Table of Contents

Rubber seal 45 or less VQ7-8-FG-D3.0 0.24 12 2.4 0.18 10 Metal seal 15 or less 0.70 Double VQ7-8-FG-D-R 3.3 0.27 13 3.0 0.24 12 Rubber seal 20 or less VK VQ7-8-FHG-D2.4 0.24 10 2.4 0.28 10 Metal seal 45 or less Closed center 0.75 VQ7-8-FHG-D-R 2.8 0.27 11 2.8 0.25 11 Rubber seal 50 or less VZ VQ7-8 3/8 VQ7-8-FJG-D2.4 0.20 10 2.4 0.16 10 Metal seal 45 or less Exhaust center 0.75 VF VQ7-8-FJG-D-R

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

DIN Rail Manifold Common SUP/Common EXH How to Order Type 45 (Non plug-in type) Applicable solenoid valve C D 45 05 C8 VV5Z5 G L M D VZ54Stations 4 (A), 2 (B) port size SUP/EXH block mounting position 02 2 stations Applicable blanking plate assembly VZ5000-65-2A One-touch fitting for 6 Symbol Position Applicable stations 2 to 10 stations D U C6 20 20 stations B 2 to 20 stations 2 to 10

45

Manifold base (5 stations) D side SS5X3-45-05D-C6 A, B port size (Metric size) Symbol Port size Applicable series One-touch fitting for 4 C4 SS5X3-45-05D-C6 1 set (Type 45, 5-station manifold base part no.) SX3000-75-1A 1 set (Blanking plate assembly part no.) SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.)

Metal Seal/Rubber Seal Series VQ Body Ported

9.5) 45 65.5 (41.5) (33) (59.5) 58 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting for 6 Residual pressure release manual override C8: One-touch fitting for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 4 4 4 25 B 2 (1.5) 37.5 17.5 A Dimensions Formula L1 = 22n + 24 n: Station 7.5 4 L n 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 46 75

45

Manifold base (5 stations) D side SS5X3-45-05D-C6 A, B port size (Metric size) Symbol Port size Applicable series One-touch fitting for 4 C4 SS5X3-45-05D-C6 1 set (Type 45, 5-station manifold base part no.) SX3000-75-1A 1 set (Blanking plate assembly part no.) SX3140-5G2 sets (Single solenoid part no.) SX3240-5G2 sets (Double solenoid part no.)

0.4

One-touch fitting C10: 10 One-touch fitting (C12: 12 One-touch fitting) DIN rail clamp screw R R 76.5 3 3 X X 49.5 B B B B B B B B 12 P12 P 30 25 18 1 1 A A A A A A A A 10 13.5 C10 [1(P) SUP port] C10: 10 One-touch fitting C10 [1(P) SUP port] (C12 in case of branch type) C4, C6, C8, [4(A), 2(B) port] P = 16 45 25 C10: 10 One-touch fitting (C12: 12 One-touch fitting) C4: 4 One-touch fitting

Base Mounted Metal Seal/Rubber Seal Series VQ

3 n (41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24

0.4

Product Precautions DIN rail clamp screw Stations 1 2 3 D side U side 2 x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread 2n x C3, C4, C6, M5 C3: 3.2 one-touch fitting C4: 4 one-touch fitting C6: 6 one-touch fitting M5: M5 thread Dimensions Formula L1 = 11n + 20 n: Station (Maximum 24) n L 1 2 3 4 5 6 7 8 9 10 11 12 L1 L2 L3 31 42

VQZ1000/2000/3000

Ported 10 10 Series VQZ1000/2000/3000 Dimensions: VQZ1000 2 position double Grommet (G): VQZ1220 1-G-C3/C4/C6/M5 300 95 (Lead wire length) 47.5 5.5 (M5: 6) 5.5 (M5: 6) 22.2 mounting hole 0.8 4 8.6 10 SMC SMC 2 R2 Cover diameter 1.6 25.8 2-C3, C4, C6, M5 Cross section 0.34 mm2 60.3 C3: One-touch fitting for 3.2 Manual override C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5

0.4

Built-in silencer, direct exhaust (-S) Special wiring specifications (-K) C6 L6 P.43 P.44 P.45 P.52 D-sub connector Terminal no.

