ZP

5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B;-A12-U2 ZP3-T10B;-A12-U4 ZP3-T13B;-A12-U4 ZP3-T16B;-A12-U4 ZP3-T10B

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

5/16'' EX510 Gateway-type Serial Transmission System Type 20SA 5 port body ported 10-SYJ5000 R P R P. 325 Type 21SA 5 port body ported 10-SYJ3000 P. 297 10-SYJ7000 R P P. 355 Type 32SA 4 port base mounted 10-SYJ3000 R P P. 298 Type 41SA 5 port base mounted 10-SYJ5000 P. 326 10-SYJ7000 P R P. 356 Type 42SA 5 port base mounted 10-SYJ5000 R P P. 326 Type 43SA 5 port base mounted 10-SYJ5000 P

Smooth Cylinder/Low Speed Cylinder

D-A9V D-M9W D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.

One-touch Fittings

-32UNF KQ2U01-32l 8 7.1 33.8 7.1 30.3 13.3 5.2 6 3.2 7.1 2.2 2.2 1.8 5 5/32 10-32UNF KQ2U03-32l 10 8.2 33.9 8.2 30.4 13.3 5.7 6 3.2 8.2 2.2 2.2 1.8 6.6 1/4 10-32UNF KQ2U07-32l 12 11.1 35.2 11.1 31.7 13.3 7.6 8 4 11.1 2.2 2.2 1.8 11.2 tubing O.D.

ZP

5 5 5 Width across flat 14 Width across flat 14 Width across flat 14 2 2 18 18 15 10 18 M12 x 1 M12 x 1 M12 x 1 Width across flat 14 Width across flat 14 Width across flat 14 33 Barb fitting 33 33 5 5 5 15 10 15 10 2 2 1.8 1.8 1.8 14 13 8.4 11 10 6 11.4 17 16 Vacuum Inlet Dimensions ZP3-T10B;-A12-U2 ZP3-T13B;-A12-U2 ZP3-T16B;-A12-U2 ZP3-T10B;-A12-U4 ZP3-T13B;-A12-U4 ZP3-T16B;-A12-U4 ZP3-T10B

Table of Contents

12 10,11 10,11,12 08,09 1000 10 15 8 500 06,07 10 6 500 4 5 2 0 0 5 10 0 5 10 0 Number of needle rotations Number of needle rotations 15-9-101 11 Construction ASD230F ASD330F/430F ASD530F/630F ASD530F-02 !

Fluoropolymer Piping Equipment

32" 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32" 1/2" x 3/8" 3/8" x 1/4" 3/4" x 5/8" 3/4" x 5/8" 1/2" x 3/8" 3/8" x 1/4" 12 x 10 TL TIL 10 x 8 TLM TILM 6 x 4 4 10 x 8 6 x 4 12 x 10 6 x 4 3 x 2 TD TID TH TIH 3/4" x 5/8" 19 x 16 3/8" x 1/4" 1/4" x 5/32" 1/4" x 5/32" 1/8" x 0.086" 5 12 x 10 10 x 8 12 x 10 10 x 8 10 x 8 8 x 6 6 x 4 10 x 8 12 x 10 3/4" x 5/8" 5 1/2" x 3/8" 3/8" x 1/4" 1/4" x 5/32

Table of Contents

15 5 3 5 10 15 20 25 30 4.5 10 15 20 30 40 50 60 3 2 6 30 60 8 25 35 10 20 40 10 35 Flow rate Q kg/h Figures inside [ ] indicate the saturated steam holding heat (kcal/kg).

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

5st 5 st 5 st 10 st 10 st 10 st 10 st 10 st M4 x 0.7 6 6 9 10 12 5 50.5 22 44.5 4 7 14 5 10 8.5 19 60.5 27 54.5 13.5 24 M4 x 0.7 14 5 53 23.5 47 4 10 15 6.5 12 8.5 20.5 63 28.5 57 13.5 25.5 M6 x 1.0 20 8 61 24.5 52 5 12 18 8 16 9.5 23.5 71 29.5 62 14.5 28.5 M6 x 1.0 24 10 67.5 27.5 57.5 5 14 20 10 20 10 27.5 77.5 32.5 67.5 15 32.5 Double clevis bracket material: Carbon steel For details

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

M5 x 0.8 (P, R1, R2 port) 17.5 14 28 L plug connector (L): 10-SYJ3 43-L-M5 M plug connector (M): 10-SYJ3 43-M-M5 M8 Connector (WO): 10-SYJ3 43-WO-M5 3 4 5 3 4 5 3 4 5 Approx. 300 (Lead wire length) 41.5[48.5] 26.1 46 M8 x 1 28.5 52.6[59.6] Approx. 300 (Lead wire length) 55.8 32.6 49.3 111.5[115.9] R1 P R2 R1 P R2 R1 P R2 91.9[96.3] 10 10 10 10 10 10 28 28 28 109.7 14 14 14 5 5 5 37.6[39.8

