Compact Vacuum Unit

and Z (During de-energizing) Note 2) 3 times in each direction of X, Y and Z (During de-energizing) Supply Valve/Release Valve Specifications Supply valve Large flow type (N.C.)

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

9 y !7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w 12 to 40 @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !8 @1 @5 u w Rod cross section for 12, 16, 20, and 25 Rod cross section for 32 and 40 With end lock 12 to 40 y !7 !6 q !0 o @2 @3 @4 @6 e r !8 @5 @1 i @8 !4 !5 !2 @9 !3 w Caution Disassembly/Replacement A special tool is required when reassembling the cylinder after disassembled.

Compact Slide Series MXH

0 @0 @0 y @1 !6 w q !9 t !8 !0 i !1 r !4 @2 u o !3 @4 e !5 !1 r u @2 @3 !3 @4 e !2 MXH16/20 (16, 20) @0 y @1 !7 w q!9 t !8 i !0 !1 r u @2 @3 !3 @4 e !2 Component Parts Component Parts Description Material Note Note Description Material No.

10 to 60C (No freezing or condensation)Operating/Stored: 35 to 85% RH (No condensation)1000 VAC for 1 minute between live parts and case50 M or more between live parts and case (at 500 VDC Mega)10 to 150 Hz at whichever is smaller of 1.5 mm amplitude or 20 m/s2 acceleration, in X, Y, Z directions, for 2 hours each (Non-energized)100 m/s2 in X, Y, Z directions, 3 times each (Non-energized

Air Catch Sensor

Brown DC (+) OUT 1 OUT 2 OUT 3 OUT 4 OUT 5 GND VCC NC OUT 6 L side R side Load Black OUT Main circuit + 12 to 24V DC MAX.80mA PSE Blue DC () ZSE4 ISE4 ZSE5 ISE5 PNP Open Collector (Sourcing) ZSE6 ISE6 Brown DC (+) q w e r t y ZSE3 ISE3 Main circuit 12 to 24V DC MAX.80mA + Black OUT GS Load Blue DC () PS ISA Precautions ZSE1 ISE1 Be sure to read before handling.

AMR3000 to 6000

If it does not locked easily, turn the handle s l i g h t l y c l o c k w i s e o r counterclockwise; then, push it until the orange colored line is no longer visible.

E-P HYREG ® Series VY1 1

VY1A00 1, VY1B00 1 (Pilot valve: VY1D00-00) Working principle The supply (P to A) valve of valve y and the exhaust (A to R) valve close due to the balance between actuating forces F1 and F2.

IS1000

0 IS1000 No. q w e r t y u i o !

PS1000/PS1100

Pressure Switch Calibration Withstand voltage 10 to 500 Hz Pulse width 1.5 mm or acceleration 98 m/s2 (at the smaller vibration) in X, Y, Z directions (2 hours) Vibration resistance Use the calibration adjustment to set ON pressure. Rotate clockwise to increase pressure setpoint. For setting vacuum, rotate counterclockwise.

High Purity Fluoropolymer Needle Valve Series LVN 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of needle rotations Number of needle rotations Number of needle rotations Construction t r w e With reducer q i A y u y u Part lists y Description No.

VNB

C.O. type does not have a return spring y. 12 (P1) port 10(P2) port Working Principle (Vacuum pilot type is excluded) VNB0 , 1 (N.C.)

VNH

Then valve element B y connected to the valve element A t is open. When the pilot operated solenoid valve !2 is energized, the pilot air supplied to the bottom of the piston u moves upward to open the valve element A t and closes the valve element B y. Because rod !0 is connected to valve element A t by parallel pin !1.

VVX31/32/33

Note 2) Value on option V, R, Y (Nonleak, Vacuum). Note) The value is the case of no grease applied on armature. 17-3-88 3 Series VVX31/32/33 Direct Operated 3 Port Solenoid Valve/Manifold For Air, Gas, Vacuum and Oil The models VX31/32/33 have been revised. For details, please refer to catalog no. ES70-26A. Similar updating for other VX series are scheduled to follow shortly.

VXD21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VXD2272/2382/2392 VXD2270/2380/2390 Operation When the coil o is energized, the armature assembly u is attracted into the core of the core assembly y and the pilot valve A opens.

VXP21/22/23

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VXP2272/2382/2392 VXP2270/2380/2390 Operation When the coil o is energized, the armature assembly u is attracted into the core of the core assembly y and the pilot valve A opens.

VXR21/22/23

Standard BC6 BC6 NBR Stainless steel, Brass NBR Standard BC6 BC6 NBR Stainless steel, Brass NBR Body Bonnet O-ring Diaphragm assembly Valve spring Body Bonnet O-ring Diaphragm assembly Valve spring q w e q w e FKM Stainless steel, Brass FKM FKM Stainless steel, Brass FKM r r Stainless steel Stainless steel t t y Core assembly Stainless steel, Copper y Core assembly Stainless steel,

VHS

If it is smaller, air leakage will occur due to back pressure. y q w !4 SlA !7 !4 3(R) VlA !1 e 3(R) Effective area (mm2) Model Component Parts VHS 2500, 3500 5 VM/VR Description Material ADC12 ZDC2 ADC12 Zinc alloy Zinc alloy C3604B A2017B C3604B Description No. q w e r t y u i No. !0 !1 !2 !3 !4 !5 !6 !7 !

VKF300

lead wire length: 600mm) D-DIN type terminal 4 5 6 7 9 Order made Port size M5 01 M5 x 0.8 Rc(PT) 1/8 (port A) VKF332 (with bracket) Body ported (single type) 5 G M5 Body ported (for manifold) 5 G M5 VKF333 5 G 01 VKF334 Base mounted Light/Surge voltage suppressor Valve option Port size For vacuum For low power consumption For vacuum/low power consumption For long loading time 01 Nil V Y

VXA21/22

Description Standard Brass Body Valve assembly Piston assembly Piston spring Stainless steel q Stainless steel FPM/EPR Stainless steel, Brass, NBR, Polyacetal w e r Polyacetal/NBR y t O ring Pilot cover NBR Aluminium Stainless steel FPM/EPR 4.1-58 VXA21/22 How to Order VXA22 VXA21 Bracket Model B None With bracket Select a model from the highest operating pressure difference and the characteristic

RB/RBL/RBQ

Component Parts Description Outer tube Piston rod Piston Bearing Return spring Stopper Material Rolled steel Special steel Special steel Description Check ball Accumulator Rod seal Scraper Bumper Material Bearing steel Fluoro rubber NBR NBR Polyurethane Treatment Treatment Black nickel plated Heat treated, Hard chrome plated Heat treated No. q w e r t y No. u i o !0 !