X 30l X 35 l X 40 l X 45 l Model C Model C D 50 55 60 65 70 75 35 40 45 50 55 60 65 70 75 80 D 30 35 40 45 50 55 30 35 40 45 50 55 30 35 40 45 Special long bolt for through hole mounting is available as an option.

CA2

7 9 up to 600 20 to 600 35 32 27 52 20 40 10 17 M8 x 1.25 18 45 144 3.2 63 up to 600 20 to 600 35 32 85 27 64 20 40 10 17 11 M10 x 1.25 7 18 11.5 50 166 3.2 80 up to 750 20 to 750 40 37 102 32 78 25 52 14 21 13 M12 x 1.75 11 22 13.5 65 204 4.5 100 116 16 11 13.5 up to 750 20 to 750 40 37 41 92 30 52 14 21 M12 x 1.75 26 75 212 6.0 Without rod boot With rod boot (Single side) P (Both sides

Metal Seal/Rubber Seal Series VQ Body Ported

Note) 2-4-39 VQ0/1000/2000 Kit (D-sub connector) F VQ1000 51.5 (M plug connector) 300 mm Lead wire length AC, Latching 46.5 (M plug connector) 52.5 L2 L1 6.2 45 (L plug connector) 48 AC, Latching P = 11 13.2 40 (L plug connector) Manual override 30.5 Indicator light DIN rail clamp screw (11) D-sub connector mounting screw R4.5 9 95 (M plug connector) 101 (L plug connector) 65 5.5 66 61.5

Table of Contents

(Refer to page 14-19-11.)

CHKD/CHKG

11 depth 6.5 63 1/4 19.5 10 40 65 55 10 22.4 19 M16 x 2 20 7 52 9 14 depth 8.6 71 1/4 20.5 10 50 71 60 11 28 24 M20 x 2.5 24 8 58 11 17.5 depth 10.8 81 1/4 22 10 63 80 67 13 35.5 30 M27 x 3 33 9 69 13 20 depth 13 97 1/4 25.5 10 80 95 78 17 45 41 M30 x 3.5 36 14 86 15 23 depth 15.2 117 3/8 30 15 100 122 96 26 56 50 M39 x 4 45 21 106 17 26 depth 17.5 142 3/8 36 15 Note 1) Body dimensions are

CXS

12 1.2 M3 x 0.5 x 3 (Hexagon socket head set screw) M8 x 1.25 x 7.5 (Bolt holder) 3.8 3.8 0.5 45 45 3 3 25 0.2 25 0.2 5.3 5.3 32 31 16 2-M3 x 0.5 through 3.4 through 6.5 counterbore with depth 5 (Opposite side: Same) 3 3 45 45 5.5 2-M3 x 0.5 through M2.5 x 0.45 x 6 (Hexagon socket head cap screw) M3 x 0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) (11) (5 + ST) 2.75 2-M3 x 0.5 through

ISO Standard Hydraulic Cylinder

16 12 58 108 50 42 15 34 59 11 83 3/8 65 24 28 28 25 63 77 115 M8 x 1 38 76.5 9 M27 x 2 25 to 800 11 50 19 31 18 74 12 95 1/2 66 115 68 58 13 36 30 32 36 80 M10 x 1.25 25 to 800 96 147 47.5 95.5 10.5 M33 x 2 14 60 42 17 18 121 1/2 74 133 77 13 80 75 45 41 17 41 45 100 25 to 1000 115 179 M14 x 1.5 57 114.5 14.5 M42 x 2 18 22 25 86 146 72 38 145 3/4 79 90 16 50 97 19 56 56 52 Bore size (mm

C85

-45 6-11-45 45 Series C85 Contact Protective Box CD-P11, CD-P12 Contact Protective Box/Internal Circuit D-A7/A8 and D-C7/C8 reed switches do not incorporate contact protection circuits.