Air Slide Table

20 MXQ8A-5-15Zm-X2192 25 4 54 28 3 65 40 52.5 32.5 78.5 110 120 230 10 MXQ8A-10-10Zm-X2192 5 30 MXQ8A-5-25Zm-X2192 26 6 52 23 27 4 85 40 63 42 88.5 130 140 270 10 MXQ8A-10-20Zm-X2192 15 MXQ8A-15-15Zm-X2192 5 MXQ8A-5-35Zm-X2192 32 6 40 31 31 4 70 55 52.5 52.5 104.5 130 140 280 10 MXQ8A-10-30Zm-X2192 15 MXQ8A-15-25Zm-X2192 20 MXQ8A-20-20Zm-X2192 5 40 15 8 MXQ8A-5-45Zm-X2192 46 6 59 29 29 4

5 Port Solenoid Valve Series SV1000/2000/3000/4000

End Plate EX600-ED2-l EX600-ED3-l Power connector Model specification M12 (5-pin) plug 7/8 inch (5-pin) plug 24 VDC 10%, Class 2, 2 A 24 VDC 10%, 8 A Power supply (for Control/Input) Power supply (for Output) 24 VDC +10/5%, Class 2, 2 A 24 VDC +10/5%, 8 A Enclosure IP67 (Manifold assembly) Standards CE marking, UL (CSA), RoHS recognition Weight 0.4 lbs (170 g) 0.4 lbs (175 g) EX600-ED3-l

CQ2

Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 Bore (mm) 12 16 20 25 A L L1 37 3.5 3.5 4.5 5 14 39.5 44 15.5 18.5 22.5 45.5 Double clevis (mm) Bore (mm) 12 16 20 25 Stroke range (mm) 5 to 30 5 to 30 5 to 50 5 to 50 A B CD CT N RR CL CU CW CX CZ L L1 51.5 55 63 45.5 49 54 M4 X 0.7 28 5 5 8 10 4 4 5 5 6 6 9 10 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 14 M4 X 0.7 30.5 15.5

V100

28.5 26.1 X R P S070 13 5 5 10 M5 x 0.8 (P, R port) 10 8.6 7.5 VQ 17.5 23 VKF VQZ L plug connector (L): SYJ34-L-M5 M plug connector (M): SYJ34-M-M5 M8 connector (WO): SYJ34-WO-M5 VZ VS VFN Approx. 300 (Lead wire length) 41.5 [48.5] 26.1 46 M8 x 1 28.5 52.6 [59.6] Approx. 300 (Lead wire length) 58.5 [60.7] 48.7 [50.9] 57.6 50.2 43.7 R P R P R P 10 8.6 10 8.6 10 8.6 23 23 23 5 5 5 28.5 28.5

SY

Dimension L 0 1 2 3 4 5 6 7 8 9 10 No.

Table of Contents

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

Electric Actuator/Slider Type

] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load [kg] (1 kg = 2.2 lbs) 4 Series LEFS Table Accuracy A side B side Model Traveling parallelism

Compact 5-Port Solenoid Valve

For EX600/EX250 pp. 63, 77, 119 1 3 5 S6 S JJ5SY 10 G P, E port entry, SUP/EXH block assembly P, E port entry External pilot U side (2 to 10 stations) G D side (2 to 10 stations) H Both sides (2 to 24 stations) J How to Order Valves JSY T 0 0 5 1 R 3 5 R JSY 0 0 5 Coil type (See below.)

Air Cylinder

2) (n = 4, 6)4 MB D-A9V 5 10 10 + 15 (n 2) (n = 4, 6)4 MB1 D-M9 D-A9 10 (5)5 10 15 + 15 (n 2) (n = 4, 6)4 CA2 D-M9WV D-M9AV 10 15 15 + 15 (n 2) (n = 4, 6)4 D-M9W 15 (10)5 15 20 + 15 (n 2) (n = 4, 6)4 CS1 D-M9A 15 (10)5 20 (15)5 20 + 15 (n 2) (n = 4, 6)4 CS2 D-F7 D-J79 5 5 15 + 15 (n 2) (n = 4, 6)4 Rail mounting D-F7V D-J79C 5 5 10 + 10 (n 2) (n = 4, 6)4 D-F7W/J79W D-F7BA

Electric Actuator

4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 20 0 25 20 15 10 5 5 10 15 L4 Vertical Work load [kg] Work load [kg] 1,500 2,000 2,000 2,000 1,500 1,500 1,500 1,000 L5 [mm] L5 [mm] L5 [mm] L5 [mm] 1,000 1,000 1,000 500 500 500 500 Mey m 0 0 0 1 2 3 4 5 Work load [kg] 0 0 5 10 15 Work load [kg] 0 0 Work load [kg] 0 25 20 15 10 5 5 10 15 20 L5 Work load [kg] 5 Series LEF Table Accuracy A