Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

(mm) 1in 25.4mm Bottom port diagram 2-G3/4 Conduit port 2n-1/2 (ports A, B) 144.5 143 112.5 83.5 55.5 M5 ground screw 106 59.2 46.8 9 9 34.5 34 n U side 12 X B 2 A 4 6 B A B 2 A 4 5 B A B 2 A 4 SMC SMC SMC SMC 4 B A L2 L1 58.5 P=41 B 2 A 4 3 B A B 2 A 4 2 B A 34.5 48 68.5 P=41 B A 4 1 B A 2 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-1/8 (external pilot port) L n Dimensions

4/5 Port Solenoid Valve

(Pitch) P = 10.5 For (Built-in one-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/surge voltage suppressor) + + + + + B B B B

NCG/CG1

L 25 N NCG 00 N 25 M9NW L 04 NCDG With auto switch Number of auto switches Built-in magnet Nil S n 2 pcs. 1 pc. n pcs.

0.55

1 1 1 2 Rc G NPT NPTF T N F Nil Thread type Double solenoid Single solenoid 81 80 Type of actuation Port size (IN, OUT port) VP3145 VP3165 VP3185 Port size Symbol 03 04 3 8 1 2 06 3 4 Passage, Type of actuation 10 12 1 1 4 1 14 1 2 1 NC NO B A 20 2 In the case of -X80, only N.C. is available.

Air Fittings & Tubing

N FA FB L1 L3 L4 L5 L6 P Q1 Q2 MA MB L2 65 40 61.5 47 73 55 86 19 26 29 39 41 57 KM11-04-08-6 6 10 18 29.5 19.5 27 12 16 18.5 6 10.6 8 4 KM11-04-08-10 10 86 KM11-06-10-6 6 76 KM11-06-10-10 10 102 10 19.5 31.5 21.5 31 13.5 17 21 7.5 13 10 6 KM11-08-12-6 6 85 KM11-08-12-10 10 116 11.5 22.5 35.5 24 34.5 14.7 18.5 22 9 15.5 12 8 SKM, #1 to #6 KM12 Thread Rc(PT) T Part No. N H (Hex.)

V

64.5 34 87.5 30.5 16.5 34 24 21.5 81 25.6 23 21.7 12" 13.5 H O W T O O R D E R A I R S U C T I O N F I LT E R S E R I E S (N)ZFB ACCESSORIES A I R S U C T I O N F I LT E R S E R I E S (N)ZF1B (N)ZFB E L E M E N T I-34S-A (N)ZFB100, 101 I-35S-A (N)ZFB200, 201 I-36S-A (N)ZFB300, 301 I-395-A (N)ZFB401 B O D Y S I Z E T U B E S I Z E OD M M 04 4 06 6 08 8 10 10 05 3/16 07 1/4 11 3/8 13 1/2 100

Metal Seal/Rubber Seal Series VQ Body Ported

A at the station with the smaller number in the above figure and the B side solenoid to SOL. A at the next station. 1 2 3 4 5 6 7 8 9 10 Terminal no. (Looking it by the double solenoid valve) SOL. () A B () () A B A B A B A B Note) Types with 10, 16, or 20 pin are also available. For details, refer to page 2-4-28.

Plug-in/Plug Lead: Single Unit

VQ0 55.5 M5 ground screw VQ4 34.5 U side n VQ5 12 X VQZ B 2 A 4 6 B A VQD B 2 A 4 SMC SMC SMC SMC SMC 5 B A A 4 B 2 4 B A L2 L1 A 4 B 2 3 B A A 4 B 2 2 B A P = 41 58.5 34.5 48 P = 41 A 4 B 1 B A 2 68.5 X 12 Stations D side 42 16 107.8 179 15.5 22 51 69 117 2-Rc 1/8 (External pilot port) Dimensions Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n 9 445 465 8 404

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

K K L1 N H F D B(B) C A A Q J Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com S U 2 x M V W X Approx. 300 Approx. 280 G1/2 33 25 D side Stations 1 2 3 4 5 n U side Y R T 44 E D H F F n-1/8, 1/4 OUT port (Common SUP type) IN port (Individual SUP type) (mm) n (stations

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Vacuum

Material N N B R S Silicone rubber u urethane rubber F Fluorine rubber GN Conductive NBR (s2-o 16) GS Conductive silicone (s2-o16) Material N N B R s silicone rubber u _ urethane rubber F Ftuorine rubber GN Conductive NBR (o2-o16\ GS Conductive silicone (@2-@'16) Pad type (application: Refer to list O) U Flat type c Ftat with rib D Deep type B Bellows type Pad type U Flat type c _ Flat vYith

Table of Contents

ON-flow 0.04 40 B p ipe pe 3/4 B p pi 3B 30 1 0.03 2B, pipe 20 0.02 , 5B , 4B pe 1/4 1 B pi 10 Max.

