C85

50 st 15 13 14.5 51 to 100 st 15 13 14.5 101 to 150 st 15 13 14.5 8 10 12 3 3 4 10 4 6 7.5 3.5 3.5 4.5 10.5 4.5 6.5 8 4 4 5 11 5 7 8.5 2 2 3 9 3 5 6.5 8 2 4 5.5 D-C7 D-C80 D-C73C D-C80C 14.5 30 45.5 16 13.3 13.3 10 A B 26 20 25 8 10 12 7(32) 7(32) 15.5 13.5 15 57 57 15.5 13.5 15 82 82 15.5 13.5 15 D-J79C 17 Hs D-A73 D-A80 15 30.5 45.5 16 1 D-F7V D-F7WV D-F7BAVL 7 23 A B 20 25 8 10 12 7.5

Vacuum Pad

Pad diameter: 1.5 to 3.5 Pad diameter: 10 to 16 Model Pad unit part no. ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no.

Vacuum Pad

Pad diameter: 1.5 to 3.5 Pad diameter: 10 to 16 Model Pad unit part no. ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no.

Vacuum Pad

Pad diameter: 1.5 to 3.5 Pad diameter: 10 to 16 Model Pad unit part no. ZP3-T(10/13/16)UM;(J/K)3-@ ZP3-T(10/13/16)B;(J/K)3-@ ZP3-T(10/13/16)UM;(J/K)6-@ ZP3-T(10/13/16)B;(J/K)6-@ ZP3-T(10/13/16)UM;(J/K)10-@ ZP3-T(10/13/16)B;(J/K)10-@ ZP3-T(10/13/16)UM;(JB/K)15-@ ZP3-T(10/13/16)B;(JB/K)15-@ ZP3-T(10/13/16)UM;(JB/K)20-@ ZP3-T(10/13/16)B(JB/K)20-@ Buffer assembly part no.

Electric Slide Tables

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Driver side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

MY1

D A B Side support B MY-S B 2-J E A B C D Model A 35 43 53 61 70 87 113 136 170 206 B 43.6 53.6 65.6 75 84 105 131 158 200 236 C 12 15 25 D 21 26 38 E 3.6 4.9 6.4 F 1.8 3 4 G 6.5 6.5 8 H 3.4 3.4 4.5 J M4 x 0.7 M4 x 0.7 M5 x 0.8 Applicable cylinder MY1B 10 MY1B 16 MY1B 20 MY1B 25 MY1B 32 MY1B 40 MY1B 50 MY1B 63 MY1B 80 MY1B100 A B A B A B MY-S10 MY-S16 MY-S20 A B MY-S25 35 50 8 5 9.5 5.5

Table of Contents

N.O. 125 VAC 15 15 4 2 10 10 4 2 250 VAC 15 15 3 1.5 10 10 3 1.5 8 VDC 15 15 3 1.5 15 15 5 2.5 15 15 3 1.5 10 10 5 2.5 14 VDC 30 VDC 3 6 6 1.5 5 5 5 2.5 125 VDC 0.5 0.5 0.3 0.3 0.05 0.05 0.05 0.05 250 VDC 0.25 0.25 0.2 0.2 0.03 0.03 0.03 0.03 16-12-6 2 Paddle Style Flow Switch Series IF3 Fluid and Ambient Temperature Range Enclosure Open type Using indoors away from water drop.

ZP

O.D.Q I ZR 5 H R J Hexagon width across flats 10 Hexagon width across flats 2 F E ZM Hexagon width across flats 12 D C Applicable tubing O.D.Q ZH Y 2 R H A B Hexagon width across flats 12 Hexagon width across flats 3 ZU F E D C ZL 3 2 ZY Dimensions: 10 mm Stroke A B (mm) J H F D C E A B I Model ZQ ZPR10F10-0-A10 10 12 10 12.5 23.4 39.5 50.5 84.5 With a stroke of 10 mm ZPR13F10-0-A10 13 15

Dual Rod Cylinder Series CXSJ/CXS

A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35

Air Cylinder

(Same surface) CA2 Auto switch mounting surface Port surface Port surface Port surface CS1 CS2 Auto switch type D-M9(V) D-M9W(V) D-M9A(V) D-A9 10 st or more 15 to 44 st 45 st or more 10 st or more 15 to 44 st 45 st or more D-C7/C8 10 st or more 15 to 49 st 50 st or more 10 st or more 15 to 49 st 50 st or more D-H7/H7W D-H7BA/H7NF 10 st or more 15 to 59 st 60 st or more 10 st or more 15 to

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

LE CP 1 B A1 1 2 5 6 (17.7) (10.2) (14) (18) A6 B1 B3 A1 A3 B6 (13.5) Cable length (L) [m] 1 2 1 1.5 3 3 5 5 8 8*1 A 10*1 B 15*1 C 20*1 15 16 Connector B Connector D (14.7) (30.7) L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m (*1 Produced upon receipt of order) Controller side (5.5) (6.3) (5.7) (14.2) Connector C Actuator side (Terminal no.)