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

C8 1/8 C6 C8 1/8 1/8 C6 C8 Body ported for internal pilot Base mounted for internal pilot 10-SS5YJ7-20 10-SYJ723 10-SS5YJ7-21 10-SS5YJ7-40 10-SS5YJ7-41 10-SS5YJ7-42-C6 10-SS5YJ7-42-C8 10-SYJ743 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold Instruct by specifying the valves and blanking plate assembly to be mounted on the manifold along with the manifold

SYJ3000/5000/7000

Station 2 52 43 Station 20 340 331 Station n L1 L2 3 68 59 4 84 75 5 100 91 6 116 107 7 132 123 8 148 139 9 164 155 10 180 171 11 196 187 12 212 203 13 228 219 14 244 235 15 260 251 16 276 267 17 292 283 18 308 299 19 324 315 1-5-44 45 5 Port Solenoid Valve Rubber Seal Series SYJ5000 C6 N7 Type 42: Side Ported/SS5YJ5-42Stations -01, [ ]: AC C6 N7 Grommet (G) For 01 For (Built-in One-touch

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

] 59.9 33.5 87.8 [90.4] 107 300 300 (Lead wire length) 51.5 [58] 45 62.6 [69.1] 48.6 39.1 32.5 21.5 48.6 45 32.5 21.5 8.5 6 6 8.5 10 6 6 4-Rc(PT)1/8 (Piping port) 17 17 10 15 4-Rc(PT)1/8 (Piping port) 17 17 45.5 15 24 45.5 24 32 32 [ ] for AC Other dimensions are the same as the grommet style

5 Port Solenoid Valve Series VQZ1000/2000/3000

Entry is the same as standard products. 966 Series VQZ Replacement Parts Base Mounted One-touch Fitting Assembly (for Cylinder port) Fitting size C3 C4 C6 C8 C10 Model VQZ1000 VVQ1000-50A-C3 VVQ1000-50A-C4 VVQ1000-50A-C6 VQZ2000 VVQ1000-51A-C4 VVQ1000-51A-C6 VVQ1000-51A-C8 VQZ3000 VVQ2000-51A-C6 VVQ2000-51A-C8 VVQ2000-51A-C10 Note) Purchasing order is available in units of 10 pieces

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

0, Metal joint q, w, O-ring t, y, u Terminal i, Junction cover o, Adaptor plate, Pin housing, Guide (2) 1 2 C6 C8 AXT625-20APlug-in type Manifold block assembly (1) 10 1 2 C6 C8 (3) AXT625-10AManifold block !

A

, 15, 20, 25, 30 20, 25 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 32, 40 35, 40, 45, 50, 75, 100 30, 35, 40, 45, 50 50, 63, 80 100 10, 15, 20, 25, 30, 35, 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35, 40, 45, 50 Courtesy of Steven Engineering, Inc. !

VQC

13.5 C10 1(P) port 25 (7.5) (12) 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 45 P = 16 2-C12 1(P) port Formulas: L1 = 16n + 57, L2 = 16n + 176 (for 1 input block.

Vacuum System Peripherals:

S U D side D U side 2 to 10 stations B Special specifications M 2 to 20 stations Both sides Made to order. When using both types, specify C4 and C6 specifically; do not just use X marking.

VZ3000

Gasket DXT192-10-5 Gasket DXT192-10-5 (Use caution to the orientation.)

5 Port Solenoid Valve, Series VQC

13.5 C10 1(P) port (7.5) 25 (12) 2n-C4, C6, C8 C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting 45 P = 16 2-C12 1(P) port (mm) Formulas: L1 = 16n + 57, L2 = 16n + 176 (for 1 input block.