Booster Regulator/Air Tank

SRH VBA20A-03 VBA20A-F03 VBA10A-02 VBA10A-F02 VBA11A-02 VBA11A-F02 G27-20-01 AN20-02 ANA1-02 KT-VBA10A-18 VBA40A-04 VBA40A-F04 VBA22A-03 VBA22A-F03 VBA42A-04 VBA42A-F04 VBA43A-04 VBA43A-F04 Model Description Pressure gauge Silencer High-noise reduction silencer Elbow for silencer SRP G N S L G36-10-01 AN30-03 ANA1-03 KT-VBA22A-7 AN30-03 ANA1-03 G36-10-01 AN40-04 ANA1-04 G27-20-01 AN40-

Base Mounted Metal Seal/Rubber Seal Series VQ

(41.5) (33) (59.5) 58 Residual pressure release manual override 2-Rc1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 C8: One-touch fitting assembly for 8 C6: One-touch fitting assembly for 6 2-Rc 1/8, 1/4, C6, C8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 (1.5) 37.5 17.5 A 1 2 3 4 5 6 7 8 10 11 12 L n 13 14 15 16 Dimensions Formula L1 = 22n + 24 n: Station

Stainless Steel 316 Fittings

(mm) a b Note 2) Effective area (mm2) Applicable tube b Q Weight (g) Note 1) D2 Note 1) D1 D1 L1 L2 L3 M1 N O M2 Model 3.2 4 6 8 10 12 4 6 8 10 12 16 KQG2T23-04 KQG2T04-06 KQG2T06-08 KQG2T08-10 KQG2T10-12 KQG2T12-16 8.5 11.5 20 29.8 41.3 58 3.8 7.1 16.4 36 56 108.5 3.2 3.2 4.2 4.2 4.2 4.2 5.6 5.6 8 8 8 8 4.1 4.4 6.4 7.1 8.1 9.1 9.1 11.4 13.7 16.6 18.7 24.6 8.3 9.1 11.4 13.7 16.6 18.7 14.2

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E21-T-R8 2 2-06 LQ1-2N06 LQ1-2B06 8 x 6 LQ1E21-T-R9 2 2-06 LQ1-2N06 LQ1-2B06 10 x 8 LQ1E21-T-R10 2 2-06 LQ1-2N06 LQ1-2B06 12 x 10 LQ1E22-T-R8 2 2-04 LQ1-2N04 LQ1-2B04 6 x 4 LQ1E22-T-R9 2 2-04 LQ1-2N04 LQ1-2B04 8 x 6 LQ1E22-T-R10 2 2-04 LQ1-2N04 LQ1-2B04 10 x 8 LQ1E22-T-R11 2 2-04 LQ1-2N04 LQ1-2B04 12 x 10

SQ1000/2000

For top ported Approx. 10 R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 62 41.5 25.5 39.5 (58) 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 21 P 1 7.5 P = 17.5 48.7 30 2n-C4, C6, C8 (A, B port) C4: 4 One-touch fitting C6: 6 One-touch fitting C8: 8 One-touch fitting Formulas: L1 = 17.5n + 46, L2 = 17.5n + 60 n: Stations (maximum 12 stations) Dimensions L n 12 256 270 300 310.5 11 238.5 252.5 275 285.5 10 221 235

0.4

2 18.5 T 12 12 kit EXH outlet L Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D Stations 1 2 3 4 5 6 7 8 n kit 10 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 10 For top ported S R 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A kit 39.4 (58.1) 62.1 41.7 25.7 20.9 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B P 1 C kit P=17.5 63.3 44.5 7.5 One-touch fitting

Soft Start-up Valve

AV*-OMZ0091-A PRODUCT NAME Soft Start-up Valve MODEL / Series / Product Number AV2000-(F,N)02(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV3000-(F,N)03(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV4000-(F,N)04(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AV5000-(F,N)06~10(B,G,S)-1~6(G,D,Y,DO,YO)(Z)(B,C)(-R,Z)-A AVA2000-(F,N)02(B,G,S)(-R,Z)-A AVA3000-(F,N)03(B,G,S)(-R,Z)-A AVA4000-(F,N)04(B,G,S)(-R,Z