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

, 15, 20, 30, 40 How to Order Size 10 15 20 30 40 CRBU2 10 180 S E W Without auto switch Connection port location Nil E Side ported Axial ported Size 10 15 With auto switch Size: 10, 15 T99 L 180 S CDRBU2 10 W CDRBU2 20 W 180 S T79 L With auto switch Size: 20, 30, 40 Size 20 30 40 Made to Order Refer to the table below for details.

Metal Seal/Rubber Seal Series VQ Body Ported

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

Free Mount Cylinder

Single Acting, Spring Return D-M9, D-F9W D-M9V, D-F9WV D-A9, D-A9V Bore size (mm) Stroke A B W A B W A B W 6 4.5 6.5 4 4 2.5(5) 0 17.5 17.5 All stroke 13.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 0.5 2.5 7.5 7.5 1.5(1) 3.5 16 0.5 2 8 8 2(0.5) 4 2 20 0 10 10

Vacuum Pad

P. 1 4 Flat U Single unit P. 1 6, 8 C Flat with rib Single unit P. 1 B 6, 8 Bellows Single unit Series ZP Common adapter 10, 15 25, 30 Bellows (Multistage type) P. 13 J Single unit 2, 3.5, 4 5, 6, 8 10, 15 P. 2 MU Flat With adapter Single unit 2, 4, 6 EU P. 5 Flat With adapter Single unit 10, 15 20, 25 30 Thin flat (With groove) MT P. 11 With adapter Single unit 4, 6, 8 10, 15 20 Bellows

Vacuum Pad

P. 1 4 Flat U Single unit P. 1 6, 8 C Flat with rib Single unit P. 1 B 6, 8 Bellows Single unit Series ZP Common adapter 10, 15 25, 30 Bellows (Multistage type) P. 13 J Single unit 2, 3.5, 4 5, 6, 8 10, 15 P. 2 MU Flat With adapter Single unit 2, 4, 6 EU P. 5 Flat With adapter Single unit 10, 15 20, 25 30 Thin flat (With groove) MT P. 11 With adapter Single unit 4, 6, 8 10, 15 20 Bellows

Vacuum Pad

P. 1 4 Flat U Single unit P. 1 6, 8 C Flat with rib Single unit P. 1 B 6, 8 Bellows Single unit Series ZP Common adapter 10, 15 25, 30 Bellows (Multistage type) P. 13 J Single unit 2, 3.5, 4 5, 6, 8 10, 15 P. 2 MU Flat With adapter Single unit 2, 4, 6 EU P. 5 Flat With adapter Single unit 10, 15 20, 25 30 Thin flat (With groove) MT P. 11 With adapter Single unit 4, 6, 8 10, 15 20 Bellows

Vacuum Pad

P. 1 4 Flat U Single unit P. 1 6, 8 C Flat with rib Single unit P. 1 B 6, 8 Bellows Single unit Series ZP Common adapter 10, 15 25, 30 Bellows (Multistage type) P. 13 J Single unit 2, 3.5, 4 5, 6, 8 10, 15 P. 2 MU Flat With adapter Single unit 2, 4, 6 EU P. 5 Flat With adapter Single unit 10, 15 20, 25 30 Thin flat (With groove) MT P. 11 With adapter Single unit 4, 6, 8 10, 15 20 Bellows

SYJ3000/5000/7000

port) One-touch fitting (A, B port) Applicable tubing O.D.: 4, 5/32" 1 (Pitch) P = 12.5 19.5 5 B B 15 1 A A 5 B B 15 20 A A L1 L2 4 Manual override + + + + 10 10 3.2 63.3 [65.5] 15.3 32 111.5 [115.9] 17 7.5 (4.4) 12.5 1 98.6[103] 16 A A A A A A R P R P 31.2 31.5 64.1 [66.3] 36.5 B B B B B B 65.3 17 50.5 70.3 2-4.5 (For mounting) + + + + + + Triangle mark 1/8 (P, R port) (Pitch) P = 12.5 18.5

Free Mount Cylinder Series CU

CQS Single Acting, Spring Return (mm) D-M9, D-M9W D-M9V, D-M9WV D-A9, D-A9V Bore size (mm) CQ2 Stroke A B W A B W A B W 6 2.5 (5) 6.5 4.5 4 4 0 All stroke 17.5 17.5 13.5 RQ 5, 10 15 5, 10 15 5, 10 15 5, 10 15 5, 10 15 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 16.5 21.5 20 25 24 29 26.5 31.5 27.5 32.5 12.5 17.5 16 21 20 25 22.5 27.5 23.5 28.5 10 1.5 (1) 2.5 0.5 7.5 7.5 3.5 CQM 16 2 (0.5) 2